Ville Vähänissi

Elimination of dead layer in silicon particle detectors via induced electric field based charge collection

Olli E. Setälä, Toni P. Pasanen, Jennifer Ott, Igors Krainukovs, Juha Heinonen, Ville Vähänissi, Hele Savin 2025 Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Contactless analysis of surface passivation and charge transfer at the TiO ₂-Si interface

Ramsha Khan, Xiaolong Liu, Ville Vähänissi, Harri Ali-Löytty, Hannu P. Pasanen, Hele Savin, Nikolai V Tkachenko 2024 Physical Chemistry Chemical Physics

(oral talk) Effect Of The Morphology Of Black Silicon Passivated By Alumina On The Performance Of Interdigitated Back Contact Solar Cells

Nabil Khelifati, Ozan Aydın, Bülent Arıkan, Ghania Fortas, Leila Harkat, Ville Vähänissi, Xiaolong Liu, Faouzi Kezzoula, Raşit Turan 2024

(poster) New Method for Ohmic Metal to Si Contact Formation Utilizing Highly Charged ALD Dielectric.

Lassi Lahtiluoma, Olli Setälä, Ville Vähänissi, Hele Savin 2024

Bridging the gap between surface physics and photonics

Pekka Laukkanen, Marko Punkkinen, Mikhail Kuzmin, Kalevi Kokko, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin, Antti Tukiainen, Teemu Hakkarainen, Jukka Viheriälä, Mircea Guina 2024 Reports on Progress in Physics

(poster) ALD SiO2 provides efficient Ge surface passivation with a tailorable charge polarity

Oskari Leiviskä, Hanchen Liu, John Fung, Joonas Isometsä, Ville Vähänissi, Hele Savin 2024

Adsorption Induced Bipolar Excitation at Semiconductor Surface

Shengyang Li, Kexun Chen, Mahdi Alizadeh, Ville Vähänissi, Hele Savin, Jani Oksanen 2024 Surfaces and Interfaces

Impact of post-ion implantation annealing on Se-hyperdoped Ge

Xiaolong Liu, Patrick Mc Kearney, Sören Schäfer, Behrad Radfar, Yonder Berencen, Ulrich Kentsch, Ville Vähänissi, Shengqiang Zhou, Stefan Kontermann, Hele Savin 2024 Applied Physics Letters

(oral talk) Hyperdoping germanium with titanium via femtosecond laser processing

Xiaolong Liu, Dmytro Gnatyuk, Ville Vähänissi, Hele Savin 2024

Impact of Pulse Duration on the Properties of Laser Hyperdoped Black Silicon

Patrick Mc Kearney, Sören Schäfer, Xiaolong Liu, Simon Paulus, Ingo Lebershausen, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann 2024 Advanced Photonics Research

(poster) Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers

Olga Morozova, Kexun Chen, Behrad Radfar, Ulrich Kentsch, Luke Antwis, Hele Savin, Ville Vähänissi 2024

Robustness of electrical quality of ion implanted black silicon emitters: Comparison between different ion implantation service providers

Olga Morozova, Kexun Chen, Behrad Radfar, Ulrich Kentsch, Luke Antwis, Hele Savin, Ville Vähänissi 2024

Extended Infrared Absorption in Nanostructured Si Through Se Implantation and Flash Lamp Annealing

Behrad Radfar, Xiaolong Liu, Yonder Berencen, Mohd Saif Shaikh, Slawomir Prucnal, Ulrich Kentsch, Ville Vähänissi, Shengqiang Zhou, Hele Savin 2024 Physica Status Solidi (A) Applications and Materials Science

(oral talk) Impact of upconverting atomic layer deposited Er2O3 on Si solar cell surface passivation

Behrad Radfar, Amr Ghazy, Xiaolong Liu, Ville Vähänissi, Maarit Karppinen, Hele Savin 2024

Effective carrier lifetime in ultrashort pulse laser hyperdoped silicon: sulfur concentration dependence and practical limitations

Sören Schäfer, Xiaolong Liu, Patrick Mc Kearney, Simon Paulus, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann 2024 PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE

(invited talk) Sulfur-hyperdoped silicon by ultrashort laser processing

Sören Schäfer, Patrick Mc Kearney, Simon Paulus, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Doris Mutschall, Vesa Koskinen, Michael Serue, Tobias Niemeyer, Michael Seibt, Hele Savin, Stefan Kontermann 2024

(poster) Efficient surface passivation of germanium by porous Ge layer

Mariia Terletskaia, Joonas Isometsä, Mikko Miettinen, Pekka Laukkanen, Ville Vähänissi, Hele Savin 2024

