Sami Franssila
Professori
T105 Chemistry and Materials
Professori
Full researcher profile
https://research.aalto.fi/...
Sähköposti
[email protected]
Puhelinnumero
+358505361699
Osaamisalueet
Thin film technology, Microfluidics, MEMS, Nanotechnology, Microfabrication
Tutkimusryhmät
- Microfabrication, Professor
Julkaisut
(poster) Bosch-etched nanojungle black silicon and its applications
Lingju Meng, Moe Awashra, Xiaolong Liu, Seyed Mehran Mirmohammadi, Ville Jokinen, Sami Franssila
2024
Ultrasensitive Monolithic Dopamine Microsensors Employing Vertically Aligned Carbon Nanofibers
Lingju Meng, Maedeh Akhoundian, Anas Al Azawi, Yalda Shoja, Pei-Yin Chi, Kristoffer Meinander, Sami Suihkonen, Sami Franssila
2024
Advanced Healthcare Materials
Anisotropic Superhydrophobic Properties Replicated from Leek Leaves
Seyed Mehran Mirmohammadi, Hamidreza Daghigh Shirazi, Miika Heikkilä, Sami Franssila, Jaana Vapaavuori, Ville Jokinen
2024
Small
Superhydrophobic Copper-Composite Surfaces Exert Antibacterial Effects against Gram-Negative and -Positive Bacteria
Seyed Mehran Mirmohammadi, Kirsi Savijoki, Sasha Hoshian, Pekka Varmanen, Jari Yli-Kauhaluoma, Ville Jokinen, Sami Franssila
2023
Advanced Materials Interfaces
Microalgae Chlorella vulgaris and kraft lignin stabilized cellulosic wet foams for camouflage
Nina Forsman, Tia Lohtander, Juha Jordan, Ngoc Huynh, Ari Seppälä, Päivi Laaksonen, Sami Franssila, Monika Österberg
2022
Soft Matter
Lightweight lignocellulosic foams for thermal insulation
Tia Lohtander, Reima Herrala, Päivi Laaksonen, Sami Franssila, Monika Österberg
2022
Cellulose
Microfabrication atomic layer deposited Pt NPs/TiN thin film on silicon as a nanostructure signal Transducer: Electrochemical characterization toward neurotransmitter sensing
Yalda Shoja, Noora Isoaho, Ville Jokinen, Sami Franssila
2022
Applied Surface Science
Fabrication of elastic, conductive, wear-resistant superhydrophobic composite material
Seyed Mehran Mirmohammadi, Sasha Hoshian, Ville P. Jokinen, Sami Franssila
2021
Scientific Reports
Slippery and magnetically responsive micropillared surfaces for manipulation of droplets and beads
Anas Al-Azawi, Christoph Horenz, Topi Tupasela, Olli Ikkala, Ville Jokinen, Sami Franssila, Robin H. A. Ras
2020
AIP Advances
Tunable and Magnetic Thiol-ene Micropillar Arrays
Anas Al-Azawi, Zoran Cenev, Topi Tupasela, Bo Peng, Olli Ikkala, Quan Zhou, Ville Jokinen, Sami Franssila, Robin Ras
2020
Macromolecular Rapid Communications
A microfluidic chip architecture enabling a hypoxic microenvironment and nitric oxide delivery in cell culture
Samineh Barmaki, Daniela Obermaier, Esko Kankuri, Jyrki Vuola, Sami Franssila, Ville Jokinen
2020
Micromachines
Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures
Joonas J. Heikkinen, Janez Košir, Ville Jokinen, Sami Franssila
2020
Journal of Micromechanics and Microengineering
Superhydrophobic Antireflection Coating on Glass Using Grass-like Alumina and Fluoropolymer
Kirill Isakov, Christoffer Kauppinen, Sami Franssila, Harri Lipsanen
2020
ACS applied materials & interfaces
Novel carbon film induces precocious calcium oscillation to promote neuronal cell maturation
Anastasia Ludwig, Sebnem Kesaf, Joonas J. Heikkinen, Tatiana Sukhanova, Shokoufeh Khakipoor, Florence Molinari, Christophe Pellegrino, Sung I. Kim, Jeon G. Han, Henri J. Huttunen, Sari E. Lauri, Sami Franssila, Ville Jokinen, Claudio Rivera
2020
Scientific Reports
Scalable Superomniphobic Surfaces
Ville Rontu, Ville Jokinen, Sami Franssila
2020
Journal of Microelectromechanical Systems
Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon
Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen
2019
Micromachines
Three dimensional carbon multielectrode arrays for electrochemical detection of dopamine in low concentrations
Joonas J. Heikkinen, Noora Isoaho, Ville Jokinen, Sami Franssila
2019
Disposable Microfluidic Sensor Based on Nanocellulose for Glucose Detection
Khan Mohammad Ahsan Uddin, Ville Jokinen, Farzin Ahangiri, Sarni Franssila, Orlando J. Rojas, Sampo Tuukkanen
2019
Global Challenges - An Innovative Journal for Tackling Humanity's Global Challenges
Practical realization of a sub-λ/2 acoustic jet
Daniel Veira Canle, Tuukka Kekkonen, Joni Mäkinen, Tuomas Puranen, Heikki J. Nieminen, Antti Kuronen, Sami Franssila, Tapio Kotiaho, Ari Salmi, Edward Hæggström
2019
Scientific Reports
A microfluidic oxygen sink to create a targeted cellular hypoxic microenvironment under ambient atmospheric conditions
Samineh Barmaki, Ville Jokinen, Daniela Obermaier, Daria Blokhina, Matti Korhonen, Robin H.A. Ras, Jyrki Vuola, Sami Franssila, Esko Kankuri
2018
Acta Biomaterialia
Platinum Recovery from Industrial Process Solutions by Electrodeposition-Redox Replacement
Petteri Halli, Joonas J. Heikkinen, Heini Elomaa, Benjamin P. Wilson, Ville Jokinen, Kirsi Yliniemi, Sami Franssila, Mari Lundström
2018
ACS Sustainable Chemistry and Engineering
Plasma etched carbon microelectrode arrays for bioelectrical measurements
Joonas J. Heikkinen, Tiina Kaarela, Anastasia Ludwig, Tatiana Sukhanova, Shokoufeh Khakipoor, Sung Il Kim, Jeon Geon Han, Henri J. Huttunen, Claudio Rivera, Sari E. Lauri, Tomi Taira, Ville Jokinen, Sami Franssila
2018
Diamond and Related Materials
Superhydrophobic blood-repellent surfaces
Ville Jokinen, Esko Kankuri, Sasha Hoshian, Sami Franssila, Robin Ras
2018
Advanced Materials
Controlled communication between physically separated bacterial populations in a microfluidic device
Ekaterina Osmekhina, Christopher Jonkergouw, Georg Schmidt, Farzin Jahangiri, Ville Jokinen, Sami Franssila, Markus Linder
2018
Communications Biology
Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila
2018
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test
Ville Rontu, Anton Nolvi, Ari Hokkanen, Edward Haeggstrom, Ivan Kassamakov, Sami Franssila
2018
Materials Research Express
Sacrificial layer technique for releasing metallized multilayer SU-8 devices
Anand Tatikonda, Ville P. Jokinen, Hanno Evard, Sami Franssila
2018
Micromachines
Friction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces
Anas Al-Azawi, Mika Latikka, Ville Jokinen, Sami Franssila, Robin H.A. Ras
2017
Small
Etching Techniques for Superhydrophobic Surface Fabrication
Sami Franssila
2017
Non-wettable Surfaces: Theory, Preparation, and Applications
Water and Blood Repellent Flexible Tubes
Sasha Hoshian, Esko Kankuri, Robin H.A. Ras, Sami Franssila, Ville Jokinen
2017
Scientific Reports
Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis
Katriina Lipponen, Sari Tähkä, T. Sikanen, V. Jokinen, A. Tatikonda, S. Franssila, R. Kostiainen, T. Kotiaho
2017
Analyst
SU-8 Based Pyrolytic Carbon for the Electrochemical Detection of Dopamine
Emilia Peltola, Joonas J. Heikkinen, Katariina Sovanto, Sami Sainio, Anja Aarva, Sami Franssila, Ville Jokinen, Tomi Laurila
2017
JOURNAL OF MATERIALS CHEMISTRY. B
Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System
Kätlin Pitman, Merlin Raud, Gianmario Scotti, Ville Jokinen, Sami Franssila, Jaak Nerut, Enn Lust, Timo Kikas
2017
Electroanalysis
Electrooxidation of hexacyanoferrate(II) anions and electroreduction of oxygen in the microfabricated electrochemical sensor-array system
K. Pitman, J. Nerut, E. Lust, S. Franssila, M. Raud, T. Kikas
2017
Selected Proceedings from the 231st ECS Meeting New Orleans, LA - Spring 2017
Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
Ville Rontu, Anne Selent, Vladimir V. Zhivonitko, Gianmario Scotti, Igor V. Koptyug, Ville-Veikko Telkki, Sami Franssila
2017
CHEMISTRY: A EUROPEAN JOURNAL
Mechanical properties of ultrathin ALD Al2O3 films
Ville Rontu, Ari Hokkanen, Sami Franssila
2017
Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Maria Berdova, Xuwen Liu, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Marco Fanciulli, Sami Franssila
2016
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications
Maria Berdova, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Luca Lamagna, Stefano Losa, Silvia Rossini, Roberto Somaschini, Salvatore Gioveni, Marco Fanciulli, Sami Franssila
2016
Applied Surface Science
Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device
Cristina Henriques Gaspar, Tiina Sikanen, Sami Franssila, Ville Jokinen
2016
Biomicrofluidics
Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
Sasha Hoshian, Cristina Henriques Gaspar, Teemu Vasara, Farzin Jahangiri, Ville Jokinen, Sami Franssila
2016
Micromachines
Novel nanostructure replication process for robust superhydrophobic surfaces
Sasha Hoshian, Ville Jokinen, Sami Franssila
2016
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Robust hybrid elastomer/metal-oxide superhydrophobic surfaces
Sasha Hoshian, Ville Jokinen, Sami Franssila
2016
Soft Matter
UV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers
Tero Kämäräinen, Lokanathan R. Arcot, Leena-Sisko Johansson, Joseph Campbell, Tekla Tammelin, Sami Franssila, Janne Laine, Orlando J. Rojas
2016
Cellulose
Cellulose Nanofibril Film as a Piezoelectric Sensor Material
Satu Rajala, Tuomo Siponkoski, Essi Sarlin, Marja Mettänen, Maija Vuoriluoto, Arno Pammo, Jari Juuti, Orlando J. Rojas, Sami Franssila, Sampo Tuukkanen
2016
ACS Applied Materials and Interfaces
Fabrication of superomniphobic nanoserif surfaces
Ville Rontu, Sasha Hoshian, Syed Shah, Ville Jokinen, Sami Franssila
2016
Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation
Prasanna Sakha, Aino Vesikansa, Ester Orav, Joonas Heikkinen, Tiina-Kaisa Kukko-Lukjanov, Alexandra Shintyapina, Sami Franssila, Ville Jokinen, Henri J. Huttunen, Sari E. Lauri
2016
Frontiers in Cellular Neuroscience
Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka Puurunen, Sami Franssila
2015
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
MEMS lithography
Sami Franssila, Santeri Tuomikoski
2015
Handbook of silicon based MEMS materials and technologies, 2nd edition
Microfluidics and BioMEMS in silicon
Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas
2015
Handbook of silicon based MEMS materials and technologies, 2nd edition
Silicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase
Saara Hirvonen, Katriina Lipponen, Ville Jokinen, Sami Franssila, Risto Kostiainen, Tapio Kotiaho
2015
MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring
Sasha Hoshian, Ville Jokinen, Klas Hjort, Robin H. A. Ras, Sami Franssila
2015
ACS Applied Materials and Interfaces
Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating
Sasha Hoshian, Ville Jokinen, Villeseveri Somerkivi, Lokanathan Arcot Raghupathi, Sami Franssila
2015
ACS Applied Materials and Interfaces
Making porous conductive carbon films with unbalanced magnetron sputtering
Sung II Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, Sami Franssila
2015
Japanese Journal of Applied Physics
Deep Reactive Ion Etching
Franz Lärmer, Sami Franssila, Lauri Sainiemi, Kai Kolari
2015
Handbook of silicon based MEMS materials and technologies, 2nd edition
Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms
Sofia M E Nilsson, Ingo Aumüller, Alexandros Kiriazis, Gustav Boije af Gennäs, Markus Haapala, Gianmario Scotti, Sami Franssila, Jari Yli-Kauhaluoma, Tapio Kotiaho
2015
MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry
Nina Nordman, Susanna Lauren, Sami Franssila, Tapio Kotiaho, Risto Kostiainen, Tiina Sikanen
2015
Journal of Chromatography A
Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry
Nina Nordman, Brianda Barrios-Lopez, Susanna Laurén, Pia Suvanto, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen
2015
Electrophoresis
Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors
Satu Rajala, Maija Vuoriluoto, Orlando Rojas, Sami Franssila, Sampo Tuukkanen
2015
IMEKO 2015 conference, XXI World Congress IMEKO, ISWFPC 2015. 18th International Symposium on Wood, Fiber and Pulping Chemistry, Tullin, September 07-08, 2015
Piezoelectric sensitivity measurements of cellulose nanofibril sensors
Satu Rajala, Maija Vuoriluoto, Orlando J. Rojas, Sami Franssila, Sampo Tuukkanen
2015
XXI IMEKO World Congress "Measurement in Research and Industry"
Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Ville Rontu, Olli Pitkänen, Joonas Heikkinen, Yanling Ge, Krisztian Kordas, Sami Franssila, Sampo Tuukkanen
2015
Handbook of silicon based MEMS materials and technologies
Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos
2015
Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli, Teruaki Motooka, Veli Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos
2015
Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila
2014
Corrigendum: Exceptionally strong and robust millimeterscale graphene-alumina composite (Nanotechnology (2014) 25, (355701))
Maria Berdova, Alexander Pyymaki Perros, Won Kim, Juha Riikonen, Tuomo Ylitalo, Jouni Heino, Changfeng Li, Ivan Kassamakov, Edward Hæggström, Harri Lipsanen, Sami Franssila
2014
Nanotechnology
Exceptionally strong and robust millimeter-scale graphenealumina composite membranes
Maria Berdova, Alexander Perros, Wonjae Kim, Juha Riikonen, Tuomo Ylitalo, Jouni Heino, Changfeng Li, Ivan Kassamakov, Edward Hæggström, Harri Lipsanen, Sami Franssila
2014
Nanotechnology
Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques
Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila
2014
Acta Materialia
Enhanced performance of a silicon microfabricated direct methanol fuel cell with PtRu catalysts supported on few-walled carbon nanotubes
Maryam Borghei, Gianmario Scotti, Petri Kanninen, Timo Weckman, Ilya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Tanja Kallio, Virginia Ruiz
2014
Energy
MME 2013 Editorial Preface
Sami Franssila, Kai Kolari
2014
Journal of Micromechanics and Microengineering
Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos
Sasha Hoshian, Ville Jokinen, Klas Hjort, Robin H A Ras, Sami Franssila
2014
18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
Calibrating an optical scanner for quality assurance of large area radiation detectors
Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov
2014
Measurement Science and Technology
Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface
Juan Li, X.L. Tian, A. P. Perros, Sami Franssila, Ville Jokinen
2014
Advanced Materials Interfaces
Characterization of nano-coated micro- and nanostructures by pushing
Ville Liimatainen, Janne Venäläinen, Mikko Koverola, Jussi Lyytinen, Ville Rontu, Maria Berdova, Jari Koskinen, Sami Franssila, Quan Zhou
2014
International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale,Taipei, Taiwan, October 27-31, 2014
Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres
Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen
2014
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres
Jussi Lyytinen, Maria Berdova, Petri Hirvonen, Xuwen Liu, Sami Franssila, Quan Zhou, Jari Koskinen
2014
RSC Advances
A micro heat exchanger microfabricated from bulk aluminium
G. Scotti, S. Franssila
2014
Journal of Physics: Conference Series
A micro heat exchanger microfabricated from bulk aluminium Journal of Physics
Gianmario Scotti, Sami Franssila
2014
PowerMEMS 2014, Awaji, Japan, October 10-21, 2014
Bulk-Aluminum Microfabrication for Micro Fuel Cells
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2014
Journal of Microelectromechanical Systems
Laser Additive Manufacturing of Stainless Steel Micro Fuel Cells
Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila
2014
Journal of Power Sources
Simple Stacking Methods for Silicon Micro Fuel Cells
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2014
Micromachines
Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips
Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville Jokinen, Sami Franssila
2014
Micromachines
Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR
Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug
2014
Angewandte Chemie
Printable and disposable supercapacitor from nanocellulose and carbon nanotubes
S. Tuukkanen, S. Lehtimäki, F. Jahangir, A.-P. Eskelinen, D. Lupo, S. Franssila
2014
Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014
Characterization of thin film adhesion by MEMS shaft-loading blister testing
Maria Berdova, Jussi Lyytinen, Kestuti Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen
2013
