Saara Hakanen

Part-time doctoral student working full-timed in Murata Electronics Oy. Murata Electronics is specialized in the research, design, and production of silicon based capacitive 3D MEMS (Micro Electro Mechanical Systems) sensors.

Research work will be related to MEMS processing, focusing on areas of DRIE (Deep Reactive Ion Etching) of silicon structures and ALD (Atomic Layer Deposition) films utilization in MEMS processes.