Status report on emerging photovoltaics

Annick Anctil, Meghan N. Beattie, Christopher Case, Aditya Chaudhary, Benjamin D. Chrysler, Michael G. Debije, Stephanie Essig, David K. Ferry, Vivian E. Ferry, Marina Freitag, Isaac Gould, Karin Hinzer, Harald Hoppe, Olle Inganas, Lethy Krishnan Jagadamma, Min Hun Jee, Raymond K. Kostuk, Daniel Kirk, Stephan Kube, Minyoung Lim, Joseph M. Luther, Lorelle Mansfield, Michael D. McGehee, Duong Nguyen Minh, Preeti Nain, Matthew O. Reese, Angele Reinders, Ifor D.W. Samuel, Wilfried Van Sark, Hele Savin, Ian R. Sellers, Sean E. Shaheen, Zheng Tang, Fatima Toor, Ville Vahanissi, Ella Wassweiler, Emily L. Warren, Vincent R. Whiteside, Han Young Woo, Gang Xiong, Xitong Zhu 2023 Journal of Photonics for Energy

Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode

Kexun Chen, Olli Setälä, Xiaolong Liu, Behrad Radfar, Toni Pasanen, Michael Serue, Juha Heinonen, Hele Savin, Ville Vähänissi 2023 IEEE Sensors Journal

Efficient surface passivation of germanium nanostructures with 1% reflectance

John Fung, Joonas Isometsä, Juha Pekka Lehtiö, Toni Pasanen, Hanchen Liu, Oskari Leiviskä, Pekka Laukkanen, Hele Savin, Ville Vähänissi 2023 Nanotechnology

Black ultra-thin crystalline silicon wafers reach the 4n2 absorption limit – application to IBC solar cells

Moises Garin, Toni Pasanen, G. López, Ville Vähänissi, Kexun Chen, I. Martín , Hele Savin 2023 Small

(poster) Spatial uniformity of black silicon induced junction photodiode responsivity

Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni Pasanen, Hele Savin, Juha Toivanen, Mikko Juntunen 2023

Spatial uniformity of black silicon induced junction photodiode responsivity

Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Juha Toivanen, Mikko A. Juntunen 2023 Optical Components and Materials XX

Surface passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer

Joonas Isometsä, Zahra Jahanshah Rad, John Fung, Hanchen Liu, Juha Pekka Lehtiö, Toni Pasanen, Oskari Leiviskä, Mikko Miettinen, P. Laukkanen, K. Kokko, Hele Savin, Ville Vähänissi 2023 Crystals

Is Carrier Mobility a Limiting Factor for Charge Transfer in Tio2/Si Devices? A Study by Transient Reflectance Spectroscopy

Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Hussein Ayedh, Jesse Saari, Ville Vähänissi, Mika Valden, Hele Savin, Nikolai V. Tkachenko 2023 Surfaces and Interfaces

Chemical Excitation of Silicon Photoconductors by Metal-Assisted Chemical Etching

Shengyang Li, Hussein M. Ayedh, Marko Yli-Koski, Ville Vähänissi, Hele Savin, Jani Oksanen 2023 Journal of Physical Chemistry C

(oral talk) Electroless excitation of semiconductors through semiconductor-liquid interfaces

Shengyang Li, Kexun Chen, Ville Vähänissi, Hele Savin, Jani Oksanen 2023

Comparison of SiNx-based Surface Passivation Between Germanium and Silicon

Hanchen Liu, Toni Pasanen, John Fung, Joonas Isometsä, Oskari Leiviskä, Ville Vähänissi, Hele Savin 2023 Physica Status Solidi (A) Applications and Materials Science

(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium

Hanchen Liu, Toni Pasanen, Oskari Leiviskä, Joonas Isometsä, John Fung, Marko Yli-Koski, Mikko Miettinen, Pekka J. Laukkanen, Ville Vähänissi, Hele Savin 2023

(oral talk) Surface Passivation and Charge Transfer at TiO2/Si Interface

Xiaolong Liu, Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Ville Vähänissi, Mika Valden, Nikolai V. Tkachenko, Hele Savin 2023

Plasma-enhanced atomic layer deposited SiO2 enables positive thin film charge and surface recombination velocity of 1.3 cm/s on germanium

Hanchen Liu, Toni Pasanen, Oskari Leiviskä, Joonas Isometsä, John Fung, Marko Yli-Koski, Mikko Miettinen, Pekka Laukkanen, Ville Vähänissi, Hele Savin 2023 Applied Physics Letters

(poster) Contact formation via femtosecond-laser hyperdoping in silicon optoelectronic devices

Xiaolong Liu, Kexun Chen, Behrad Radfar, Patrick Mc Kearney, Simon Paulus, Sören Schäfer, Michael Serué, Doris Mutschall, Vesa Koskinen, Toni Pasanen, Ville Vähänissi, Mikko Juntunen, Stefan Kontermann, Hele Savin 2023

(poster) Surface Passivation of Si by Atomic Layer Deposited TiO2

Xiaolong Liu, Ville Vähänissi, Hele Savin, Ramsha Khan, Hannu Pasanen, Harri Ali-Löytty, Mika Valden, Nikolai V. Tkachenko 2023

Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality

Iris Mack, Kawa Rosta, Ulviyya Quliyeva, Jennifer Ott, Toni Pasanen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtiö, Pekka Laukkanen, Caterina Soldano, Hele Savin 2023 Physica Status Solidi (A) Applications and Materials Science

Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications–Effects of Precursor and Operating Conditions

Vladyslav Matkivskyi, Oskari Leiviskä, Sigurd Wenner, Liu Hanchen, Ville Vahanissi, Hele Savin, Marisa Di Sabatino, Gabriella Tranell 2023 Materials

Role of CsMnCl3 Nanocrystal Structure on Its Luminescence Properties

Anastasia Matuhina, G. Krishnamurthy Grandhi, Fang Pan, Maning Liu, Harri Ali-Löytty, Hussein M. Ayedh, Antti Tukiainen, Jan-Henrik Smått, Ville Vähänissi, Hele Savin, Jingrui Li, Patrick Rinke, Paola Vivo 2023 ACS Applied Nano Materials

Improved QE in CMOS image sensors with nano-black antireflection layer

Martin J. Prest, Olli Setälä, Konstantin D. Stefanov, Ville Vähänissi, Hele Savin, Douglas Jordan 2023 2023 International Image Sensor Workshop Proceedings

(oral talk) Improved QE in CMOS image sensors with nano-black antireflection layer

Martin J. Prest, Olli Setälä, Konstantin D. Stefanov, Ville Vähänissi, Hele Savin, Douglas Jordan 2023

Effects of Ultrahigh Vacuum Treatments on Wet Chemically Cleaned Si Surfaces

Zahra Jahanshah Rad, Mikko Miettinen, Marko Punkkinen, Pekka Laukkanen, Kalevi Kokko, Ville Vähänissi, Hele Savin 2023 Solid State Phenomena

Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space

Behrad Radfar, Kexun Chen, Olli Setälä, Ville Vähänissi, Hele Savin, Xiaolong Liu 2023 Optics Letters

(oral talk) Nanostructured Silicon Hyperdoped with Se by Ion Implantation and Flash Lamp Annealing

Behrad Radfar, Xiaolong Liu, Slawomir Prucnal, Mohd Saif Shaikh, Ulrich Kentsch, Ville Vähänissi, Yonder Berencén, Shengqiang Zhou, Hele Savin 2023

(invited talk) Excellent Responsivity and Low Dark Current Obtained with Black Si Photodiode

Hele Savin, Kexun Chen, Olli Setälä, Xiaolong Liu, Behrad Radfar, Ville Vähänissi 2023

(oral talk) Effective carrier lifetime in ultrashort pulse laser hyperdoped silicon: dopant concentration dependence and practical upper limits

Sören Schäfer, Xiaolong Liu, Patrick Mc Kearney, Simon Paulus, Behrad Radfar, Ville Vähänissi, Hele Savin, Stefan Kontermann 2023

Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm

Olli Setälä, Kexun Chen, Toni Pasanen, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin 2023 ACS Photonics

CMOS Image Sensor for Broad Spectral Range with >90% Quantum Efficiency

Olli E. Setälä, Martin J. Prest, Konstantin D. Stefanov, Douglas Jordan, Matthew R. Soman, Ville Vähänissi, Hele Savin 2023 Small

Fast Wafer-Level Characterization of Silicon Photodetectors by Photoluminescence Imaging

Hussein Ayedh, Wisa Förbom, Juha Heinonen, Ismo T. S. Heikkinen, Marko Yli-Koski, Ville Vähänissi, Hele Savin 2022 IEEE Transactions on Electron Devices

(oral talk) Record-high UV response in implanted junctions through passivation of surface defects and minimisation of boron implantation damage

Kexun Chen, Olli Setälä, Behrad Radfar, Udo Kroth, Ville Vähänissi, Hele Savin 2022

Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes

Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen 2022 Optical Components and Materials XIX

(oral talk) Effect of anode sheet resistance on rise time of black silicon induced junction photodiodes

Juha Heinonen, Antti Haarahiltunen, Ville Vähänissi, Toni Pasanen, Hele Savin, Mikko Juntunen 2022

(poster) Reduction of defect density at Ge/Al2O3 interface using GeO2 interfacial layers

Joonas Isometsä, John Fung, Toni Pasanen, Hanchen Liu, Oskari Leiviskä, Marko Yli-Koski, Ville Vähänissi, Hele Savin 2022

Electron Injection in Metal Assisted Chemical Etching as a Fundamental Mechanism for Electroless Electricity Generation

Shengyang Li, Kexun Chen, Ville Vähänissi, Ivan Radevici, Hele Savin, Jani Oksanen 2022 Journal of Physical Chemistry Letters

Millisecond-Level Minority Carrier Lifetime in Femtosecond Laser-Textured Black Silicon

Xiaolong Liu, Behrad Radfar, Kexun Chen, Elmeri Pälikkö, Toni Pasanen, Ville Vähänissi, Hele Savin 2022 IEEE Photonics Technology Letters

(oral talk) Carrier recombination in black silicon fabricated by high repetition rate fs-laser