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Microtechnologies to fuel neurobiological research with nanometer precision
Cecilia A. Brunello, Ville Jokinen, Prasanna Sakha, Hideyuki Terazono, Fumimasa Nomura, Tomoyuki Kaneko, Sari E. Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda, Henri J. Huttunen
2013
Journal of Nanobiotechnology
Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry
Kalle Hanhijarvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila, Edward Haeggstrom
2013
IEEE-ASME Transactions on Mechatronics
A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements
Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri, Henri J. Huttunen
2013
Journal of Neuroscience Methods
Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures
Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen, Sami Franssila
2013
Colloids and Surfaces A: Physicochemical and Engineering Aspects
Microfluidics via controlled imbibition
Ville Jokinen, Sami Franssila
2013
Biomimetic, Bio-Inspired and Self-Assembled Materials for Engineered Surfaces and Applications
Cell adhesion and osteogenic differentiation on three-dimensional pillar surfaces
Emilia Kaivosoja, Pia Suvanto, Goncalo Barreto, Susanna Aura, Antti Soininen, Sami Franssila, Yrjo T. Konttinen
2013
JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A
Nondestructive inspection of buried channels and cavities in silicon
Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila, Edward Hæggström
2013
Journal of Microelectromechanical Systems
Picosecond laser ablation for silicon micro fuel cell fabrication
Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio, Sami Franssila
2013
Journal of Micromechanics and Microengineering
Laser direct writing of thick hybrid polymer microstructures
Akanksha Singh, Gianmario Scotti, Ville Jokinen, Sami Franssila
2013
2013 Transducers and Eurosensors XXVII
Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry
M. Wirtssohn, Markus Haapala, Lauri Sainiemi, Sami Franssila
2013
Journal of Micromechanics and Microengineering
Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips
Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppaniemi, Gianmario Scotti, Sami Franssila, Igor V. Koptyug
2013
Lab on a chip
Stroboscopic supercontinuum white-light interferometer for MEMS characterization
Kalle Hanhijärvi, I. Kassamakov, Ville Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Hæggström
2012
Optics Letters
Non-destructive 3D measurement of microchannels
Ville Heikkinen, A. Nolvi, I. Kassamakov, K. Grigoras, S. Franssila, E. Haeggstrom
2012
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012
Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggstrom
2012
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012
A practical guide for the fabrication of microfluidic devices using glass and silicon
Ciprian Iliescu, Hayden Taylor, Marioara Avram, Jianmin Miao, Sami Franssila
2012
Biomicrofluidics
Oxygen and nitrogen plasma hydrophilization and hydrophobic recovery of polymers
Ville Jokinen, Pia Suvanto, Sami Franssila
2012
Biomicrofluidics
Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening
Teemu Nissila, Nina Backman, Marjo Kolmonen, Antti Leinonen, Alexandros Kiriazis, Jari Yli-Kauhaluoma, Lauri Sainiemi, Risto Kostiainen, Sami Franssila, Raimo A. Ketola
2012
International Journal of Mass Spectrometry
IR-SWLI for subsurface imaging of large MEMS structures
A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, Tuomo Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Haeggstrom
2012
Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012
Use of methacrylate monolith inside of SU-8 microchip for on-line concentration of hydrophobic analytes before on-chip CZE-ESI/MS analysis
Nina Nordman, Brianda Barrios, Tiina Sikanen, Susanna Aura, Pia Suvanto, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2012
Abstracts of Papers of the American Chemical Society
A microfabricated micropillar liquid chromatographic chip monolithically integrated with electrospray ionization tip
Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila
2012
Lab on a chip
Integration of carbon felt gas diffusion layers in silicon micro fuel cells
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2012
Journal of Micromechanics and Microengineering
Microchip capillary electrophoresis-electrospray ionization-mass spectrometry of intact proteins using uncoated Ormocomp microchips
Tiina Sikanen, Susanna Aura, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2012
Analytica Chimica Acta
Reversible Switching between Superhydrophobic States on a Hierarchically Structured Surface
Tuukka Verho, Juuso T. Korhonen, Lauri Sainiemi, Ville Jokinen, Chris Bower, Kristian Franze, Sami Franssila, Piers Andrew, Olli Ikkala, Robin H.A. Ras
2012
Proceedings of the National Academy of Sciences of the United States of America
Porous inorganic-organic hybrid material by oxygen plasma treatment
Susanna Aura, Ville Jokinen, Mikko Laitinen, Timo Sajavaara, Sami Franssila
2011
Journal of Micromechanics and Microengineering
Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation
Kestutis Grigoras, Marina Y. Zavodchikova, Albert G. Nasibulin, Esko I. Kauppinen, Vladimir Ermolov, Sami Franssila
2011
Journal of Nanoscience and Nanotechnology
SIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS
Kalle Hanhijärvi, Heikki Ojala, Anders E. Wallin, Gabija Ziedaite, Susanna Aura, Sami Franssila, Dennis H. Bamford, Edward Hæggström
2011
Biophysical Society 55th Annual Meeting, Baltimore, Maryland, March 5-9, 2011
Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control
V. Heikkinen, K. Hanhijärvi, J. Aaltonen, H. Räikkönen, B. Wälchli, T. Paulin, I. Kassamakov, K. Grigoras, S. Franssila, E. Hæggström
2011
SPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011
Infrared Scanning White Light Interferometry Using a Solid State Light Source
V. Heikkinen, J. Aaltonen, B. Wälchli, H. Räikkönen, I Kassamakov, T. Cholakova, K. Grigorias, S. Franssila, R. Kakanakov, E. Hæggström
2011
SPIE Photonics West, Proc. SPIE 7928, San Francisco, California, USA, 22 27 January 2011
Controlled Lateral Spreading and Pinning of Oil Droplets Based on Topography and Chemical Patterning
Ville Jokinen, Lauri Sainiemi, Sami Franssila
2011
Langmuir
Engineered droplets for dried droplet solute deposition by mass spectrometric imaging
Ville Jokinen, Sami Franssila, Marc Baumann
2011
Microfluidics and Nanofluidics
MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS
V. Jokinen, T. Sikanen, R. Kostiainen, Sami Franssila
2011
Proc. MicroTAS 2011, Seattle, October 2-6, 2011
Feasibility of capillary liquid chromatography-microchip-atmospheric pressure photoionization-mass spectrometry for pesticide analysis in tomato
Anneli Kruve, Markus Haapala, Ville Saarela, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Raimo A. Ketola
2011
Analytica Chimica Acta
Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets
Henrikki Mertaniemi, Ville Jokinen, Lauri Sainiemi, Sami Franssila, Abraham Marmur, Olli Ikkala, Robin H.A. Ras
2011
Advanced Materials
Integrated microelectrode hot electron electrochemiluminescent sensor for microfluidic applications
Antti J. Niskanen, Tiina Ylinen-Hinkka, Sakari Kulmala, Sami Franssila
2011
Sensors and Actuators B: Chemical
Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions
Teemu Nissila, Lauri Sainiemi, Mika-Matti Karikko, Marianna Kemell, Mikko Ritala, Sami Franssila, Risto Kostiainen, Raimo A. Ketola
2011
Lab on a chip
Rapid and sensitive drug metabolism studies by SU-8 microchip capillary electrophoresis-electrospray ionization mass spectrometry
Nina Nordman, Tiina Sikanen, Maria-Elisa Moilanen, Susanna Aura, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2011
Journal of Chromatography A
RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP
Nina Nordman, Tiina Sikanen, Susanna Aura, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2011
Proc. MicroTAS 2011, Seattle, October 2-6, 2011
INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION
Miina Ruokolainen, Tiina Sikanen, Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila, Risto Kostiainen, Tapio Kotiaho
