Ville Vähänissi
Staff Scientist
Staff Scientist
T411 Dept. Electronics and Nanoeng
Full researcher profile
https://research.aalto.fi/...
Palkinnot
Award for high-quality teaching in the academic year 2017-2018
Teachers of the course have a clear insight on how the course is settled in the programme, both the relationship to adjacent courses as well as learning outcomes of the programme. Teaching and learning methods support studying the available textbook and there is also supplementary material to support studying. <br/>
Award or honor granted for a specific work
Department of Electronics and Nanoengineering
Oct 2018
Young Scientist Award (GADEST)
Award or honor granted for a specific work
School common, ELEC
Sep 2019
35th EU PVSEC 2018 Student Award
Talk title: Elimination of light-induced degradation by black silicon<br/>The award was delivered in recognition of the most remarkable and outstanding research work in the field of PV.
Award or honor granted for a specific work
School common, ELEC
Sep 2018
Tutkimusryhmät
- Hele Savin Group, Staff Scientist
Julkaisut
Elimination of dead layer in silicon particle detectors via induced electric field based charge collection
Olli E. Setälä, Toni P. Pasanen, Jennifer Ott, Igors Krainukovs, Juha Heinonen, Ville Vähänissi, Hele Savin
2025
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Contactless analysis of surface passivation and charge transfer at the TiO 2-Si interface
Ramsha Khan, Xiaolong Liu, Ville Vähänissi, Harri Ali-Löytty, Hannu P. Pasanen, Hele Savin, Nikolai V Tkachenko
2024
Physical Chemistry Chemical Physics
(oral talk) Effect Of The Morphology Of Black Silicon Passivated By Alumina On The Performance Of Interdigitated Back Contact Solar Cells
Nabil Khelifati, Ozan Aydın, Bülent Arıkan, Ghania Fortas, Leila Harkat, Ville Vähänissi, Xiaolong Liu, Faouzi Kezzoula, Raşit Turan
2024
(poster) New Method for Ohmic Metal to Si Contact Formation Utilizing Highly Charged ALD Dielectric.
Lassi Lahtiluoma, Olli Setälä, Ville Vähänissi, Hele Savin
2024
Bridging the gap between surface physics and photonics
Pekka Laukkanen, Marko Punkkinen, Mikhail Kuzmin, Kalevi Kokko, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin, Antti Tukiainen, Teemu Hakkarainen, Jukka Viheriälä, Mircea Guina
2024
Reports on Progress in Physics
(poster) ALD SiO2 provides efficient Ge surface passivation with a tailorable charge polarity
Oskari Leiviskä, Hanchen Liu, John Fung, Joonas Isometsä, Ville Vähänissi, Hele Savin
2024
Adsorption Induced Bipolar Excitation at Semiconductor Surface
Shengyang Li, Kexun Chen, Mahdi Alizadeh, Ville Vähänissi, Hele Savin, Jani Oksanen
2024
Surfaces and Interfaces
Impact of post-ion implantation annealing on Se-hyperdoped Ge
Xiaolong Liu, Patrick Mc Kearney, Sören Schäfer, Behrad Radfar, Yonder Berencen, Ulrich Kentsch, Ville Vähänissi, Shengqiang Zhou, Stefan Kontermann, Hele Savin
2024
Applied Physics Letters
(oral talk) Hyperdoping germanium with titanium via femtosecond laser processing
Xiaolong Liu, Dmytro Gnatyuk, Ville Vähänissi, Hele Savin
2024
Impact of Pulse Duration on the Properties of Laser Hyperdoped Black Silicon
Patrick Mc Kearney, Sören Schäfer, Xiaolong Liu, Simon Paulus, Ingo Lebershausen, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann
2024
Advanced Photonics Research
(poster) Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers
Olga Morozova, Kexun Chen, Behrad Radfar, Ulrich Kentsch, Luke Antwis, Hele Savin, Ville Vähänissi
2024
Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers
Olga Morozova, Kexun Chen, Behrad Radfar, Ulrich Kentsch, Luke Antwis, Hele Savin, Ville Vähänissi
2024
Extended Infrared Absorption in Nanostructured Si Through Se Implantation and Flash Lamp Annealing
Behrad Radfar, Xiaolong Liu, Yonder Berencen, Mohd Saif Shaikh, Slawomir Prucnal, Ulrich Kentsch, Ville Vähänissi, Shengqiang Zhou, Hele Savin
2024
Physica Status Solidi (A) Applications and Materials Science
(oral talk) Impact of upconverting atomic layer deposited Er2O3 on Si solar cell surface passivation
Behrad Radfar, Amr Ghazy, Xiaolong Liu, Ville Vähänissi, Maarit Karppinen, Hele Savin
2024
Effective carrier lifetime in ultrashort pulse laser hyperdoped silicon: sulfur concentration dependence and practical limitations
Sören Schäfer, Xiaolong Liu, Patrick Mc Kearney, Simon Paulus, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann
2024
PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE
(invited talk) Sulfur-hyperdoped silicon by ultrashort laser processing
Sören Schäfer, Patrick Mc Kearney, Simon Paulus, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Doris Mutschall, Vesa Koskinen, Michael Serue, Tobias Niemeyer, Michael Seibt, Hele Savin, Stefan Kontermann
2024
(poster) Efficient surface passivation of germanium by porous Ge layer
Mariia Terletskaia, Joonas Isometsä, Mikko Miettinen, Pekka Laukkanen, Ville Vähänissi, Hele Savin
2024
Status report on emerging photovoltaics
Annick Anctil, Meghan N. Beattie, Christopher Case, Aditya Chaudhary, Benjamin D. Chrysler, Michael G. Debije, Stephanie Essig, David K. Ferry, Vivian E. Ferry, Marina Freitag, Isaac Gould, Karin Hinzer, Harald Hoppe, Olle Inganas, Lethy Krishnan Jagadamma, Min Hun Jee, Raymond K. Kostuk, Daniel Kirk, Stephan Kube, Minyoung Lim, Joseph M. Luther, Lorelle Mansfield, Michael D. McGehee, Duong Nguyen Minh, Preeti Nain, Matthew O. Reese, Angele Reinders, Ifor D.W. Samuel, Wilfried Van Sark, Hele Savin, Ian R. Sellers, Sean E. Shaheen, Zheng Tang, Fatima Toor, Ville Vahanissi, Ella Wassweiler, Emily L. Warren, Vincent R. Whiteside, Han Young Woo, Gang Xiong, Xitong Zhu