Xiaolong Liu, Behrad Radfar, Toni Pasanen, Ville Vähänissi, Hele Savin 2022

(oral talk) Controlling charge polarity and defect density at Ge/Al2O3 interface using SiNx interlayer

Hanchen Liu, Toni Pasanen, Tsun Hang Fung, Joonas Isometsä, Oskari Leiviskä, Ville Vähänissi, Hele Savin 2022

Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE and Fs-Laser Etching

Xiaolong Liu, Behrad Radfar, Kexun Chen, Olli Setälä, Toni Pasanen, Marko Yli-Koski, Hele Savin, Ville Vähänissi 2022 IEEE Transactions on Semiconductor Manufacturing

(poster) Optoelectronic properties of high repetition rate femtosecond-laser processed black silicon

Xiaolong Liu, Behrad Radfar, Toni Pasanen, Ville Vähänissi, Hele Savin 2022

Tailoring Femtosecond-Laser Processed Black Silicon for Reduced Carrier Recombination Combined with >95% Above-Bandgap Absorption

Xiaolong Liu, Behrad Radfar, Kexun Chen, Toni Pasanen, Ville Vähänissi, Hele Savin 2022 Advanced Photonics Research

(poster) Structure-induced luminescence in all-inorganic manganese halide perovskite nanocrystals

Anastasia Matuhina, G. Krishnamurthy Grandhi, Maning Liu, Harri Ali-Löytty, Hussein Ayedh, Jan Henrik Smått, Ville Vähänissi, Hele Savin, Paola Vivo 2022

Effects of post oxidation of SiO2/Si interfaces in ultrahigh vacuum below 450 °C

Zahra Jahanshah Rad, Juha Pekka Lehtiö, Kexun Chen, Iris Mack, Ville Vähänissi, Mikko Miettinen, Marko Punkkinen, Risto Punkkinen, Petri Suomalainen, Hannu Pekka Hedman, Mikhail Kuzmin, Jekaterina Kozlova, Mihkel Rähn, university tart, Hele Savin, Pekka Laukkanen, Kalevi Kokko 2022 Vacuum

(oral talk) Compatibility of Al-neal in processing of Si devices with Al₂O₃ layer

Olli Setälä, Toni Pasanen, Jennifer Ott, Ville Vähänissi, Hele Savin 2022

Efficient photon capture on germanium surfaces using industrially feasible nanostructure formation

Kexun Chen, Joonas Isometsä, Toni P. Pasanen, Ville Vähänissi, Hele Savin 2021 Nanotechnology

Harnessing Carrier Multiplication in Silicon Solar Cells Using UV Photons

Kexun Chen, Olli E. Setala, Behrad Radfar, Udo Kroth, Ville Vahanissi, Hele Savin 2021 IEEE Photonics Technology Letters

(oral talk) Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes

Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen 2021

Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes

Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen 2021 Optical Components and Materials XVIII

Achieving surface recombination velocity below 10 cm/s in n-type Germanium using ALD Al2O3

Joonas Isometsä, John Fung, Toni Pasanen, Hanchen Liu, Marko Yli-Koski, Ville Vähänissi, Hele Savin 2021 APL Materials

Grass-like alumina coated window harnesses the full omnidirectional potential of black silicon photodiodes

Christoffer Kauppinen, Toni Pasanen, Kirill Isakov, Michael Serue, Juha Heinonen, Ville Vähänissi, Harri Lipsanen, Hele Savin 2021 Applied Optics

(invited talk) Black silicon for PV—Which fabrication technology to choose?

Xiaolong Liu, Behrad Radfar, Kexun Chen, Olli Setälä, Toni Pasanen, Ville Vähänissi, Hele Savin 2021

Increased surface recombination in crystalline silicon under light soaking due to Cu contamination

Ismo TS Rauha, Anastasia H Soeriyadi, Moonyong Kim, Marko Yli-Koski, Brendan Wright, Ville Vähänissi, Brett J Hallam, Hele Savin 2021 Solar Energy Materials and Solar Cells

(oral talk) Nanostructuring process to minimize reflective losses in optoelectronic devices

Päivikki Repo, Toni Pasanen, Ville Vähänissi, Joonas Isometsä, Kexun Chen, Moises Garin, Hele Savin 2021

Semiconductor structures and manufacturing the same

Hele Savin, Ville Vähänissi, Mikko Juntunen, Juha Heinonen 2021

Al-neal Degrades Al₂O₃ Passivation of Silicon Surface

Olli E. Setälä, Toni P. Pasanen, Jennifer Ott, Ville Vähänissi, Hele Savin 2021 Physica Status Solidi (A) Applications and Materials Science

Black silicon boron emitter solar cells with EQE above 95% in UV

Kexun Chen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtio, Pekka Laukkanen, Marko Yli-Koski, Hele Savin 2020 Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020

(poster) Black silicon boron emitter solar cells with EQE above 95% in UV

Kexun Chen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtio, Pekka Laukkanen, Marko Yli-Koski, Hele Savin 2020

Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion

Tsun Hang Fung, Toni Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott 2020 Solar Energy Materials and Solar Cells

Black-silicon ultraviolet photodiodes achieve external quantum efficiency above 130%

Moises Garin, Juha Heinonen, Lutz Werner, Toni Pasanen, Ville Vähänissi, Antti Haarahiltunen, M. Juntunen, Hele Savin 2020 Physical Review Letters

AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure

Ismo T. S. Heikkinen, George Koutsourakis, Sauli Virtanen, Marko Yli-Koski, Sebastian Wood, Ville Vähänissi, Emma Salmi, Fernando A. Castro, Hele Savin 2020 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Can hydrogenation mitigate Cu-induced bulk degradation in silicon?

