Tomi Laurila

Tomi Laurila

Professor
Professor
T410 Dept. Electrical Engineering and Automation
Professori
Sähkötekniikan ja automaation laitos
Microsystems Technology

Tomi is Professor in the field of Microsystem technology at Aalto University, Finland. His groups research is focused on the synthesis and electrochemical properties of carbon nanomaterials as well as their use in biosensing. The group is especially interested in finding connections between the atomic level and macroscopic properties through a tight combination of experiments and multilevel simulations.

Full researcher profile
https://research.aalto.fi/...
Phone number
+358503414375

Areas of expertise

Research groups

  • Microsystems Technology

Publications

Development of smart molecularly imprinted tetrahedral amorphous carbon thin films for in vitro dopamine sensing

Giorgia Rinaldi, Khadijeh Nekoueian, Jarkko Etula, Tomi Laurila 2025 Journal of Electroanalytical Chemistry

Challenges in aptamer-based sensor development using carbon nanotube networks

Laura Ferrer Pascual, Eero Gustafsson, Juha Siitonen, Vasuki Durairaj, Tomi Laurila 2024 Sensors & diagnostics

Ni Drastically Modifies the Microstructure and Electrochemistry of Thin Ti and Cr Layers

Ayesha Kousar, Ulviyya Quliyeva, Ishan Pande, Jani Sainio, Jaakko Julin, Timo Sajavaara, Hua Jiang, Tomi Laurila 2024 Journal of Physical Chemistry C

Advanced Nanocellulose-Based Electrochemical Sensor for Tetracycline Monitoring

Khadijeh Nekoueian, Katri S Kontturi, Kristoffer Meinander, Ulviyya Quliyeva, Ayesha Kousar, Vasuki Durairaj, Tekla Tammelin, Tomi Laurila 2024 Electrochimica Acta

MIP-Based Electrochemical Sensors in the Detection of Opioids, Benzodiazepines and Psychoactive Compounds

Khadijeh Nekoueian, Tomi Laurila 2024 Molecularly Imprinted Polymers: Path to Artificial Antibodies

Effect of etchant gases on the structure and properties of carbon nanofibers

Ishan Pande, Laura Ferrer Pascual, Ayesha Kousar, Jani Sainio, Hua Jiang, Tomi Laurila 2024 Diamond and Related Materials

Electrochemical detection of amine neurotransmitters is drastically different in buffer solutions, in vivo , and cell culture systems

Jarkko Rantataro, Laura Ferrer Pascual, Tomi Laurila 2024 Electrochemistry Communications

Enhancing electrocatalytic activity in metallic thin films through surface segregation of carbon

Ayesha Kousar, Ulviyya Quliyeva, Ishan Pande, Jani Sainio, Jaakko Julin, Timo Sajavaara, Antti J. Karttunen, Tomi Laurila 2023 Physical Chemistry Chemical Physics

Modulating the Geometry of the Carbon Nanofiber Electrodes Provides Control over Dopamine Sensor Performance

Ayesha Kousar, Ishan Pande, Laura Ferrer Pascual, Emilia Peltola, Jani Sainio, Tomi Laurila 2023 Analytical Chemistry

Introduction of an electrochemical point-of-care assay for quantitative determination of paracetamol in finger-prick capillary whole blood samples

Johanna Kujala, Niklas Wester, Terhi J. Lohela, Mika Kurkela, Janne T. Backman, Björn Mikladal, Tomi Laurila, Jari Koskinen, Tuomas O. Lilius, Eija A. Kalso 2023 British Journal of Clinical Pharmacology

Geometrical and chemical effects on the electrochemistry of single-wall carbon nanotube (SWCNT) network electrodes

Elli Leppänen, Eero Gustafsson, Niklas Wester, Ilkka Varjos, Sami Sainio, Tomi Laurila 2023 Electrochimica Acta

Protein Adsorption and Its Effects on Electroanalytical Performance of Nanocellulose/Carbon Nanotube Composite Electrodes

Touko Liljeström, Katri S. Kontturi, Vasuki Durairaj, Niklas Wester, Tekla Tammelin, Tomi Laurila, Jari Koskinen 2023 Biomacromolecules