2023
Journal of Photonics for Energy
Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode
Kexun Chen, Olli Setälä, Xiaolong Liu, Behrad Radfar, Toni Pasanen, Michael Serue, Juha Heinonen, Hele Savin, Ville Vähänissi
2023
IEEE Sensors Journal
Efficient surface passivation of germanium nanostructures with 1% reflectance
John Fung, Joonas Isometsä, Juha Pekka Lehtiö, Toni Pasanen, Hanchen Liu, Oskari Leiviskä, Pekka Laukkanen, Hele Savin, Ville Vähänissi
2023
Nanotechnology
Black ultra-thin crystalline silicon wafers reach the 4n2 absorption limit – application to IBC solar cells
Moises Garin, Toni Pasanen, G. López, Ville Vähänissi, Kexun Chen, I. Martín , Hele Savin
2023
Small
(poster) Spatial uniformity of black silicon induced junction photodiode responsivity
Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni Pasanen, Hele Savin, Juha Toivanen, Mikko Juntunen
2023
Spatial uniformity of black silicon induced junction photodiode responsivity
Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Juha Toivanen, Mikko A. Juntunen
2023
Optical Components and Materials XX
Surface passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer
Joonas Isometsä, Zahra Jahanshah Rad, John Fung, Hanchen Liu, Juha Pekka Lehtiö, Toni Pasanen, Oskari Leiviskä, Mikko Miettinen, P. Laukkanen, K. Kokko, Hele Savin, Ville Vähänissi
2023
Crystals
Is Carrier Mobility a Limiting Factor for Charge Transfer in Tio2/Si Devices? A Study by Transient Reflectance Spectroscopy
Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Hussein Ayedh, Jesse Saari, Ville Vähänissi, Mika Valden, Hele Savin, Nikolai V. Tkachenko
2023
Surfaces and Interfaces
Chemical Excitation of Silicon Photoconductors by Metal-Assisted Chemical Etching
Shengyang Li, Hussein M. Ayedh, Marko Yli-Koski, Ville Vähänissi, Hele Savin, Jani Oksanen
2023
Journal of Physical Chemistry C
(oral talk) Electroless excitation of semiconductors through semiconductor-liquid interfaces
Shengyang Li, Kexun Chen, Ville Vähänissi, Hele Savin, Jani Oksanen
2023
Comparison of SiNx-based Surface Passivation Between Germanium and Silicon
Hanchen Liu, Toni Pasanen, John Fung, Joonas Isometsä, Oskari Leiviskä, Ville Vähänissi, Hele Savin
2023
Physica Status Solidi (A) Applications and Materials Science
(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium
Hanchen Liu, Toni Pasanen, Oskari Leiviskä, Joonas Isometsä, John Fung, Marko Yli-Koski, Mikko Miettinen, Pekka J. Laukkanen, Ville Vähänissi, Hele Savin
2023
(oral talk) Surface Passivation and Charge Transfer at TiO2/Si Interface
Xiaolong Liu, Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Ville Vähänissi, Mika Valden, Nikolai V. Tkachenko, Hele Savin
2023
Plasma-enhanced atomic layer deposited SiO2 enables positive thin film charge and surface recombination velocity of 1.3 cm/s on germanium
Hanchen Liu, Toni Pasanen, Oskari Leiviskä, Joonas Isometsä, John Fung, Marko Yli-Koski, Mikko Miettinen, Pekka Laukkanen, Ville Vähänissi, Hele Savin
2023
Applied Physics Letters
(poster) Contact formation via femtosecond-laser hyperdoping in silicon optoelectronic devices
Xiaolong Liu, Kexun Chen, Behrad Radfar, Patrick Mc Kearney, Simon Paulus, Sören Schäfer, Michael Serué, Doris Mutschall, Vesa Koskinen, Toni Pasanen, Ville Vähänissi, Mikko Juntunen, Stefan Kontermann, Hele Savin
2023
(poster) Surface Passivation of Si by Atomic Layer Deposited TiO2
Xiaolong Liu, Ville Vähänissi, Hele Savin, Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Mika Valden, Nikolai V. Tkachenko
2023
Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality
Iris Mack, Kawa Rosta, Ulviyya Quliyeva, Jennifer Ott, Toni Pasanen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtiö, Pekka Laukkanen, Caterina Soldano, Hele Savin
2023
Physica Status Solidi (A) Applications and Materials Science
Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications–Effects of Precursor and Operating Conditions
Vladyslav Matkivskyi, Oskari Leiviskä, Sigurd Wenner, Liu Hanchen, Ville Vahanissi, Hele Savin, Marisa Di Sabatino, Gabriella Tranell
2023
Materials
Role of CsMnCl3 Nanocrystal Structure on Its Luminescence Properties
Anastasia Matuhina, G. Krishnamurthy Grandhi, Fang Pan, Maning Liu, Harri Ali-Löytty, Hussein M. Ayedh, Antti Tukiainen, Jan-Henrik Smått, Ville Vähänissi, Hele Savin, Jingrui Li, Patrick Rinke, Paola Vivo
2023
ACS Applied Nano Materials
Improved QE in CMOS image sensors with nano-black antireflection layer
Martin J. Prest, Olli Setälä, Konstantin D. Stefanov, Ville Vähänissi, Hele Savin, Douglas Jordan
2023
2023 International Image Sensor Workshop Proceedings
(oral talk) Improved QE in CMOS image sensors with nano-black antireflection layer
Martin J. Prest, Olli Setälä, Konstantin D. Stefanov, Ville Vähänissi, Hele Savin, Douglas Jordan
2023
Effects of Ultrahigh Vacuum Treatments on Wet Chemically Cleaned Si Surfaces
Zahra Jahanshah Rad, Mikko Miettinen, Marko Punkkinen, Pekka Laukkanen, Kalevi Kokko, Ville Vähänissi, Hele Savin
2023
Solid State Phenomena
Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space
Behrad Radfar, Kexun Chen, Olli Setälä, Ville Vähänissi, Hele Savin, Xiaolong Liu
2023
Optics Letters