Ismo T.S. Heikkinen, Brendan Wright, Anastasia H. Soeriyadi, Marko Yli-Koski, Moonyong Kim, Ville Vähänissi, Brett J. Hallam, Hele Savin 2020 Proceedings of the 47th IEEE Photovoltaic Specialists Conference, PVSC 2020

(oral talk) Can hydrogenation mitigate Cu-induced bulk degradation in silicon?

Ismo T.S. Heikkinen, Brendan Wright, Anastasia H. Soeriyadi, Marko Yli-Koski, Moonyong Kim, Ville Vähänissi, Brett J. Hallam, Hele Savin 2020

High-sensitivity NIR photodiodes using black silicon

Juha Heinonen, Antti Haarahiltunen, Michael Serue, Ville Vähänissi, Toni Pasanen, Hele Savin, Lutz Werner, Mikko Juntunen 2020 Optical Components and Materials XVII

Modeling Field-effect in Black Silicon and its Impact on Device Performance

Juha Heinonen, Toni Pasanen, Ville Vähänissi, Mikko Juntunen, Hele Savin 2020 IEEE Transactions on Electron Devices

(oral talk) High-sensitivity NIR photodiodes using black silicon

Juha Heinonen, Antti Haarahiltunen, Michael Serue, Ville Vähänissi, Toni Pasanen, Hele Savin, Lutz Werner, Mikko Juntunen 2020

How Much Physics is in a Current-Voltage Curve? Inferring Defect Properties from Photovoltaic Device Measurements

Rachel C. Kurchin, Jeremy R. Poindexter, Ville Vähänissi, Hele Savin, Carlos del Cañizo, Tonio Buonassisi 2020 IEEE Journal of Photovoltaics

Black silicon back contact module with wide light acceptance angle

Pablo Ortega, Moises Garin, Guillaume von Gastrow, Tuukka Savisalo, Antti Tolvanen, Henri Vahlman, Ville Vähänissi, Toni Pasanen, David Carrio, Hele Savin, Ramon Alcubilla 2020 Progress in Photovoltaics

(oral talk) Black silicon back contact module with wide light acceptance angle

Pablo Ortega, Moises Garin, Guillaume von Gastrow, Tuukka Savisalo, Antti Tolvanen, Henri Vahlman, Ville Vähänissi, Toni Pasanen, David Carrio, Hele Savin, Ramon Alcubilla 2020

Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide

Jennifer Ott, Toni P. Pasanen, Akiko Gädda, Moises Garín, Kawa Rosta, Ville Vähänissi, Hele Savin 2020 Applied Surface Science

Nanostructured germanium with >99% absorption at 300-1600 nm wavelengths

Toni Pasanen, Joonas Isometsä, Moises Garin, Kexun Chen, Ville Vähänissi, Hele Savin 2020 Advanced Optical Materials

(oral talk) Nanostructured germanium with >99 % absorption for near-infrared sensor applications

Toni Pasanen, Joonas Isometsä, Moises Garin, Kexun Chen, Ville Vähänissi, Hele Savin 2020

Decreasing Interface Defect Densities via Silicon Oxide Passivation at Temperatures Below 450 C

Zahra Jahanshah Rad, Juha-Pekka Lehtiö, Iris Mack, Kawa Rosta, Kexun Chen, Ville Vähänissi, Marko P.J. Punkkinen, Risto Punkkinen, Hannu-Pekka Hedman, Andrei Pavlov, Mikhail V. Kuzmin, Hele Savin, Pekka J. Laukkanen, Kalevi Kokko 2020 ACS Applied Materials and Interfaces

(poster) Modification of chemical oxide passivation of silicon by ultrahigh-vacuum low-temperature treatments

Zahra Jahanshah Rad, Kexun Chen, Juha Pekka Lehtiö, Iris Mack, Esa Vuorinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Pekka Laukkanen, Hele Savin, Kalevi Kokko 2020

Superior gamma-detection and IR imaging via ALD-passivated germanium nanostructures

Hele Savin, Toni Pasanen, Joonas Isometsä, Kexun Chen, Ville Vähänissi, R Nurgalejevs, O Savina, V. Gostilo, A Aurola 2020

Effect of MACE Parameters on Electrical and Optical Properties of ALD Passivated Black Silicon