An ultra-sensitive dopamine measurement platform based on molecularly imprinted polymer-carbon hybrid nanomaterials for in vitro use

Khadijeh Nekoueian, Maedeh Akhoundian, Niklas Wester, Tomi Laurila 2023 Electrochimica Acta

Correlation between microstructure and surface chemistry of carbon nanofibers grown using different adhesive layers

Ishan Pande, Sami Sainio, Jani Sainio, Ville Liljeström, Hua Jiang, Tomi Laurila 2023 Diamond and Related Materials

Interface matters - Effects of catalyst layer metallurgy on macroscale morphology and electrochemical performance of carbon nanofiber electrodes

Ishan Pande, Laura Ferrer Pascual, Ayesha Kousar, Emilia Peltola, Hua Jiang, Tomi Laurila 2023 Diamond and Related Materials

Real-time selective detection of dopamine and serotonin at nanomolar concentration from complex in vitro systems

Samuel Rantataro, Ilmari Parkkinen, Mikko Airavaara, Tomi Laurila 2023 Biosensors and Bioelectronics

Role of nanocellulose in tailoring electroanalytical performance of hybrid nanocellulose/multiwalled carbon nanotube electrodes

Vasuki Durairaj, Touko Liljeström, Niklas Wester, Peter Engelhardt, Sami Sainio, Benjamin P. Wilson, Panpan Li, Katri S. Kontturi, Tekla Tammelin, Tomi Laurila, Jari Koskinen 2022 Cellulose

Accurate Computational Prediction of Core-Electron Binding Energies in Carbon-Based Materials: A Machine-Learning Model Combining Density-Functional Theory and GW

Dorothea Golze, Markus Hirvensalo, Patricia Hernández-León, Anja Aarva, Jarkko Etula, Toma Susi, Patrick Rinke, Tomi Laurila, Miguel A. Caro 2022 Chemistry of Materials

Structure-property relationships in carbon electrochemistry

Elli Leppänen, Maedeh Akhoundian, Sami Sainio, Jarkko Etula, Olli Pitkänen, Tomi Laurila 2022 Carbon

Nanoscale engineering to control mass transfer on carbon-based electrodes

Laura Ferrer Pascual, Ishan Pande, Ayesha Kousar, Samuel Rantataro, Tomi Laurila 2022 Electrochemistry Communications

Carbonaceous Nanomaterials for Electrochemical Biosensing

Emilia Peltola, Tomi Laurila 2022 Reference Module in Biomedical Sciences

Ascorbic acid does not necessarily interfere with the electrochemical detection of dopamine

Samuel Rantataro, Laura Ferrer Pascual, Tomi Laurila 2022 Scientific Reports

Nanoscale geometry determines mechanical biocompatibility of vertically aligned nanofibers

Samuel Rantataro, Ilmari Parkkinen, Ishan Pande, Andrii Domanskyi, Mikko Airavaara, Emilia Peltola, Tomi Laurila 2022 Acta Biomaterialia

Deriving stair-climbing performance outcome measures using the smartphone barometer

Mette Tengström, Bill Byrom, Sami Volotinen, Ulla Huopaniemi, Tomi Laurila 2022 Contemporary Clinical Trials

X-ray Spectroscopy Fingerprints of Pristine and Functionalized Graphene

Anja Aarva, Sami Sainio, Volker L. Deringer, Miguel A. Caro, Tomi Laurila 2021 Journal of Physical Chemistry C

Functionalized Nanocellulose/Multiwalled Carbon Nanotube Composites for Electrochemical Applications

Vasuki Durairaj, Panpan Li, Touko Liljeström, Niklas Wester, Jarkko Etula, Ilona Leppänen, Yanling Ge, Katri S. Kontturi, Tekla Tammelin, Tomi Laurila, Jari Koskinen 2021 ACS Applied Nano Materials

What Determines the Electrochemical Properties of Nitrogenated Amorphous Carbon Thin Films?