2011
Proc. MicroTAS 2011, Seattle, October 2-6, 2011
MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES
Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila, Risto Kostiainen
2011
Proc. Transducers 2011, Beijing, June 5-9, 2011
Microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis
Lauri Sainiemi, Teemu Nissilä, Risto Kostiainen, Raimo A. Ketola, Sami Franssila
2011
Lab on a chip
Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication
Lauri Sainiemi, Ville Jokinen, Ali Shah, Maksim Shpak, Susanna Aura, Pia Suvanto, Sami Franssila
2011
Advanced Materials
Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells
Gianmario Scotti, Maija Mäkinen, Petri Kanninen, Tanja Kallio, Sami Franssila
2011
Proc. PowerMEMS 2011, Seoul, Republic of Korea November 15-18, 2011
Refractive index of silicon with various doping levels at high temperatures
M. Shpak, Lauri Sainiemi, P. Kärhä, M. Heinonen, S. Franssila, E. Ikonen
2011
Newrad 2011, Maui, Hawaii, September 18.-23, 2011
INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER
Tiina Sikanen, Susanna Aura, Brianda Barrios-Lopez, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2011
Proc. MicroTAS 2011, Seattle, October 2-6, 2011
SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING
P. Suvanto, V. Jokinen, Sami Franssila
2011
Proc. MicroTAS 2011, Seattle, October 2-6, 2011
Lithography-free fabrication of carbon nanotube network transistors
Marina Y. Timmermans, Kestutis Grigoras, Albert G. Nasibulin, Ville Hurskainen, Sami Franssila, Vladimir Ermolov, Esko I. Kauppinen
2011
Nanotechnology
Mechanically Durable Superhydrophobic Surfaces
Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala, Robin H.A. Ras
2011
Advanced Materials
Determination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Tiina Ylinen-Hinkka, Antti J. Niskanen, Sami Franssila, Sakari Kulmala
2011
Immunoassay of C-reactive protein by hot electron induced electrochemiluminescence using integrated electrodes with hydrophobic sample confinement
Tiina Ylinen-Hinkka, Antti J. Niskanen, Sami Franssila, Sakari Kulmala
2011
Analytica Chimica Acta
Feasibility of capillary liquid chromatography/microchip atmospheric pressure photoionization mass spectrometry in analyzing anabolic steroids in urine samples
Linda Ahonen, Markus Haapala, Ville Saarela, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2010
Rapid Communications in Mass Spectrometry
Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures
Susanna Aura, Sami Franssila
2010
International Conference of Miniaturized systems for chemistry and life science
Feasability of SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microfluidic chips in the analysis of the human cell lysates
Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2010
Electrophoresis
Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching
Nikolai Chekurov, Kestutis Grigoras, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila
2010
Journal of Micromechanics and Microengineering
Introduction to Microfabrication
Sami Franssila
2010
“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Sami Franssila, Santeri Tuomikoski, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
2010
Integrated liquid chromatography - heated nebulizer microchip for mass spectrometry
Markus Haapala, Ville Saarela, Jaroslav Pól, Kai Kolari, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2010
Analytica Chimica Acta
Feasibility of gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry in analysis of anabolic steroids
Laura Hintikka, Markus Haapala, Sami Franssila, Tiia Kuuranne, Antti Leinonen, Risto Kostiainen
2010
Journal of Chromatography A
Analysis of selective androgen receptor modulators by gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry
Laura Luosujärvi, Markus Haapala, Mario Thevis, Ville Saarela, Sami Franssila, Raimo A Ketola, Risto Kostiainen, Tapio Kotiaho
2010
Journal of the American Society for Mass Spectrometry
Environmental and food analysis by desorption atmospheric pressure photoionizationmass spectrometry
Laura Luosujärvi, Sanna Kanerva, Ville Saarela, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kaupplia
2010
Rapid Communications in Mass Spectrometry
Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Minna Malin, Harri Korhonen, Ville Jokinen, Susanna Aura, M. Leinikka, Sami Franssila, Jukka Seppälä
2010
Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Antti J. Niskanen, Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila
2010
Sensors and Actuators B: Chemical
Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence
Antti J. Niskanen, Tiina Ylinen-Hinkka, Matti Pusa, Sakari Kulmala, Sami Franssila
2010
Thin Solid Films
Ionspray Microchip
Jaroslav Pól, Tiina J. Kauppila, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2010
Rapid Communications in Mass Spectrometry
Sähköä metanolipatruunasta
Anja Ranta, Tuula Noponen, Tom Granström, Gianmario Scotti, Petri Kanninen, Sami Franssila, Aarne Halme
2010
Prosessori
A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2010
Enschede, The Netherlands, 26.9.-29.9.2010
Characterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
Gianmario Scotti, Petri Kanninen, Maija Mäkinen, Tanja Kallio, Sami Franssila
2010
Palanga, Lithuania, 10.9.2010
Silicon nanograss as micro fuel cell gas diffusion layer
Gianmario Scotti, P. Kanninen, Mika Mäkinen, T. Kallio, S. Franssila
2010
MICRO AND NANO LETTERS
Optical Temperature Measurements of Silicon Microbridge Emitters
Maksim Shpak, Lauri Sainiemi, Maija Ojanen, Petri Kärhä, Martti Heinonen, Sami Franssila, Erkki Ikonen
2010
Applied Optics
Temperature measurements of a glowing microbridge
Maksim Shpak, Lauri Sainiemi, Maija Ojanen, Petri Kärhä, Martti Heinonen, Sami Franssila, Erkki Ikonen
2010
Applied Optics
Dynamic coating of SU-8 microfluidic chips with phospholipid disks
Tiina Sikanen, Susanne Wiedmer, Liisa Heikkilä, Sami Franssila, Risto Kostiainen, Tapio Kotiaho
2010
Electrophoresis
Hybrid Ceramic-Polymers New, Non-Biofouling and Optically Transparent Materials for Microfluidics
Tiina Sikanen, Susanna Aura, Liisa Heikkilä, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2010
Analytical Chemistry
Microchip technology in mass spectrometry
Tiina Sikanen, Sami Franssila, Tiina J. Kauppila, Risto Kostiainen, Tapio Kotiaho, Raimo A. Ketola
2010
MASS SPECTROMETRY REVIEWS
Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry (DIOS-MS)
Niina Suni, Markus Haapala, Elina Främ, Emma Härkönen, Mikko Ritala, Lauri Sainiemi, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2010
Lab on a chip
Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Susanna Aura, Ville Jokinen, Marc Baumann, Sami Franssila
2009
UV-enbossed inorganic-organic hybrid nanopillars for bioapplications
Susanna Aura, Ville Jokinen, Lauri Sainiemi, Marc Baumann, sami Franssila
2009
Journal of Nanoscience and Nanotechnology
SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2009
Applications of focused ion beam in nanofabrications
Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen
2009
Fysiikan päivät 2009, Helsinki
Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Nikolai Chekurov, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila
2009
Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures
Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen
2009
MRS Spring Meeting 2009, April, San Francisco, USA
Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen
2009
The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Ion Etching
Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen
2009
Nanotechnology
Atomic layer deposition on single-walled carbon nanotubes for device application
Kestutis Grigoras, M.Y Zavodchikova, A.G Nasibulin, E.I Kauppinen, V. Ermolov, S. Franssila
2009
Etching under the corner-inclined macropores by reactive ion etching
Kestutis Grigoras, Sami Franssila
2009
Physica Status Solidi A
Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
M. Haapala, S. Saarela, J. Pol, S. Franssila, T. Kotiaho, R. Kostiainen
2009