(oral talk) Nanostructured Silicon Hyperdoped with Se by Ion Implantation and Flash Lamp Annealing
Behrad Radfar, Xiaolong Liu, Slawomir Prucnal, Mohd Saif Shaikh, Ulrich Kentsch, Ville Vähänissi, Yonder Berencén, Shengqiang Zhou, Hele Savin
2023
(invited talk) Excellent Responsivity and Low Dark Current Obtained with Black Si Photodiode
Hele Savin, Kexun Chen, Olli Setälä, Xiaolong Liu, Behrad Radfar, Ville Vähänissi
2023
(oral talk) Effective carrier lifetime in ultrashort pulse laser hyperdoped silicon: dopant concentration dependence and practical upper limits
Sören Schäfer, Xiaolong Liu, Patrick Mc Kearney, Simon Paulus, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann
2023
Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm
Olli Setälä, Kexun Chen, Toni Pasanen, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin
2023
ACS Photonics
CMOS Image Sensor for Broad Spectral Range with >90% Quantum Efficiency
Olli E. Setälä, Martin J. Prest, Konstantin D. Stefanov, Douglas Jordan, Matthew R. Soman, Ville Vähänissi, Hele Savin
2023
Small
Fast Wafer-Level Characterization of Silicon Photodetectors by Photoluminescence Imaging
Hussein Ayedh, Wisa Förbom, Juha Heinonen, Ismo T. S. Heikkinen, Marko Yli-Koski, Ville Vähänissi, Hele Savin
2022
IEEE Transactions on Electron Devices
(oral talk) Record-high UV response in implanted junctions through passivation of surface defects and minimisation of boron implantation damage
Kexun Chen, Olli Setälä, Behrad Radfar, Udo Kroth, Ville Vähänissi, Hele Savin
2022
Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes
Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen
2022
Optical Components and Materials XIX
(oral talk) Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes
Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni Pasanen, Hele Savin, Mikko Juntunen
2022
(poster) Reduction of defect density at Ge/Al2O3 interface using GeO2 interfacial layers
Joonas Isometsä, John Fung, Toni Pasanen, Hanchen Liu, Oskari Leiviskä, Marko Yli-Koski, Ville Vähänissi, Hele Savin
2022
Electron Injection in Metal Assisted Chemical Etching as a Fundamental Mechanism for Electroless Electricity Generation
Shengyang Li, Kexun Chen, Ville Vähänissi, Ivan Radevici, Hele Savin, Jani Oksanen
2022
Journal of Physical Chemistry Letters
Millisecond-Level Minority Carrier Lifetime in Femtosecond Laser-Textured Black Silicon
Xiaolong Liu, Behrad Radfar, Kexun Chen, Elmeri Pälikkö, Toni Pasanen, Ville Vähänissi, Hele Savin
2022
IEEE Photonics Technology Letters
(oral talk) Carrier recombination in black silicon fabricated by high repetition rate fs-laser
Xiaolong Liu, Behrad Radfar, Toni Pasanen, Ville Vähänissi, Hele Savin
2022
(oral talk) Controlling charge polarity and defect density at Ge/Al2O3 interface using SiNx interlayer
Hanchen Liu, Toni Pasanen, Tsun Hang Fung, Joonas Isometsä, Oskari Leiviskä, Ville Vähänissi, Hele Savin
2022
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE and Fs-Laser Etching
Xiaolong Liu, Behrad Radfar, Kexun Chen, Olli Setälä, Toni Pasanen, Marko Yli-Koski, Hele Savin, Ville Vähänissi
2022
IEEE Transactions on Semiconductor Manufacturing
(poster) Optoelectronic properties of high repetition rate femtosecond-laser processed black silicon
Xiaolong Liu, Behrad Radfar, Toni Pasanen, Ville Vähänissi, Hele Savin
2022
Tailoring Femtosecond-Laser Processed Black Silicon for Reduced Carrier Recombination Combined with >95% Above-Bandgap Absorption
Xiaolong Liu, Behrad Radfar, Kexun Chen, Toni Pasanen, Ville Vähänissi, Hele Savin
2022
Advanced Photonics Research
(poster) Structure-induced luminescence in all-inorganic manganese halide perovskite nanocrystals
Anastasia Matuhina, G. Krishnamurthy Grandhi, Maning Liu, Harri Ali-Löytty, Hussein Ayedh, Jan Henrik Smått, Ville Vähänissi, Hele Savin, Paola Vivo
2022
Effects of post oxidation of SiO2/Si interfaces in ultrahigh vacuum below 450 °C
Zahra Jahanshah Rad, Juha Pekka Lehtiö, Kexun Chen, Iris Mack, Ville Vähänissi, Mikko Miettinen, Marko Punkkinen, Risto Punkkinen, Petri Suomalainen, Hannu Pekka Hedman, Mikhail Kuzmin, Jekaterina Kozlova, Mihkel Rähn, university tart, Hele Savin, Pekka Laukkanen, Kalevi Kokko
2022
Vacuum
(oral talk) Compatibility of Al-neal in processing of Si devices with Al2O3 layer
Olli Setälä, Toni Pasanen, Jennifer Ott, Ville Vähänissi, Hele Savin
2022
Efficient photon capture on germanium surfaces using industrially feasible nanostructure formation
Kexun Chen, Joonas Isometsä, Toni P. Pasanen, Ville Vähänissi, Hele Savin
2021
Nanotechnology
Harnessing Carrier Multiplication in Silicon Solar Cells Using UV Photons
Kexun Chen, Olli E. Setala, Behrad Radfar, Udo Kroth, Ville Vahanissi, Hele Savin
2021
IEEE Photonics Technology Letters
(oral talk) Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen
2021
Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen
2021
Optical Components and Materials XVIII
Achieving surface recombination velocity below 10 cm/s in n-type Germanium using ALD Al2O3
Joonas Isometsä, John Fung, Toni Pasanen, Hanchen Liu, Marko Yli-Koski, Ville Vähänissi, Hele Savin
2021
APL Materials
Grass-like alumina coated window harnesses the full omnidirectional potential of black silicon photodiodes
Christoffer Kauppinen, Toni Pasanen, Kirill Isakov, Michael Serue, Juha Heinonen, Ville Vähänissi, Harri Lipsanen, Hele Savin
2021
Applied Optics
(invited talk) Black silicon for PV—Which fabrication technology to choose?
Xiaolong Liu, Behrad Radfar, Kexun Chen, Olli Setälä, Toni Pasanen, Ville Vähänissi, Hele Savin
2021
Increased surface recombination in crystalline silicon under light soaking due to Cu contamination
Ismo TS Rauha, Anastasia H Soeriyadi, Moonyong Kim, Marko Yli-Koski, Brendan Wright, Ville Vähänissi, Brett J Hallam, Hele Savin
2021
Solar Energy Materials and Solar Cells
(oral talk) Nanostructuring process to minimize reflective losses in optoelectronic devices
Päivikki Repo, Toni Pasanen, Ville Vähänissi, Joonas Isometsä, Kexun Chen, Moises Garin, Hele Savin
2021
Semiconductor structures and manufacturing the same
Hele Savin, Ville Vähänissi, Mikko Juntunen, Juha Heinonen
2021
Al-neal Degrades Al2O3 Passivation of Silicon Surface
Olli E. Setälä, Toni P. Pasanen, Jennifer Ott, Ville Vähänissi, Hele Savin
2021
Physica Status Solidi (A) Applications and Materials Science
Black silicon boron emitter solar cells with EQE above 95% in UV
Kexun Chen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtio, Pekka Laukkanen, Marko Yli-Koski, Hele Savin
2020
Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020
(poster) Black silicon boron emitter solar cells with EQE above 95% in UV
Kexun Chen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtio, Pekka Laukkanen, Marko Yli-Koski, Hele Savin
2020
Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion
Tsun Hang Fung, Toni Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott
2020
Solar Energy Materials and Solar Cells
Black-silicon ultraviolet photodiodes achieve external quantum efficiency above 130%
Moises Garin, Juha Heinonen, Lutz Werner, Toni Pasanen, Ville Vähänissi, Antti Haarahiltunen, M. Juntunen, Hele Savin
2020
Physical Review Letters
AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure
Ismo T. S. Heikkinen, George Koutsourakis, Sauli Virtanen, Marko Yli-Koski, Sebastian Wood, Ville Vähänissi, Emma Salmi, Fernando A. Castro, Hele Savin
2020
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Can hydrogenation mitigate Cu-induced bulk degradation in silicon?
Ismo T.S. Heikkinen, Brendan Wright, Anastasia H. Soeriyadi, Marko Yli-Koski, Moonyong Kim, Ville Vähänissi, Brett J. Hallam, Hele Savin
2020
Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020
(oral talk) Can hydrogenation mitigate Cu-induced bulk degradation in silicon?
Ismo T.S. Heikkinen, Brendan Wright, Anastasia H. Soeriyadi, Marko Yli-Koski, Moonyong Kim, Ville Vähänissi, Brett J. Hallam, Hele Savin
2020
High-sensitivity NIR photodiodes using black silicon
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Ville Vähänissi, Toni Pasanen, Hele Savin, Lutz Werner, Mikko Juntunen
2020
Optical Components and Materials XVII
Modeling Field-effect in Black Silicon and its Impact on Device Performance
Juha Heinonen, Toni Pasanen, Ville Vähänissi, Mikko Juntunen, Hele Savin
2020
IEEE Transactions on Electron Devices
(oral talk) High-sensitivity NIR photodiodes using black silicon
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Ville Vähänissi, Toni Pasanen, Hele Savin, Lutz Werner, Mikko Juntunen
2020
How Much Physics is in a Current-Voltage Curve? Inferring Defect Properties from Photovoltaic Device Measurements
Rachel C. Kurchin, Jeremy R. Poindexter, Ville Vähänissi, Hele Savin, Carlos del Cañizo, Tonio Buonassisi
2020
IEEE Journal of Photovoltaics
Black silicon back contact module with wide light acceptance angle
Pablo Ortega, Moises Garin, Guillaume von Gastrow, Tuukka Savisalo, Antti Tolvanen, Henri Vahlman, Ville Vähänissi, Toni Pasanen, David Carrio, Hele Savin, Ramon Alcubilla
2020
Progress in Photovoltaics
(oral talk) Black silicon back contact module with wide light acceptance angle
Pablo Ortega, Moises Garin, Guillaume von Gastrow, Tuukka Savisalo, Antti Tolvanen, Henri Vahlman, Ville Vähänissi, Toni Pasanen, David Carrio, Hele Savin, Ramon Alcubilla
2020
Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide
Jennifer Ott, Toni P. Pasanen, Akiko Gädda, Moises Garín, Kawa Rosta, Ville Vähänissi, Hele Savin
2020
Applied Surface Science
Nanostructured germanium with >99% absorption at 300-1600 nm wavelengths
Toni Pasanen, Joonas Isometsä, Moises Garin, Kexun Chen, Ville Vähänissi, Hele Savin
2020
Advanced Optical Materials
(oral talk) Nanostructured germanium with >99 % absorption for near-infrared sensor applications
Toni Pasanen, Joonas Isometsä, Moises Garin, Kexun Chen, Ville Vähänissi, Hele Savin
2020
Decreasing Interface Defect Densities via Silicon Oxide Passivation at Temperatures Below 450 C
Zahra Jahanshah Rad, Juha-Pekka Lehtiö, Iris Mack, Kawa Rosta, Kexun Chen, Ville Vähänissi, Marko P.J. Punkkinen, Risto Punkkinen, Hannu-Pekka Hedman, Andrei Pavlov, Mikhail V. Kuzmin, Hele Savin, Pekka J. Laukkanen, Kalevi Kokko
2020
ACS Applied Materials and Interfaces
(poster) Modification of chemical oxide passivation of silicon by ultrahigh-vacuum low-temperature treatments
Zahra Jahanshah Rad, Kexun Chen, Juha Pekka Lehtiö, Iris Mack, Esa Vuorinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Pekka Laukkanen, Hele Savin, Kalevi Kokko
2020
Superior gamma-detection and IR imaging via ALD-passivated germanium nanostructures
Hele Savin, Toni Pasanen, Joonas Isometsä, Kexun Chen, Ville Vähänissi, R Nurgalejevs, O Savina, V. Gostilo, A Aurola
2020
Effect of MACE Parameters on Electrical and Optical Properties of ALD Passivated Black Silicon
Kexun Chen, Toni Pasanen, Ville Vähänissi, Hele Savin
2019
IEEE Journal of Photovoltaics
MACE nano-texture process applicable for both single- and multi-crystalline diamond-wire sawn Si solar cells
Kexun Chen, Jiawei Zha, Fenqin Hu, Xiaoya Ye, Shuai Zou, Ville Vähänissi, Joshua Pearce, Hele Savin, Xiaodong Su
2019
Solar Energy Materials and Solar Cells
(poster) On the Surface Passivation Stability of Spatial Atomic Layer Deposited Aluminum Oxide Films for Photovoltaics
Ismo T. S. Heikkinen, Sauli Virtanen, Marko Yli-Koski, Iris Mack, Ville Vähänissi, Emma Salmi, Hele Savin
2019
(poster) Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions
Ismo T. S. Heikkinen, Ville Vähänissi, Hele Savin
2019
Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions
Ismo Heikkinen, George Koutsourakis, Sebastian Wood, Ville Vähänissi, Fernando A. Castro, Hele Savin
2019
SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics
Dissociation and Formation Kinetics of Iron-Boron Pairs in Silicon after Phosphorus Implantation Gettering
Nabil Khelifati, Hannu S. Laine, Ville Vähänissi, Hele Savin, Fatima Zohra Bouamama, Djoudi Bouhafs
2019
Physica Status Solidi (A) Applications and Materials Science
(poster) Dissociation and Formation Kinetics of Iron-Boron Pairs in Silicon after Phosphorus Implantation Gettering
Nabil Khelifati, Hannu S. Laine, Ville Vähänissi, Hele Savin, Fatima Zohra Bouamama, Djoudi Bouhafs
2019
Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-electromechanical Systems
Zhengjun Liu, Ville Vähänissi, Nikolai Chekurov, Ilkka Tittonen, Hele Savin
2019
Journal of Microelectromechanical Systems
(poster) Crystalline silicon oxide for enhanced surface passivation in silicon solar cells
Iris Mack, Ismo T. S. Heikkinen, Juha Pekka Lehtiö, Zahra Jahanshah Rad, Ville Vähänissi, Pekka Laukkanen, Hele Savin
2019
(oral talk) Doping in silicon affects the blistering of ALD-grown aluminium oxide
Jennifer Ott, Moises Garín, Kawa Rosta, Toni P. Pasanen, Ville Vähänissi, Hele Savin
2019
Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide
Jennifer Ott, Toni Pasanen, Päivikki Repo, Heli Seppänen, Ville Vähänissi, Hele Savin
2019
Physica Status Solidi (A) Applications and Materials Science
Compatibility of 3-D Printed Devices in Cleanroom Environments for Semiconductor Processing
Toni P. Pasanen, Guillaume von Gastrow, Ismo T. S. Heikkinen, Ville Vähänissi, Hele Savin, Joshua Pearce
2019
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Impact of Black Silicon on Light- and Elevated Temperature-Induced Degradation in Industrial Passivated Emitter and Rear Cells
Toni Pasanen, Chiara Modanese, Ville Vähänissi, Hannu Laine, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Ismo T. S. Heikkinen, Matthias Wagner, Hele Savin
2019
Progress in Photovoltaics
(invited talk) Industrial applicability of dry-etched black silicon on PERC solar cells and modules
Toni Pasanen, Ville Vähänissi, Hele Savin
2019
(oral talk) Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide
Toni Pasanen, Jennifer Ott, Päivikki Repo, Heli Seppänen, Ville Vähänissi, Hele Savin
2019
(poster) Efficient passivation of low-reflectance MACE black silicon
Toni P. Pasanen, Kexun Chen, Ville Vähänissi, Hele Savin
2019
(poster) Low-temperature cleaning and oxidation of silicon surfaces
Zahra Jahanshah Rad, Iris Mack, Juha Pekka Lehtiö, Ismo T. S. Heikkinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Risto Punkkinen, Hannu Pekka Hedman, Pekka Laukkanen, Hele Savin, Kalevi Kokko
2019
Cu gettering by phosphorus-doped emitters in p-type silicon: Effect on light-induced degradation
Alessandro Inglese, Hannu Laine, Ville Vähänissi, Hele Savin
2018
AIP Advances
Semiconductor parameter extraction via current-voltage characterization and Bayesian inference methods
Rachel C. Kurchin, Jeremy R. Poindexter, Daniil Kitchaev, Ville Vähänissi, Carlos Del Cañizo, Liu Zhe, Hannu S. Laine, Chris Roat, Sergiu Levcenco, Gerbrand Ceder, Tonio Buonassisi
2018
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC)
Elucidation of Iron Gettering Mechanisms in Boron-Implanted Silicon Solar Cells
Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning
2018
IEEE Journal of Photovoltaics
(oral talk) Patternability of quasi-mono silicon beyond the photovoltaic industry
Zhengjun Liu, Ville Vähänissi, Hele Savin
2018
(invited talk) Impact of High Temperature Processing on Copper-Related Light-Induced-Degradation in Silicon Devices
Chiara Modanese, Henri Vahlman, Alessandro Inglese, Marko Yli-Koski, Hannu Laine, Ville Vähänissi, Hele Savin
2018
(poster) Copper-Related Light Induced Degradation Activated by Firing
N. Nampalli, H. S. Laine, J. Colwell, V. Vähänissi, A. Inglese, C. Modanese, H. Vahlman, M. Yli-Koski, H. Savin
2018
Rapid thermal anneal activates light induced degradation due to copper redistribution
N. Nampalli, H. S. Laine, J. Colwell, V. Vähänissi, A. Inglese, C. Modanese, H. Vahlman, M. Yli-Koski, H. Savin
2018
Applied Physics Letters
Black silicon significantly enhances phosphorus diffusion gettering
Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Jonas Schön, Hele Savin
2018
Scientific Reports
Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon
Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Kristian Salo, Sebastian Husein, Hele Savin
2018
IEEE Journal of Photovoltaics
Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules
Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Emma Salmi, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin
2018
Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition
(invited talk) Elimination of light-induced degradation by black silicon
Toni Pasanen, Chiara Modanese, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Matthias Wagner, Hele Savin
2018
(invited talk) Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon
Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Kristian Salo, Hele Savin
2018
(invited talk) Industrial applicability of black silicon on PERC solar cells and modules
Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin
2018
(oral talk) Elimination of light-induced degradation by black silicon
Toni Pasanen, Chiara Modanese, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Matthias Wagner, Hele Savin
2018
(poster) Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules
Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Emma Salmi, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin
2018
Photodetector structures and manufacturing the same
Hele Savin, Ville Vähänissi, Mikko Juntunen, Päivikki Repo, Antti Haarahiltunen
2018
Efficient surface passivation of black silicon using spatial atomic layer deposition
Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin
2017
Efficient surface passivation of black silicon using spatial atomic layer deposition
Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin
2017
7th International Conference on Silicon Photovoltaics, SiliconPV 2017
(oral talk) Efficient surface passivation of black silicon using spatial atomic layer deposition
Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin
2017
(poster) Efficient surface passivation of black silicon using spatial atomic layer deposition
Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin
2017
Black silicon n-Type photodiodes with high response over wide spectral range
Juha Heinonen, Mikko A. Juntunen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Timo Dönsberg, Hele Savin
2017
Optical Sensors 2017
(oral talk) Black silicon n-Type photodiodes with high response over wide spectral range
Juha Heinonen, Mikko A. Juntunen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Timo Dönsberg, Hele Savin
2017
N-Type induced junction black silicon photodiode for UV detection
Mikko A. Juntunen, Juha Heinonen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Anna Vaskuri, Hele Savin
2017
Integrated Photonics: Materials, Devices, and Applications IV
(oral talk) Novel high quantum efficiency photodiode for X-ray imaging
Mikko Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Hele Savin
2017
(oral talk) N-Type induced junction black silicon photodiode for UV detection
Mikko A. Juntunen, Juha Heinonen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Anna Vaskuri, Hele Savin
2017
(oral talk) Cu gettering by phosphorus-doped emitters in p-type silicon: Effect on light-induced degradation
Hannu Laine, Alessandro Inglese, Ville Vähänissi, Hele Savin
2017
(oral talk) Increasing yield of cast-silicon ingots via Tabula Rasa anneal
Hannu Laine, Ville Vähänissi, Zhengjun Liu, Toni Pasanen, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin
2017
(oral talk) Toward Effective Gettering in Boron-Implanted Silicon Solar Cells
Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Ashley E. Morishige, Jan Kruegener, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning
2017
(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon
Hannu Laine, Ville Vähänissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, David P. Fenning, Hele Savin
2017
Toward Effective Gettering in Boron-Implanted Silicon Solar Cells
Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Ashley E. Morishige, Jan Kruegener, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning
2017
Proceedings of the 44th IEEE Photovoltaic Specialists Conference (PVSC)
Electronic Quality Improvement of Highly Defective Quasi-Mono Silicon Material by Phosphorus Diffusion Gettering
Zhengjun Liu, Ville Vähänissi, Hannu S. Laine, Morten Lindeberg, Marko Yli-Koski, Hele Savin
2017
Advanced Electronic Materials
(invited talk) Enhanced iron gettering with black silicon
Toni Pasanen, Hannu Laine, Ville Vähänissi, Hele Savin
2017
(invited talk) Gettering of iron with black silicon
Toni Pasanen, Hannu Laine, Ville Vähänissi, Jonas Schön, Hele Savin
2017
(oral talk) Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks
Toni Pasanen, Ville Vähänissi, Nicholas Theut, Hele Savin
2017
(poster) Comparison of contact and contactless CV for thin film oxide characterization
Toni Pasanen, Juha Heinonen, Navneet Kumar, Ville Vähänissi, Chiara Modanese, Hele Savin
2017
Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks
Toni Pasanen, Ville Vähänissi, Nicholas Theut, Hele Savin
2017
7th International Conference on Silicon Photovoltaics, SiliconPV 2017
Full recovery of red zone in p-type high-performance multicrystalline silicon
Ville Vähänissi, Hannu S. Laine, Zhengjun Liu, Marko Yli-Koski, Antti Haarahiltunen, Hele Savin
2017
Solar Energy Materials and Solar Cells
Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction
Mikko A. Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Dileep Valluru, Hele Savin
2016
Nature Photonics
Finite- vs. infinite-source emitters in silicon photovoltaics
Hannu S. Laine, Ville Vähänissi, Zhengjun Liu, Haibing Huang, Ernesto Magana, Ashley E. Morishige, Nabil Khelifati, Sebastian Husein, Barry Lai, Mariana Bertoni, Djoudi Bouhafs, Tonio Buonassisi, David P. Fenning, Hele Savin
2016
Proceedings of the 43rd IEEE Photovoltaic Specialists Conference (PVSC)
Impact of Iron Precipitation on Phosphorus-Implanted Silicon Solar Cells
Hannu S. Laine, Ville Vähänissi, Ashley E. Morishige, Jasmin Hofstetter, Antti Haarahiltunen, Barry Lai, Hele Savin, David P. Fenning
2016
IEEE Journal of Photovoltaics
(oral talk) Turning scrap silicon wafers into usable solar-cell material by dissolving precipitated metal impurities
Hannu Laine, Ville Vähänissi, Antti Haarahiltunen, Tonio Buonassisi, Zhengjun Liu, Hele Savin
2016
(poster) Decreasing the “red zone” width in seed-assisted cast silicon wafers via Tabula Rasa anneal
Hannu Laine, Ville Vähänissi, Zhengjun Liu, Antti Haarahiltunen, Hele Savin
2016
(poster) Evaluation of iron gettering mechanisms in boron-implanted emitters
Hannu Laine, Ernesto Magana, Ville Vähänissi, Zhengjun Liu, Kristian Salo, Haibing Huang, Hele Savin
2016
(poster) Finite- vs. infinite-source emitters in silicon photovoltaics
Hannu S. Laine, Ville Vähänissi, Zhengjun Liu, Haibing Huang, Ernesto Magana, Ashley E. Morishige, Nabil Khelifati, Sebastian Husein, Barry Lai, Mariana Bertoni, Djoudi Bouhafs, Tonio Buonassisi, David P. Fenning, Hele Savin
2016
Boron and phosphorus diffusion gettering: Efficiency, mechanisms and applicability to silicon solar cells
Ville Vähänissi
2016
(oral talk) Removal of iron precipitates in quasi-mono silicon wafers using high-temperature anneal
Hannu Laine, Ville Vähänissi, Zhengjun Liu, Marko Yli-Koski, Hele Savin
2015
(poster) Investigating iron gettering mechanisms in phosphorous-implanted emitters
Hannu Laine, Ville Vähänissi, Ashley E. Morishige, Jasmin Hofstetter, Antti Haarahiltunen, Barry Lai, David P. Fenning, Hele Savin
2015
(poster) Removal of iron precipitates in multicrystalline silicon wafers using high-temperature anneal
Ville Vähänissi, Hannu Laine, Zhengjun Liu, Antti Haarahiltunen, Marko Yli-Koski, Matthias Wagner, Hele Savin
2015
Iron Precipitation upon Gettering in Phosphorus-Implanted Czochralski Silicon and its Impact on Solar Cell Performance
David Fenning, Ville Vähänissi, Ashley Morishige, Hannu Laine, Antti Haarahiltunen, Sergio Castellanos, Mallory Jensen, Hele Savin
2014
Proceeedings of the 40th IEEE Photovoltaic Specialists Conference, Denver, Colorado, USA, June 8-13, 2014
(oral talk) Iron Precipitation upon Gettering in Phosphorus-Implanted Czochralski Silicon and its Impact on Solar Cell Performance
David Fenning, Ville Vähänissi, Ashley Morishige, Hannu Laine, Antti Haarahiltunen, Sergio Castellanos, Mallory Jensen, Hele Savin
2014
(invited talk) The size distribution of iron precipitates in implanted solar cells
Hannu Laine, Ville Vähänissi, Jasmin Hofstetter, Ashley E. Morishige, Antti Haarahiltunen, David P. Fenning, Hele Savin
2014
(poster) Simulating Iron Precipitation in Phosphorus-Implanted Solar Cells
Hannu Laine, Ville Vähänissi, Jasmin Hofstetter, Ashley Morishige, Antti Haarahiltunen, David Fenning, Hele Savin
2014
(invited) Ion implantation induced defects and their recovery during silicon solar cell emitter formation
Z. Liu, Ville Vähänissi, Hannu Laine, Antti Haarahiltunen, Hele Savin
2014
Main defect reactions behind phosphorus diffusion gettering of iron
Jonas Schön, Ville Vähänissi, Antti Haarahiltunen, Martin Schubert, Wilhelm Warta, Hele Savin
2014
Journal of Applied Physics
Gettering of Iron in Silicon Solar Cells with Implanted Emitters