Jarkko Etula, Niklas Wester, Touko Liljeström, Sami Sainio, Tommi Palomäki, Kai Arstila, Timo Sajavaara, Jari Koskinen, Miguel A. Caro, Tomi Laurila 2021 Chemistry of Materials

Nanostructured Geometries Strongly Affect Fouling of Carbon Electrodes

Ayesha Kousar, Emilia Peltola, Tomi Laurila 2021 ACS Omega

Connection between the physicochemical characteristics of amorphous carbon thin films and their electrochemical properties

Elli Leppänen, Anja Aarva, Sami Sainio, Miguel A. Caro, Tomi Laurila 2021 Journal of Physics Condensed Matter

Rapid industrial scale synthesis of robust carbon nanotube network electrodes for electroanalysis

Elli Leppänen, Jarkko Etula, Peter Engelhardt, Sami Sainio, Hua Jiang, Björn Mikladal, Antti Peltonen, Ilkka Varjos, Tomi Laurila 2021 Journal of Electroanalytical Chemistry

Atomic‐Scale Modelling of Electrochemical Systems

Marko Melander, Tomi Laurila, Kari Laasonen 2021

Introduction to Atomic Scale Electrochemistry

Marko Melander, Tomi Laurila, Kari Laasonen 2021 Atomic‐Scale Modelling of Electrochemical Systems

Three-Dimensional Fine Structure of Nanometer-Scale Nafion Thin Films

A. Peltonen, J. Etula, J. Seitsonen, P. Engelhardt, T. Laurila 2021 ACS Applied Polymer Materials

Trends in Carbon, Oxygen, and Nitrogen Core in the X-ray Absorption Spectroscopy of Carbon Nanomaterials : A Guide for the Perplexed

Sami Sainio, Niklas Wester, Anja Aarva, Charles J. Titus, Dennis Nordlund, Esko I. Kauppinen, Elli Leppänen, Tommi Palomäki, Jessica E. Koehne, Olli Pitkänen, Krisztian Kordas, Maria Kim, Harri Lipsanen, Miran Mozetič, Miguel A. Caro, M. Meyyappan, Jari Koskinen, Tomi Laurila 2021 Journal of Physical Chemistry C

Electrochemical Detection of Morphine in Untreated Human Capillary Whole Blood

Elsi Verrinder, Niklas Wester, Elli Leppänen, Tuomas Lilius, Eija Kalso, Bjørn Mikladal, Ilkka Varjos, Jari Koskinen, Tomi Laurila 2021 ACS Omega

Machine learning driven simulated deposition of carbon films

Miguel A. Caro, Gabor Csanyi, Tomi Laurila, Volker L. Deringer 2020 Physical Review B

Effect of Electrochemical Oxidation on Physicochemical Properties of Fe-Containing Single-Walled Carbon Nanotubes

Elli Leppänen, Sami Sainio, Hua Jiang, Bjørn Mikladal, Ilkka Varjos, Tomi Laurila 2020 ChemElectroChem

Electrochemical Detection of Oxycodone and Its Main Metabolites with Nafion-Coated Single-Walled Carbon Nanotube Electrodes

Elsi Mynttinen, Niklas Wester, Tuomas Lilius, Eija Kalso, Bjørn Mikladal, Ilkka Varjos, Sami Sainio, Hua Jiang, Esko Kauppinen, Jari Koskinen, Tomi Laurila 2020 Analytical Chemistry

Time-based Sensor Interface for Dopamine Detection

Olaitan Olabode, Marko Kosunen, Vishnu Unnikrishnan, Tommi Palomäki, Tomi Laurila, Kari Halonen, Jussi Ryynänen 2020 IEEE Transactions on Circuits and Systems I-Regular Papers

Biofouling affects the redox kinetics of outer and inner sphere probes on carbon surfaces drastically differently - implications to biosensing

Emilia Peltola, Anja Aarva, Sami Sainio, Joonas J. Heikkinen, Niklas Wester, Ville Jokinen, Jari Koskinen, Tomi Laurila 2020 Physical chemistry chemical physics : PCCP

Deriving STAIR-Climbing Performance Outcome Measures Using the Smartphone Barometer

M. Tengström, B. Byrom, S. Volotinen, U. Huopaniemi, T. Laurila 2020 VALUE IN HEALTH

Disposable Nafion-Coated Single-Walled Carbon Nanotube Test Strip for Electrochemical Quantitative Determination of Acetaminophen in a Finger-Prick Whole Blood Sample