Microchip atmospheric pressure photoionization for analysis of pertoleum by FT-IVR mass spectrometry
Markus Haapala, Jeremiah M. Purcell, Ville Saarela, Sami Franssila, Ryan P. Rodgers, Christopher L. Hendrickson, Tapio Kotiaho, Alan Marshall, Risto Kostiainen
2009
Analytical Chemistry
Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
K. Hanhijärvi, Juha Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, E. Haeggström
2009
Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Laura Hintikka, Markus Haapala, Tiia kuuranne, Antti Leinonen, Ville Saarela, Sami Franssila, Risto Kostiainen
2009
Silicon-glass instrumented solid-phase extraction-zone electrophoresis microchip with thin amorphous silicon filn electrodes: perfomance in immunoaffinity analysis
Ari Hokkanen, Heli Siren, Lotta Amundsen, Kai Kolari, Sami Franssila, Santeri Tuomikoski, Ingmar Stuns, Stella Rovio, Tarja Nevanen, Kristiina Takkinen, Hans Söderlund
2009
Microsystem Technologies
Microstructured surfaces for directional wetting
Ville Jokinen, Marianne Leinikka, Sami Franssila
2009
Advanced Materials
Surface assisted laser desorption/ionization on two-layered amorhous silicon coated hydrid nanostructures
Ville Jokinen, Susanna Aura, Laura Luosujärvi, Lauri Sainiemi, Tapani Kotiaho, Sami Franssila, Marc Baumann
2009
Journal of the American Society for Mass Spectrometry
Microchip heated nebulizer as an atmospheric pressure thermospray ionization source for mass spectrometry
P. Keski-Rahkonen, Markus Haapala, Ville Saarela, Risto Kostiainen, Tapio Kotiaho, Sami Franssila, S. Auriola
2009
RCM
New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Laura Luosujärvi, Ville Vähänissi, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kauppila
2009
Electronic cooling a submicron-sized metallic beam
Juha Muhonen, Antti Niskanen, Matthias Meschke, Yury Pashkin, J.S. Tsai, L. Sainiemi, S. Franssila, Jukka Pekola
2009
Applied Physics Letters
Electronic cooling of submicron-sized metallic beams
Juha Muhonen, Antti Niskanen, Matthias Meschke, Yu.A. Pashkin, J.S. Tsai, L. Sainiemi, S. Franssila, Jukka Pekola
2009
The XLIII Annual Conference of the Finnish Physical Society (Physics Days 2009), Espoo, Finland, 12-14 March
Ultrathin insulating films on silicon foe electrochemiluminescence
Antti Niskanen, Tiina Ylinen-Hinkka, Sakari Kulmala, Sami Franssila
2009
Thin Solid Films
Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies
A.J. Niskanen, T. Ylinen-Hinkka, Sakari Kulmala, S. Franssila
2009
Thin Solid Films
Electrospray photoionization microchip for mass spectrometry
Teemu Nissilä, Lauri Sainiemi, Sami Franssila, Risto Kostiainen, Raimo Ketola
2009
Fully polymeric integrated microreactor/electrospray ionozation chip for on-chip digestion and mass spectrometric analysis
Teemu Nissilä, Lauri Sainiemi, Sami Franssila, Raimo Ketola
2009
Sensors and Actuators B: Chemical
Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Teemu Nissilä, Lauri Sainiemi, Mika-Matti Karikko, Marianna Kemell, Mikko Ritala, Sami Franssila, Risto Kostiainen, Raimo A. Ketola
2009
TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
T. Nissilä, L. Sainiemi, M-M. Karikko, M. Kemell, M. Ritala, S. Franssila, R. Kostiainen, R.A. Ketola
2009
Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Ville Saarela, Markus Haapala, Jaroslav Pol, Kai Kolari, Risto Kostiainen, Sami Franssila
2009
Microflidic heated gas jet shape analysis by temperature scanning
Ville Saarela, Markus Haapala, Risto Kostiainen, Tapani Kotiaho, Sami Franssila
2009
Journal of Micromechanics and Microengineering
Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Lauri Sainiemi, Jukka Viheriälä, Janne Laukkanen, Tapio Niemi, Sami Franssila
2009
Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses
Lauri Sainiemi, Kestas Grigoras, Ivan Kassamakov, Kalle Hanhijärvi, Juha Aaltonen, Ji Fan, Ville Saarela, Edward Haeggström, Sami Franssila
2009
Sensors and Actuators A, Physical
Suspended nanostructured alumina membranes
Lauri Sainiemi, Kestas Grigoras, Sami Franssila
2009
Nanotechnology
Transparent, flexible and superhydrophobic material based on three-dimensional mushroom-shaped PDMS microstructures
L. Sainiemi, V. Jokinen, S. Aura, S. Franssila
2009
Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2009
Symmetric silicon micro fuel cell with porous eletrodes
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila
2009
Transducers 2009, Denver, USA, June 21-25 2009
Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry
Tiina Sikanen, Susanna Aura, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2009
IMSC, Bremem 2009
Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Tiina Sikanen, Susanne Wiedmer, Liisa Heikkilä, Sami Franssila, Risto Kostiainen, Tapio Kotiaho
2009
Fully microfabricated polymer-based microfludic chips for bioanalysis
T. Sikanen, S. Franssila, S. Aura, S. Tuomikoski, T. Kotiaho, R. Kostiainen
2009
Pittcon 2009, Chicago, USA, March 8-13
Fabrication of nanoclustered silicon surface with electric discharge
N. Suni, M. Haapala, E. Färm, M. Ritala, L. Sainiemi, Sami Franssila, T. Kotiaho, R. Kostiainen
2009
Fabrication silicon nanoclusters with electric discharge
Niina Suni, Markus Haapala, Elina Färm, Mikko Ritala, Lauri Sainiemi, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2009
Optical tweezers experiments with a microfluidic laminar flow channel device
Anders Wallin, Heikki Ojala, Antti Rahikkala, Susanna Aura, Sami Franssila, Edward Haeggström, Roman Tuma
2009
Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
M.Y Zavodchikova, A.G Nasibulin, K. Grigoras, E.I Kauppinen, V. Ermolov, S. Franssila
2009
Carbon nanotube thin film transistors based on aerosol methods
Marina Zavodchikova, Tero Kulmala, Albert G. Nasibulin, Vladimir Ermolov, Sami Franssila, Kestutis Grigoras, Esko I. Kauppinen
2009
Nanotechnology
Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapani Kotiaho, Sami Franssila, Risto Kostiainen
2008
Development and application of a miniaturised gel eletrophoresis device for protein analysis
Z. Demianova, E. Pöysä, S. Ihalainen, S. Aura, M. Shimmo, S. Franssila, Marc Baumann
2008
Molecular BioSystems
an entry in Encyclopedia of Micro-and nanofluidics
Sami Franssila, Lauri Sainiemi
2008
Encyclopedia of Micro-and nanofluidics
Materials and technologies foe analitical microsystems
Sami Franssila
2008
Helsinki Drug Research Conference, June 9-11, Helsinki
Coating of nanoporous membranes: atomic layer deposition versus sputtering
K. Grigoras, V-M Airaksinen, S. Franssila
2008
Nanotechnology
Etching undr the corner, inclined macropores by ICP-RIE
Kestutis Grigoras, Sami Franssila
2008
Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through
K. Grigoras, S. Franssila, V-M. Airaksinen
2008
Thin Solid Films
Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Kestutis Grigoras, Tero Kulmala, Marina Zavodchikova, Albert Nasibulin, Esko Kauppinen, Vladimir Ermolov, Sami Franssila
2008
Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
M. Haapala, L. Luosujärvi, V. Saarela, S. Franssila, M. Thevis, R. Kostiainen
2008
Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry
K. Hanhijärvi, Juha Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, Sami Franssila, E. Häggström
2008
Optical Sensors 2008
Capillary filling conditions of square-shaped microfluidic channels
Ville Jokinen, Sami Franssila
2008
Microfluidics and Nanofluidics
Complex droplets on chemically modified silicon nanograss
Ville Jokinen, Lauri Sainiemi, Sami Franssila
2008
Advanced Materials
Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
I. Kassamakov, K. Hanhijärvi, Juha Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Häggström
2008
Direct Analysis of Illicit Drugs by Desorption Atmospheric Pressure Photoionization
Tiina Kauppila, Ville Arvola, Markus Haapala, Jaroslav Pol, Laura Aalberg, Ville Saarela, Sami Franssila
2008
Rapid Communications in Mass Spectrometry
Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
P. Keski-Rahkonen, M Haapala, V. Saarela, S. Franssila, T. Kotiaho, R. Kostiainen, S. Auriola
2008
Deep plasma etching of glass for fluidic devices with different mask materials