Ville Vähänissi, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin
2014
IEEE Journal of Photovoltaics
N-type black silicon solar cells
Päivikki Repo, Jan Benick, Ville Vähänissi, Jonas Schön, Guillaume von Gastrow, Bernd Steinhauser, Martin C. Schubert, Martin Hermle, Hele Savin
2013
Energy Procedia
(oral talk) Passivation of black silicon boron emitters with ALD Al2O3
Päivikki Repo, Ville Vähänissi, Jonas Schön, Jan Benick, Martin C. Schubert, Hele Savin
2013
Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Päivikki Repo, Jan Benick, Guillaume von Gastrow, Ville Vähänissi, Friedemann D. Heinz, Jonas Schön, Martin C. Schubert, Hele Savin
2013
Physica Status Solidi - Rapid Research Letters
Impact of phosphorus gettering parameters and initial iron level on silicon solar cell properties
Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin
2013
Progress in Photovoltaics
(oral talk) Gettering of iron in silicon solar cells with implanted emitters
Ville Vähänissi, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin
2013
(poster) Gettering of iron in silicon solar cells with implanted emitters
Ville Vähänissi, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin
2013
Significant minority carrier lifetime improvement in red edge zone in n-type multicrystalline silicon
Ville Vähänissi, Marko Yli-Koski, Antti Haarahiltunen, Heli Talvitie, Yameng Bao, Hele Savin
2013
Solar Energy Materials and Solar Cells
(invited talk) Modeling of boron and phosphorus diffusion gettering of iron in silicon
Antti Haarahiltunen, Ville Vähänissi, Marko Yli-Koski, Hele Savin
2012
(poster) Non-Equilibrium Segregation of Iron and Iron Precipitation at the Emitter During Phosphorus Diffusion Gettering
Antti Haarahiltunen, Heli Talvitie, Ville Vähänissi, Marko Yli-Koski, Hele Savin
2012
Diffusion gettering of metal impurities in silicon
Hele Savin, Ville Vähänissi, Marko Yli-Koski, Heli Talvitie, Antti Haarahiltunen
2012
Proceedings of the 38th IEEE Photovoltaic Specialists Conference
(invited talk) Diffusion gettering of metal impurities in silicon
Hele Savin, Ville Vähänissi, Marko Yli-Koski, Heli Talvitie, Antti Haarahiltunen
2012
(poster) Significant improvement of red edge zone in n-type multicrystalline silicon by gettering
Ville Vähänissi, Marko Yli-Koski, Yacine Boulfrad, Hele Savin
2012
Gettering of iron in CZ-silicon by polysilicon layer
Antti Haarahiltunen, Marko Yli-Koski, Heli Talvitie, Ville Vähänissi, Jeanette Lindroos, Hele Savin
2011
Physica Status Solidi (C) Current Topics in Solid State Physics
Experimental study of iron redistribution between bulk defects and boron doped layer in silicon wafers
Heli Talvitie, Marko Yli-Koski, Antti Haarahiltunen, Ville Vähänissi, Muhammad Imran Asghar, Hele Savin
2011
Physica Status Solidi (A) Applications and Materials Science
Phosphorus and boron diffusion gettering of iron in monocrystalline silicon
Heli Talvitie, Ville Vähänissi, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin
2011
Journal of Applied Physics
Effect of Contamination Level and Gettering Parameters on Solar Cell Performance in Iron Contaminated Silicon
Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin
2011
Proceedings of the 26th European Photovoltaic Solar Energy Conference
Effect of iron on solar cell parameters
Ville Vähänissi, Marko Yli-Koski, Hele Savin
2011
Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany, September 5-9, 2011
(poster) Effect of Contamination Level and Gettering Parameters on Solar Cell Performance in Iron Contaminated Silicon
Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin
2011
Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon
Antti Haarahiltunen, Ville Vähänissi, Marko Yli-Koski, Heli Talvitie, Hele Savin
2010
Solid State Phenomena
(poster) Gettering of iron in CZ-silicon by polysilicon layer
Antti Haarahiltunen, Marko Yli-Koski, Heli Talvitie, Ville Vähänissi, Jeanette Lindroos, Hele Savin
2010
Physical mechanisms of boron diffusion gettering of iron in silicon
V. Vähänissi, A. Haarahiltunen, H. Talvitie, M. Yli-Koski, J. Lindroos, H. Savin
2010
Physica Status Solidi - Rapid Research Letters
Analysis of phosphorus diffusion and intrinsic gettering of iron in multicrystalline silicon
Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Ville Vähänissi, Hele Savin
2009
European Photovoltaic Solar Energy Conference
(oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon
Antti Haarahiltunen, Ville Vähänissi, Marko Yli-Koski, Heli Talvitie, Hele Savin
2009
(poster) Analysis of phosphorus diffusion and intrinsic gettering of iron in multicrystalline silicon
Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Ville Vähänissi, Hele Savin
2009
New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Laura Luosujärvi, Ville Vähänissi, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kauppila
2009
Effect of iron on the efficiency of single crystalline silicon solar cells
Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin
2009
Proceedings of the European Photovoltaic Solar Energy Conference
Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon
Ville Vähänissi, Antti Haarahiltunen, Marki Yli-Koski, H. Talvitie, M. I. Asghar, Hele Savin
2009
Solid State Phenomena
(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon
Ville Vähänissi, Antti Haarahiltunen, Marki Yli-Koski, H. Talvitie, M. I. Asghar, Hele Savin
2009
(poster) Effect of iron on the efficiency of single crystalline silicon solar cells
Ville Vähänissi, Antti Haarahiltunen, Heli Talvitie, Marko Yli-Koski, Hele Savin
2009
High-tempereture silicon microbridge actuator
Lauri Sainiemi, Kestutis Grigoras, Ji Fan, Ville Saarela, Ville Vähänissi, Aki Laakso, Sami Franssila
2008
Metallization of Polymer Substrates for Flexible Electronics
Ville Vähänissi
2008