Kexun Chen, Toni Pasanen, Ville Vähänissi, Hele Savin 2019 IEEE Journal of Photovoltaics

MACE nano-texture process applicable for both single- and multi-crystalline diamond-wire sawn Si solar cells

Kexun Chen, Jiawei Zha, Fenqin Hu, Xiaoya Ye, Shuai Zou, Ville Vähänissi, Joshua Pearce, Hele Savin, Xiaodong Su 2019 Solar Energy Materials and Solar Cells

(poster) On the Surface Passivation Stability of Spatial Atomic Layer Deposited Aluminum Oxide Films for Photovoltaics

Ismo T. S. Heikkinen, Sauli Virtanen, Marko Yli-Koski, Iris Mack, Ville Vähänissi, Emma Salmi, Hele Savin 2019

(poster) Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions

Ismo T. S. Heikkinen, Ville Vähänissi, Hele Savin 2019

Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions

Ismo Heikkinen, George Koutsourakis, Sebastian Wood, Ville Vähänissi, Fernando A. Castro, Hele Savin 2019 SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics

Dissociation and Formation Kinetics of Iron-Boron Pairs in Silicon after Phosphorus Implantation Gettering

Nabil Khelifati, Hannu S. Laine, Ville Vähänissi, Hele Savin, Fatima Zohra Bouamama, Djoudi Bouhafs 2019 Physica Status Solidi (A) Applications and Materials Science

(poster) Dissociation and Formation Kinetics of Iron-Boron Pairs in Silicon after Phosphorus Implantation Gettering

Nabil Khelifati, Hannu S. Laine, Ville Vähänissi, Hele Savin, Fatima Zohra Bouamama, Djoudi Bouhafs 2019

Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-electromechanical Systems

Zhengjun Liu, Ville Vähänissi, Nikolai Chekurov, Ilkka Tittonen, Hele Savin 2019 Journal of Microelectromechanical Systems

(poster) Crystalline silicon oxide for enhanced surface passivation in silicon solar cells

Iris Mack, Ismo T. S. Heikkinen, Juha Pekka Lehtiö, Zahra Jahanshah Rad, Ville Vähänissi, Pekka Laukkanen, Hele Savin 2019

(oral talk) Doping in silicon affects the blistering of ALD-grown aluminium oxide

Jennifer Ott, Moises Garín, Kawa Rosta, Toni P. Pasanen, Ville Vähänissi, Hele Savin 2019

Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide

Jennifer Ott, Toni Pasanen, Päivikki Repo, Heli Seppänen, Ville Vähänissi, Hele Savin 2019 Physica Status Solidi (A) Applications and Materials Science

Compatibility of 3-D Printed Devices in Cleanroom Environments for Semiconductor Processing

Toni P. Pasanen, Guillaume von Gastrow, Ismo T. S. Heikkinen, Ville Vähänissi, Hele Savin, Joshua Pearce 2019 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Impact of Black Silicon on Light- and Elevated Temperature-Induced Degradation in Industrial Passivated Emitter and Rear Cells

Toni Pasanen, Chiara Modanese, Ville Vähänissi, Hannu Laine, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Ismo T. S. Heikkinen, Matthias Wagner, Hele Savin 2019 Progress in Photovoltaics

(invited talk) Industrial applicability of dry-etched black silicon on PERC solar cells and modules

Toni Pasanen, Ville Vähänissi, Hele Savin 2019

(oral talk) Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide

Toni Pasanen, Jennifer Ott, Päivikki Repo, Heli Seppänen, Ville Vähänissi, Hele Savin 2019

(poster) Efficient passivation of low-reflectance MACE black silicon

Toni P. Pasanen, Kexun Chen, Ville Vähänissi, Hele Savin 2019

(poster) Low-temperature cleaning and oxidation of silicon surfaces

Zahra Jahanshah Rad, Iris Mack, Juha Pekka Lehtiö, Ismo T. S. Heikkinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Risto Punkkinen, Hannu Pekka Hedman, Pekka Laukkanen, Hele Savin, Kalevi Kokko 2019

Cu gettering by phosphorus-doped emitters in p-type silicon: Effect on light-induced degradation

Alessandro Inglese, Hannu Laine, Ville Vähänissi, Hele Savin 2018 AIP Advances

Semiconductor parameter extraction via current-voltage characterization and Bayesian inference methods

Rachel C. Kurchin, Jeremy R. Poindexter, Daniil Kitchaev, Ville Vähänissi, Carlos Del Cañizo, Liu Zhe, Hannu S. Laine, Chris Roat, Sergiu Levcenco, Gerbrand Ceder, Tonio Buonassisi 2018 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC)

Elucidation of Iron Gettering Mechanisms in Boron-Implanted Silicon Solar Cells

Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning 2018 IEEE Journal of Photovoltaics

(oral talk) Patternability of quasi-mono silicon beyond the photovoltaic industry

Zhengjun Liu, Ville Vähänissi, Hele Savin 2018

(invited talk) Impact of High Temperature Processing on Copper-Related Light-Induced-Degradation in Silicon Devices