K. Kolari, V. Saarela, S. Franssila
2008
Microengineering
Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
T. Kulmala, K. Grigoras, M.Y Zavodchikova, A.G Nasibulin, E.I Kauppinen, V. Ermolov, S. Franssila
2008
Desorption and Ionization Mechanisms in Desorption Atmospheric Pressure Photoionization
L. Luosujärvi, V. Arvola, M. Haapala, J. Pol, V. Saarela, S. Franssila, T. Kotiaho, R. Kostiainen, TJ Kauppila
2008
Analytical Chemistry
Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis
L. Luosujärvi, V Arvola, M Haapala, J. Pol, V. Saarela, S. Franssila, R. Kostiainen, T. Kotiaho, T. Kauppila
2008
Helsinki Drug Research Conference, June 9-11, helsinki
Gas chromatography-mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchip
Laura Luosujärvi, Mika-Matti Karikko, Markus Haapala, Ville Saarela, Sami Huhtala, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kauppila
2008
Rapid Communications in Mass Spectrometry
Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Ville Saarela, Sami Franssila
2008
Fabrication and electrical, mechanical and optical characterization of SOI thermal microbridge actuators
Lauri Sainiemi, Ivan Kassamakov, Kalle Hanhijärvi, Fan Ji, V. Saarela, Sami Franssila
2008
Sensors and Actuators
Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip
Lauri Sainiemi, Teemu Nissilä, Ville Jokinen, Tiina Sikanen, Tapio Kotiaho, Risto Kostiainen, Raimo A. Ketola, Sami Franssila
2008
Sensors and Actuators B: Chemical
Fabrication of freestending Al2o3 nanomembranes and bridges
L. Sainiemi, K. Grigoras, S. Franssila
2008
High-tempereture silicon microbridge actuator
Lauri Sainiemi, Kestutis Grigoras, Ji Fan, Ville Saarela, Ville Vähänissi, Aki Laakso, Sami Franssila
2008
Lidless SU-8 polymer electrospray ionization chip
L. Sainiemi, R. Ketola, S. Franssila
2008
MicroNanoEngineering 2008, Athens
Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry
T. Sikanen, Santeri Tuomikoski, Raimo Ketola, R. Kostiainen, S. Franssila, T. Kotiaho
2008
Journal of Mass Spectrometry
Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Tiina Sikanen, Susanna Aura, Liisa Heikkilä, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2008
Microchip-based CE-ESI/MS analysis of biological molecules
T. Sikanen, S. Tuomikoski, R.A Ketola, R. Kostianen, S. Franssila, T. Kotiaho
2008
Helsinki Drug Research Conference, June 9-11, helsinki
Temperature modeling and measurement of an electrokinetic separation chip
Tiina Sikanen, Thomas Zwinger, Santeri Tuomikoski, Sami Franssila, Reijo Lehtiniemi, Carl- Magnus Fager, Tapio Kotiaho, Antti Pursula
2008
Microfluidics and Nanofluidics
Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures
Niina Suni, Markus Haapala, Ari Mäkinen, Lauri Sainiemi, Sami Franssila, Elina Färm, Esa Puukilainen, Mikko Ritala, Risto Kostiainen
2008
Angewandte Chemie
Selective surface patterning with electric discharge
N. Suni, M. Haapala, A. Mäkinen, L. Sainiemi, S. Franssila, E. Färm, E. Puukilainen, M. Ritala, Jari Yli-Kauhaluoma, R. Kostiainen
2008
Towards High-Throughput Optical Tweezers Experiments
A.E Wallin, H. Ojala, S. Aura, S. Franssila, E. Häggström, R. Tuma
2008
Detection of bacterial spores on the basis of electrochemiluminescence
Tiina Ylinen-Hinkka, Antti Niskanen, Sami Franssila, Sakari Kulmala, Timo Ala-Kleme
2008
Disposable Electrochemiluminescence Sensors of Bacterial Spores
Tiina Ylinen-Hinkka, Antti Niskanen, Sami Franssila, Timo Ala-Kleme, Sakari Kulmala
2008
Novel carbon nanotube network deposition technique for electronic device fabrication
Marina Zavodchikova, Albert Nasibulin, Tero Kulmala, Kestutis Grigoras, Amton S. Anisimov, Sami Franssila, Vladimir Ermolov, Esko Kauppinen
2008
Physica Status Solidi B
Novel carbon nanotube network deposition techniques for electronic device fabrication
M. Zavodchikova, T. Kulmala, K. Grigoras, A.G Nasibulin, A.S Anisimov, S. Franssila, V. Ermolov, E.I Kauppinen
2008
Thin film transistors based on carbon nanotubes prepared by aerosol technique
Marina Zavodchikova, K. Grigoras, T. Kulmala, A. Nasibulin, V. Ermolov, Sami Franssila
2008
Nanotechnology
Novel hybrid material for microfluidic devices
Susanna Aura, Tiina Sikanen, Tapio Kotiaho, Sami Franssila
2007
Sensors and Actuators B: Chemical
Novel hybrid material for microfluidic devices
Susanna Aura, Tiina Sikanen, Tapio Kotiaho, Sami Franssila
2007
Transducers 07; Solid-State Sensors, Actuators and Microsystems Conference, 2007. International. 10-14 June 2007
High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Z. Demianova, Eemeli Pöysä, Sami Franssila, Marc Baumann
2007
Mask material effects in cryogenic deep reactive ion etching
Sami Franssila, Lauri Sainiemi
2007
Journal of Vacuum Science and Technology. Part B.
Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique
K. Grigoras, L. Sainiemi, J. Tiilikainen, A. Säynätjoki, V-M. Airaksinen, S. Franssila
2007
Journal of Physics: Conference Series
Coating of nanoporous membranes atomic layer deposition versus sputtering
K. Grigoras, Sari Sirviö, V-M Airaksinen, S. Franssila
2007
NanoSmat 2007, Algarve, Portugal 9-11 July
Desorption Atmospheric Pressure Photoionization
Markus Haapala, Jaroslav Pol, Ville Saarela, Ville Arvola, Tapio Kotiaho, Raimo Ketola, Sami Franssila, Tiina Kauppila, Risto Kostiainen
2007
Analytical Chemistry
Microchip APPI Device for Combining GC or LC with MS
Markus Haapala, Laura Luosujärvi, Ville Saarela, Tapio Kotiaho, Raimo A. Ketola, Sami Franssila, Risto Kostiainen
2007
Microchip for combining gas chromatography or capillary liquic chromatography with Atmospheric Pressure Photoionization Mass Spectrometry
M. Haapala, L. Luosujärvi, V. Saarela, T. Kotiaho, R. Ketola, S. Franssila, R. Kostiainen
2007
Analytical Chemistry
Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Markus Haapala, Jaroslav Pol, Tiina Kauppila, Laura Luosujärvi, Ville Saarela, Sami Franssila, Raimo Ketola, Tapio Kotiaho, Risto Kostiainen
2007
Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Ville Jokinen, Sami Franssila
2007
Desorption Atmospheric Pressure Photoionozation
Tiina Kauppila, Markus Haapala, Jaroslav Pol, Ville Arvola, Ville Saarela, Sami Franssila, Raimo Ketola, Risto Kostiainen
2007
Deep plasme etching of glass for fluidic devices
K. Kolari, V. Saarela, S. Franssila
2007
Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask
Jyrki M. Mäkelä, Helmi Keskinen, Mikko Aromaa, L. Sainiemi, Laura Luosujärvi, T. Kotiaho, S. Franssila
2007
European Aerosol Conference 2007, Salzburg
Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Antti J. Niskanen, Tiina Ylinen-Hinkka, Markus Håkansson, Johanna Suomi, Timo Ala-Kleme, Sakari Kulmala, Sami Franssila
2007
Micropillar array electrospray chip for analysis of biomolecules
Teemu Nissilä, Lauri Sainiemi, Tiina Sikanen, Tapani Kotiaho, Sami Franssila, Risto Kostiainen, Raimo A. Ketola
2007
Silicon Micropillar Array Electrospray Chip for Drug and Biomolecule Analysis
T Nissilä, L. Sainiemi, T. Sikanen, T. Kotiaho, S. Franssila, R Kostiainen, R. Ketola
2007
Rapid Communications in Mass Spectrometry
Glass microfabricated nebulizer chip for mass spectrometry
V. Saarela, Markus Haapala, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2007
Lab on a Chip
On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Ville Saarela, Markus Haapala, Jaroslav Pol, Nisse Kalkkinen, Marko Hukka, Kai Kolari, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2007
High sensitivity micropillar electrospray ionization chip fabricated of silicon
Lauri Sainiemi, T. Nissilä, T. Sikanen, T. Kotiaho, R. Kostiainen, R. Ketola, S. Franssila
2007
Rapid fabrication of high aspect ratio silicon nanopillars for Chemical analysis
L. Sainiemi, Helmi Keskinen, Mikko Aromaa, Laura Luosujärvi, K. Grigoras, T. Kotiaho, Jyrki M. Mäkelä, S. Franssila
2007
Nanotechnology
Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
T. Sikanen, S. Tuomikoski, R.A Ketola, R. Kostiainen, S. Franssila, T. Kotiaho
2007
Fully microfabricated and integrated, SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry
T. Sikanen, S. Tuomikoski, R. Ketola, R. Kostiainen, S. Franssila, T. Kotiaho
2007