Niklas Wester, Bjorn F. Mikladal, Ilkka Varjos, Antti Peltonen, Eija Kalso, Tuomas Lilius, Tomi Laurila, Jari Koskinen 2020 Analytical Chemistry

Single-Walled Carbon Nanotube Network Electrodes for the Detection of Fentanyl Citrate

Niklas Wester, Elsi Mynttinen, Jarkko Etula, Tuomas Lilius, Eija Kalso, Bjørn F. Mikladal, Qiang Zhang, Hua Jiang, Sami Sainio, Dennis Nordlund, Esko I. Kauppinen, Tomi Laurila, Jari Koskinen 2020 ACS Applied Nano Materials

Understanding X-ray Spectroscopy of Carbonaceous Materials by Combining Experiments, Density Functional Theory, and Machine Learning. Part I

Anja Aarva, Volker L. Deringer, Sami Sainio, Tomi Laurila, Miguel A. Caro 2019 Chemistry of Materials

Understanding X-ray Spectroscopy of Carbonaceous Materials by Combining Experiments, Density Functional Theory, and Machine Learning. Part II

Anja Aarva, Volker L. Deringer, Sami Sainio, Tomi Laurila, Miguel A. Caro 2019 Chemistry of Materials

Multiwalled Carbon Nanotubes/Nanofibrillar Cellulose/Nafion Composite-Modified Tetrahedral Amorphous Carbon Electrodes for Selective Dopamine Detection

Vasuki Durairaj, Niklas Wester, Jarkko Etula, Tomi Laurila, Janika Lehtonen, Orlando J. Rojas, Nikolaos Pahimanolis, Jari Koskinen 2019 Journal of Physical Chemistry C

Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon

Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen 2019 Micromachines

Effect of thickness and additional elements on the filtering properties of a thin Nafion layer

Elli Leppänen, Antti Peltonen, Jani Seitsonen, Jari Koskinen, Tomi Laurila 2019 Journal of Electroanalytical Chemistry

Simultaneous electrochemical detection of tramadol and O-desmethyltramadol with Nafion-coated tetrahedral amorphous carbon electrode

Elsi Mynttinen, Niklas Wester, Tuomas Lilius, Eija Kalso, Jari Koskinen, Tomi Laurila 2019 Electrochimica Acta

Electric Commercial Vehicles (ECV) : Final report

Nils-Olof Nylund, Matti Säynätjoki, Martti Korkiakoski, Markku Antikainen, Mikko Koskue, Ville Erkkilä, Ari Hentunen, Panu Sainio, Teemu Halmeaho, Antti Lajunen, Teemu Lehmuspelto, Lasse Laurila, Jenni Pippuri-Mäkeläinen, Mikko Pihlatie, Riku Pasonen, Mikaela Ranta, Pertti Järventausta, Kimmo Kauhaniemi, Mikkel Krogsgaard Niss, Jon Stenslet, Reijo Mäkinen, Maria Övergaard, Kirsi Jalkanen, Juha Karppinen, Lasse Skogström, Tomi Laurila, Mikko Nisula, Kai Vuorilehto, Taina Rauhala, Tavo Romann, Enn Lust, Noshin Omar, Tanja Kallio, Pekka Rahkola, Ari-Pekka Pellikka, Sami Ruotsalainen, Kari Tammi, Juhani Laurikko, Seppo Kallonen, Jukka Mäkinen, Daan Nap, Olli Vilppo, Joni Markkula, Jari Kataja, Marko Antila, Paula Silvonen, Ville Tikka, Juha Haakana, Jukka Lassila, Jarmo Partanen, Mika Lötjönen, Antti Rautiainen, Riku Pasonen, Atte Löf, Aushiq Ali Memon, Ville Kaivo, Teemu Raitaluoto, Samu Kukkonen, Jarkko Nokka, Paula Immonen, Juha Pyrhönen, Otto Tammisto, Tatiana Minav, Matti Pietola 2019

A Sensor Interface for Neurochemical Signal Acquisition

Olaitan Olabode, Marko Kosunen, Vishnu Unnikrishnan, Tommi Palomaki, