Jorge Velasco
Postdoctoral Researcher
Postdoctoral Researcher
T106 Chemical and Metallurgical Eng
Full researcher profile
https://research.aalto.fi/...
E-post
[email protected]
Telefonnummer
+358503135836
Forskningsgrupp
- Catalysis, Postdoctoral Researcher
Publikationer
Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model
Jänis Järvilehto, Jorge A. Velasco, Jihong Yim, Christine Gonsalves, Riikka L. Puurunen
2023
Physical Chemistry Chemical Physics
Simulation of Conformality of ALD Growth Inside Lateral Channels: Comparison Between a Diffusion-Reaction Model and a Ballistic Model
Jorge A. Velasco, Jänis Järvilehto, Jihong Yim, Christine Gonsalves, Emma Verkama, Riikka L. Puurunen
2022
Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics
Jorge Velasco Calsina, Christine Gonsalves, Gizem Ersavas Isitman, Jihong Yim, Emma Verkama, Daulet Izbassarov, Ville Vuorinen, Riikka Puurunen
2022
Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile
Jihong Yim, Emma Verkama, Jorge A. Velasco, Karsten Arts, Riikka L. Puurunen
2022
Physical Chemistry Chemical Physics