Analytical Chemistry
Performance of SU-8 microchips as separation devices and comparison
T. Sikanen, Liisa Heikkilä, Santeri Tuomikoski, Raimo A. Ketola, Risto Kostiainen, S. Franssila, T Kotiaho
2007
Analytical Chemistry
Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores
Sari Sirviö, L. Sainiemi, S. Franssila, K. Grigoras
2007
Transducers 07, Lyon, France, 10-14.06.2007
Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Santeri Tuomikoski, Tiina Sikanen, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2007
Microfluidic channels from photoactive hybrid material ORMOCER[R]
Susanna Aura, Sami Franssila
2006
MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006
A microfabricated nebulizer for liquid vaporization in chemical analysis
Sami Franssila, Seppo Marttila, Kai Kolari, Pekka Östman, Tapio Kotiaho, Risto Kostiainen, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen
2006
Journal of Microelectromechanical Systems
Automated 2D analysis on a proteome microchip
Sami Franssila, Zuzana Demianova, Masahiko Shimmo, Eemeli Pöysä, Tapio Kotiaho, Risto Kostiainen, Marc Baumann
2006
MSB; International Symposium on Micro Scale Bioseparation, Amsterdam, Alankomaat, 22-26.1.2006
Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS
Sami Franssila, Laura Luosujärvi, Markus Haapala, Pekka Östman, Risto Kostiainen, Kestutis Grigoras, Raimo Ketola, Tapio Kotiaho
2006
IMSC 2006, Praha, Tsekki, elokuu 2006
Minimum Proton Affinity for Efficient Ionization with Atmospheric Pressure Desorption /Ionization on Silicon Mass Spectrometry
Sami Franssila, Pekka Östman, Jaana M.H. Pakarinen, Pirjo Vainiotalo, Risto Kostiainen, Tapio Kotiaho
2006
Rapid Communications in Mass Spectrometry
Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique
kestutis Grigoras, Veli-Matti Airaksinen, Sami Franssila, Lauri Sainiemi, Jouni Tiilikainen, Antti Säynätjoki
2006
International Conference on Nanoscience and Technology, Basel, Sveitsi, 30.7-4.8.2006
Spontaneous microflow of micropillar array electrospray electrospray ionization microchip
T. Nissilä, L. Sainiemi, T. Sikanen, T. Kotiaho, S. Franssila, R. Kostiainen, R.A. Ketola
2006
Proc. MicroTAS (Proc. µTAS), 2006, Tokyo
Thermal characterization of a microfluidic nebulizer
Ville Saarela, Markus Haapala, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2006
MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006
Mask material effects in cryogenic DRIE
Lauri Sainiemi, Sami Franssila
2006
MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006
Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchip
Santeri Tuomikoski, Nina Virkkala, Stella Rovio, Ari Hokkanen, Heli Sirén, Sami Franssila
2006
Journal of Chromatography A
Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry
Pekka Östman, Sirkku Jäntti, Kestutis Grigoras, Ville Saarela, Raimo A. Ketola, Sami Franssila, Tapio Kotiaho, Risto Kostiainen
2006
Lab on a chip
Gas Chromatography-Microchip Atmospheric Pressure Chemical Ionization-Mass Spectrometry
Pekka Östman, Laura Luosujärvi, Markus Haapala, Kestutis Grigoras, Raimo Ketola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2006
Analytical Chemistry
Developed of a microdevice for 2-dimensional gel electrophoresis
Zuzana Demianova, Masahiko Shimmo, Eemeli Pöysä, Tapani Kotiaho, Risto Kostiainen, Sami Franssila, Marc Bauman
2005
American Laboratory Autmation Conference, USA, 2005
Infrared thermal imaging of microfluidic chips
Sami Franssila, Kestutis Grigoras, Seppo Marttila, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen
2005
MicroTAS 2005, Micro Total analysis Systems 2005, Boston, MA, USA, 9-13.10.2005
The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry
Sami Franssila, Pekka Östman, Risto Kostiainen, Raimo Ketola, Tapio Kotiaho
2005
53rd ASMS Conference on Mass Spectrometry and Allied Topics, San Antonia, Texas, USA, 5-9.6.2005
Fabrication of porous membrane filter from p-type silicon
K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen
2005
Physica Status Solidi
Analysis of amphetamines and fentanyls by atmospheric pressure desorption/ionization on silicon mass spectrometry and matrix-assisted laser desorption/ionization mass spectrometry and its application to forensic analysis of drug seizures
Katja Pihlainen, Kestutis Grigoras, S. Franssila, Raimo Ketola, Tapio Kotiaho, Risto Kostiainen
2005
Journal of Mass Spectrometry
Re-usable multi-inlet PDMS fluidic connector
Ville Saarela, Sami Franssila, Santeri Tuomikoski, Seppo Marttila, Pekka Östman, Tiina Sikanen, Tapio Kotiaho, Risto Kostiainen
2005
Sensors and Actuators B: Chemical
Characterization of SU-8 for electrokinetic microfluidic applications
Tiina Sikanen, Santeri Tuomikoski, Raimo Ketola, Risto Kostiainen, Sami Franssila, Tapio Kotiaho
2005
Lab on aChip
Characterization of SU-8 microchannels for electrophoretic separations
Tiina Sikanen, Iiro Korpisalo, Santeri Tuomikoski, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2005
Characterization of SU-8 polymer for electrophoretic separaions
T. Sikanen, Iiro Korpisalo, S. Tuomikoski, R.A. Ketola, R. Kostiainen, Sami Franssila, T. Kotiaho
2005
Nanotech 2005, Montreux 14-17.11.2005
Design and fabrication of integrated SPE-CE device for testosterone detection
Santeri Tuomikoski, Stella Rovio, Ari Hokkanen, Heli Siren, Sami Franssila
2005
Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry
Santeri Tuomikoski, Tiina Sikanen, Risto Kostiainen, Sami Franssila
2005
MicroTotalAnalysis Systems ´05, Boston 9-13.11.2005
Fabrication of enclosed SU-8 tips for electrospray ionization mass spectrometry
Santeri Tuomikoski, T. Sikanen, Raimo Ketola, R. Kostiainen, T. Kotiaho, Sami Franssila
2005
Electrophoresis
Fabrication on enclosed SU-8 tips for electrospray ionization spectrometry
Santeri Tuomikoski, tiina Sikanen, Raimo Ketola, Tapio Kotiaho, Sami Franssila
2005
Electrophoresis
Free-standing SU-8 microfluidic chips by adhesive bonding and release etching
Santeri Tuomikoski, Sami Franssila
2005
Sensors and Actuators A
SPE/CE chip in SU-8
S. Tuomikoski, S. Franssila, H. Siren, S. Rovio, A. Hokkanen
2005
Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer
T. Zwinger, T. Sikanen, S. Tuomikoski, R.A. Ketola, R. Kostiainen, S. Franssila, T. Kotiaho
2005
PharmaSci-Fair, Pharmaceutical Sciences Fair and Exhibition 12-17.6.2005, Nice, France
Introduction to Microfabrication
Sami Franssila
2004
Microfluidic Nebulizer Chip for Mass Spectrometry
S. Franssila, P. Östman, S. Marttila, T. Kotiaho, R. Kostiainen
2004
MicroStructure Workshop MSW '04, Ystad, Sweden March 29-31 2004
Mikrokanavia biosiruihin
Sami Franssila, Tapio Kotiaho, Risto Kostiainen, Marc Baumann, Matti Leppihalme, Ari Hokkanen, Kestutis Grigoras
2004
Prosessori
Pisaroita piikiekolla
Sami Franssila
2004
Helsingin Sanomat
Fabrication of porous membrane filter from p-type silicon
K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen
2004
Fabrication of porous membrane filter from p-type silicon
K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen
2004
Porous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004
Formation of nanoporous glass layer
Kestutis Grigoras, Sami Franssila
2004
Physica Scripta
Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer
Tiina Kauppila, Pekka Östman, Seppo Marttila, Raimo Ketola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2004
Analytical Chemistry
Atmospheric pressure photoionization with a microchip heated nebulizer
T. Kauppila, P. Östman, S. Marttila, R. Ketola, T. Kotiaho, S. Franssila, R. Kostiainen
2004
Proceedings MicroTAS
Atmospheric pressure photoionization with a microchip heated nebulizer
T. Kauppila, P. Östman, S. Marttila, R. Ketola, T. Kotiaho, S. Franssila, R. Kostiainen
2004
DLC-PDMS-hybrid patterning and surface treatment
T. Laakso, A. Soininen, S. Franssila
2004
Proceedings MicroTAS
DLC-PDMS-hybrid patterning and surface treatment
T. Laakso, A. Soininen, S. Franssila
2004
Reusable multi-inlet PDMS fluidic connector
Ville Saarela, Sami Franssila
2004
Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Santeri Tuomikoski, Tiina Sikanen, Risto Kostiainen, Tapio Kotiaho, Sami Franssila
2004