Chiara Modanese, Henri Vahlman, Alessandro Inglese, Marko Yli-Koski, Hannu Laine, Ville Vähänissi, Hele Savin 2018

(poster) Copper-Related Light Induced Degradation Activated by Firing

N. Nampalli, H. S. Laine, J. Colwell, V. Vähänissi, A. Inglese, C. Modanese, H. Vahlman, M. Yli-Koski, H. Savin 2018

Rapid thermal anneal activates light induced degradation due to copper redistribution

N. Nampalli, H. S. Laine, J. Colwell, V. Vähänissi, A. Inglese, C. Modanese, H. Vahlman, M. Yli-Koski, H. Savin 2018 Applied Physics Letters

Black silicon significantly enhances phosphorus diffusion gettering

Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Jonas Schön, Hele Savin 2018 Scientific Reports

Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon

Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Kristian Salo, Sebastian Husein, Hele Savin 2018 IEEE Journal of Photovoltaics

Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules

Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Emma Salmi, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin 2018 Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition

(invited talk) Elimination of light-induced degradation by black silicon

Toni Pasanen, Chiara Modanese, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Matthias Wagner, Hele Savin 2018

(invited talk) Impact of Standard Cleaning on Electrical and Optical Properties of Phosphorus-Doped Black Silicon

Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Kristian Salo, Hele Savin 2018

(invited talk) Industrial applicability of black silicon on PERC solar cells and modules

Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin 2018

(oral talk) Elimination of light-induced degradation by black silicon

Toni Pasanen, Chiara Modanese, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Christian Kusterer, Matthias Wagner, Hele Savin 2018

(poster) Industrial Applicability of Antireflection-Coating-Free Black Silicon on PERC Solar Cells and Modules

Toni Pasanen, Ville Vähänissi, Franziska Wolny, Alexander Oehlke, Matthias Wagner, Mikko A. Juntunen, Ismo T. S. Heikkinen, Emma Salmi, Sami Sneck, Henri Vahlman, Antti Tolvanen, Jaakko Hyvärinen, Hele Savin 2018

Photodetector structures and manufacturing the same

Hele Savin, Ville Vähänissi, Mikko Juntunen, Päivikki Repo, Antti Haarahiltunen 2018

Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin 2017

Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin 2017 7th International Conference on Silicon Photovoltaics, SiliconPV 2017

(oral talk) Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin 2017

(poster) Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin 2017

Black silicon n-Type photodiodes with high response over wide spectral range

Juha Heinonen, Mikko A. Juntunen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Timo Dönsberg, Hele Savin 2017 Optical Sensors 2017

(oral talk) Black silicon n-Type photodiodes with high response over wide spectral range

Juha Heinonen, Mikko A. Juntunen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Timo Dönsberg, Hele Savin 2017

N-Type induced junction black silicon photodiode for UV detection

Mikko A. Juntunen, Juha Heinonen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Anna Vaskuri, Hele Savin 2017 Integrated Photonics: Materials, Devices, and Applications IV

(oral talk) Novel high quantum efficiency photodiode for X-ray imaging

Mikko Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Hele Savin 2017

(oral talk) N-Type induced junction black silicon photodiode for UV detection

Mikko A. Juntunen, Juha Heinonen, Hannu S. Laine, Ville Vähänissi, Päivikki Repo, Anna Vaskuri, Hele Savin 2017

(oral talk) Cu gettering by phosphorus-doped emitters in p-type silicon: Effect on light-induced degradation

Hannu Laine, Alessandro Inglese, Ville Vähänissi, Hele Savin 2017

(oral talk) Increasing yield of cast-silicon ingots via Tabula Rasa anneal

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Toni Pasanen, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin 2017

(oral talk) Toward Effective Gettering in Boron-Implanted Silicon Solar Cells

Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Ashley E. Morishige, Jan Kruegener, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning 2017

(poster) Unified model for iron gettering in boron- and phosphorus-implanted silicon

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Ernesto Magana, Jan Krugener, Ashley E. Morishige, Kristian Salo, Barry Lai, David P. Fenning, Hele Savin 2017

Toward Effective Gettering in Boron-Implanted Silicon Solar Cells

Hannu S. Laine, Ville Vahanissi, Zhengjun Liu, Ernesto Magana, Ashley E. Morishige, Jan Kruegener, Kristian Salo, Barry Lai, Hele Savin, David P. Fenning 2017 Proceedings of the 44th IEEE Photovoltaic Specialists Conference (PVSC)

Electronic Quality Improvement of Highly Defective Quasi-Mono Silicon Material by Phosphorus Diffusion Gettering

Zhengjun Liu, Ville Vähänissi, Hannu S. Laine, Morten Lindeberg, Marko Yli-Koski, Hele Savin 2017 Advanced Electronic Materials

(invited talk) Enhanced iron gettering with black silicon

Toni Pasanen, Hannu Laine, Ville Vähänissi, Hele Savin 2017

(invited talk) Gettering of iron with black silicon

Toni Pasanen, Hannu Laine, Ville Vähänissi, Jonas Schön, Hele Savin 2017

(oral talk) Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

Toni Pasanen, Ville Vähänissi, Nicholas Theut, Hele Savin 2017

(poster) Comparison of contact and contactless CV for thin film oxide characterization

Toni Pasanen, Juha Heinonen, Navneet Kumar, Ville Vähänissi, Chiara Modanese, Hele Savin 2017

Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

Toni Pasanen, Ville Vähänissi, Nicholas Theut, Hele Savin 2017 7th International Conference on Silicon Photovoltaics, SiliconPV 2017

Full recovery of red zone in p-type high-performance multicrystalline silicon

Ville Vähänissi, Hannu S. Laine, Zhengjun Liu, Marko Yli-Koski, Antti Haarahiltunen, Hele Savin 2017 Solar Energy Materials and Solar Cells

Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction

Mikko A. Juntunen, Juha Heinonen, Ville Vähänissi, Päivikki Repo, Dileep Valluru, Hele Savin 2016 Nature Photonics

Finite- vs. infinite-source emitters in silicon photovoltaics

Hannu S. Laine, Ville Vähänissi, Zhengjun Liu, Haibing Huang, Ernesto Magana, Ashley E. Morishige, Nabil Khelifati, Sebastian Husein, Barry Lai, Mariana Bertoni, Djoudi Bouhafs, Tonio Buonassisi, David P. Fenning, Hele Savin 2016 Proceedings of the 43rd IEEE Photovoltaic Specialists Conference (PVSC)

Impact of Iron Precipitation on Phosphorus-Implanted Silicon Solar Cells

Hannu S. Laine, Ville Vähänissi, Ashley E. Morishige, Jasmin Hofstetter, Antti Haarahiltunen, Barry Lai, Hele Savin, David P. Fenning 2016 IEEE Journal of Photovoltaics

(oral talk) Turning scrap silicon wafers into usable solar-cell material by dissolving precipitated metal impurities

Hannu Laine, Ville Vähänissi, Antti Haarahiltunen, Tonio Buonassisi, Zhengjun Liu, Hele Savin 2016

(poster) Decreasing the “red zone” width in seed-assisted cast silicon wafers via Tabula Rasa anneal

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Antti Haarahiltunen, Hele Savin 2016

(poster) Evaluation of iron gettering mechanisms in boron-implanted emitters

Hannu Laine, Ernesto Magana, Ville Vähänissi, Zhengjun Liu, Kristian Salo, Haibing Huang, Hele Savin 2016

(poster) Finite- vs. infinite-source emitters in silicon photovoltaics

Hannu S. Laine, Ville Vähänissi, Zhengjun Liu, Haibing Huang, Ernesto Magana, Ashley E. Morishige, Nabil Khelifati, Sebastian Husein, Barry Lai, Mariana Bertoni, Djoudi Bouhafs, Tonio Buonassisi, David P. Fenning, Hele Savin 2016

Boron and phosphorus diffusion gettering: Efficiency, mechanisms and applicability to silicon solar cells

Ville Vähänissi 2016

(oral talk) Removal of iron precipitates in quasi-mono silicon wafers using high-temperature anneal

Hannu Laine, Ville Vähänissi, Zhengjun Liu, Marko Yli-Koski, Hele Savin 2015

(poster) Investigating iron gettering mechanisms in phosphorous-implanted emitters

Hannu Laine, Ville Vähänissi, Ashley E. Morishige, Jasmin Hofstetter, Antti Haarahiltunen, Barry Lai, David P. Fenning, Hele Savin 2015

(poster) Removal of iron precipitates in multicrystalline silicon wafers using high-temperature anneal

Ville Vähänissi, Hannu Laine, Zhengjun Liu, Antti Haarahiltunen, Marko Yli-Koski, Matthias Wagner, Hele Savin 2015

Iron Precipitation upon Gettering in Phosphorus-Implanted Czochralski Silicon and its Impact on Solar Cell Performance

David Fenning, Ville Vähänissi, Ashley Morishige, Hannu Laine, Antti Haarahiltunen, Sergio Castellanos, Mallory Jensen, Hele Savin 2014 Proceeedings of the 40th IEEE Photovoltaic Specialists Conference, Denver, Colorado, USA, June 8-13, 2014

(oral talk) Iron Precipitation upon Gettering in Phosphorus-Implanted Czochralski Silicon and its Impact on Solar Cell Performance

David Fenning, Ville Vähänissi, Ashley Morishige, Hannu Laine, Antti Haarahiltunen, Sergio Castellanos, Mallory Jensen, Hele Savin 2014

(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Ville Vähänissi, Antti Haarahiltunen, Marki Yli-Koski, H. Talvitie, M. I. Asghar, Hele Savin 2009

Honors and awards

Award for high-quality teaching in the academic year 2017-2018

Young Scientist Award (GADEST)

35th EU PVSEC 2018 Student Award

Research groups

Publications