Fabrication of microfluidic devices from SU-8
Santeri Tuomikoski, Sami Franssila
2004
Micro structure workshop 2004, 30-31. Marc 2004, Ystad, Sweden
Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
S. Tuomikoski, S. Franssila
2004
Physica Scripta
Microchip atmospheric pressure chemical ionisation-mass spectrometry
Pekka Östman, Seppo Marttila, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2004
Proceedings MicroTAS
Microchip atmospheric pressure chemical ionisation-mass spectrometry
P. Östman, S. Marttila, S. Kotiaho, s. Franssila, R. Kostiainen
2004
Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
P. Östman, S.J. Marttila, T. Kotiaho, S. Franssila, R. Kostiainen
2004
Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry
Pekka Östman, Seppo J. Marttila, Tapio Kotiaho, Sami Franssila, Risto Kostiainen
2004
Analytical Chemistry
Droplet based self-assembly of SU-8 microparts
S. Corral, Q. Zhou, A. Albut, S. Franssila, S. Tuomikoski, H. Koivo
2003
Droplet based self-assembly of SU-8 microparts
Carlos del Corral, Quan Zhou, Aurelian Albut, Bo Chang, Sami Franssila, Santeri Tuomikoski, Heikki N. Koivo
2003
2nd VDE World Microtechnologies Congress, Munich, Germany, October 13 15, 2003
Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
S. Franssila, S. Marttila, P. Östman, T. Kotiaho, R. Kostiainen
2003
Formation of nanoporous glass layer
K. Grigoras, S. Franssila
2003
Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs
K. Huikko, P. Östman, C. Sauber, F. Mandel, K. Grigoras, S. Franssila, T. Kotiaho, R. Kostiainen
2003
Rapid Communications in Mass Spectrometry
Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters
K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho
2003
Lab on a Chip
Rapid thermal annealing of Cu/WNx/Si structures
Antti Lipsanen, Pekka Kuivalainen, Eero Rauhala, Sami Franssila, Anu Seppälä
2003
Journal of Materials Science: Materials in Electronics
Luminescence study of silicon nanostructures prepared by ion beam mixing
V. Ovchinnikov, V. Sokolov, S. Franssila
2003
Microelectronics Journal
Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
V. Ovchinnikov, Sami Franssila, H. Jiang, A.G. Nasibulin, E.I. Kauppinen
2003
SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
S. Tuomikoski, C. del Corral, Q. Zhou, S. Franssila
2003
Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
S. Tuomikoski, S. Franssila
2003
Microglow: a microsystems laboratory course
S. Franssila, I. Tittonen, K. Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä
2002
Micro Structure Workshop 2002, Aronsborg, Bålsta
Microsystems and nanotechnology in the Nordic region
S. Franssila, L. Furuberg, P. Enoksson, F. Grey, A. Larsen
2002
Proc. 8th Worl Micromachine Summit, Maastricht, 2002
Silicon devices for chemistry and lifesciences
Sami Franssila
2002
Suomen Kemian Seura, Kemian päivät 2002
PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho
2002
PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, K. Puolanne, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho
2002
Micromechanics in silicon
T. Juvonen, J. Poulsen, S. Franssila
2002
Micro Structure Workshop 2002, Aronsborg, Bålsta
Optical interferometric detection of a mechanical silicon oscillator
Kaisa Nera, Ossi Hahtela, Sami Franssila, Ilkka Tittonen
2002
Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
V. Ovchinnikov, V. Sokolov, Sami Franssila
2002
Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Anna-Maria Spehar, Piia Vainio, J. Eskola, Annika Nyman, Markus Håkansson, Qinghong Jiang, Sami Franssila, Sakari Kulmala
2002
Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)
S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho
2002
Bioforum International
Modified porous silicon surfaces as DIOS-MS sample plates
S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho
2002
Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)
S. Tuomikoski, K. Huikko, K Grigoras, P. Östman, T Kotiaho, R. Kostiainen, Marc Baumann, S. Franssila
2002
Lab on a chip
Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)
S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho
2002
Bioforum International
Microsystems education in the Nordic region
F. Grey, S. Franssila, L. Furuberg, K. Hjort
2001
Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä, Sami Franssila
2001
Plasma etched initial pits for electrochemically etched macroporous silicon structures
Kestutis Grigoras, Antti Niskanen, Sami Franssila
2001
Journal of Micromechanics and Microengineering
PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES
Kestutis Grigoras, Antti J. Niskanen, Sami Franssila
2001
Journal of Micromechanics and Microengineering
Submicron image reversal by liquid phase deposition of oxide
Antti Niskanen, Sami Franssila
2001
Microelectronic Engineering
Improved neuron MOS-transistor structures for integrated neural network circuits
A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg, P. Kuivalainen
2001
IEE Proceedings: Circuits, Devices and Systems
Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)
S. Tuomikoski, K. Huikko, K. Grigoras, A. Niskanen, T. Kotiaho, R. Kostiainen, S. Franssila, Marc Baumann
2001
NanoTech2001, Montreux, 27-29.11.2001
Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
P. Vainio, Timo Ala-Kleme, Leif Väre, Markus Håkansson, Philip Canty, J. Eskola, S. Franssila, Sakari Kulmala
2001
Etching through silicon wafer in inductively coupled plasma
S. Franssila, J. Kiihamäki, J. Karttunen
2000
Microsystem Technologies
Deep Silicon Structures by Electrochemical Etching
Kestutis Grigoras, A.J. Niskanen, Sami Franssila
2000
Loading effects in deep silicon etching
J. Karttunen, J. Kiihamäki, S. Franssila
2000
SPIE
Depth and profile control in plasma etched MEMS structures
J. Kiihamäki, H. Kattelus, Jani Karttunen, S. Franssila
2000
Sensors and Actuators
Submicron image reversal by liquid phase deposition of oxide
A.J. Niskanen, S. Franssila
2000
Etching through silicon wafer in inductively coupled plasma
S. Franssila, J. Kiihamäki, J. Karttunen
1999
HARMST'99, Kisarazu, Japan, June 13-15, 1999
Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
S. Franssila
1999
Deep silicon etching in inductively coupled plasma reactor for MEMS
J. Kiihamäki, Sami Franssila
1999
Physica Scripta
Depth and profile control in plasma etched MEMS structures
J. Kiihamäki, H. Kattelus, S. Franssila
1999
Transducers'99, Sendai, Japan, June 7-10, 1999
Pattern shape effects and artefacts in deep silicon etching
J. Kiihamäki, Sami Franssila
1999
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High-precision neuron MOSFET structures
A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg, P. Kuivalainen
1999
Electronics Letters
Valtaavatko mikropiirit elektroniikan?
Sami Franssila
1998
Tiede 2000
Reduction of molybdenum resistivity by a seed layer of Ti-W
Sami Franssila, H. Kattelus, E. Nykänen
1997
Microelectronic Engineering
Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits
A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg
1997
NORCHIP´97, Tanska
Variable Treshold MOS-Transistors for Integrated Neural Network Circuits
A. Rantala, K. Franssila, Kimmo Kaski, J. Lampinen, M. Åberg, P. Kuivalainen
1997
15th Norchip Conference, Tallinn, Estonia, November 10-11, 1997
Tekniikka kuin luonto
Sami Franssila
1996
Tiede 2000
Hospital mouth cleaning aids may cause dental erosion
Jukka Meurman, Rita Sorvari, A. Pelttari, I. Rytömaa, Sami Franssila, L. Kroon, Lars Kroon
1996
SPECIAL CARE IN DENTISTRY
Plasma etching in microdevice fabrication: thin film and process integration aspects.
S. Franssila
1995
Acta Polytechnica Scandinavica
Kuinka pieneksi pii-transistori voidaan kutistaa?
Sami Franssila, Pekka Kuivalainen
1994
Fysiikka tänään
Linewidth uniformity and etch rate uniformity in refractory metal plasma etching
Sami Franssila
1994
Journal of Vacuum Science and Technology
Tungsten silicide formation from sequentially sputtered tungsten and silicon films
J.M. Molarius, S. Franssila, G. Drozdy, J. Saarilahti
1991
Applied Surface Science
Mikroelektroniikan rajat ja reunaehdot
Sami Franssila
1990
Tekniikan Tekijät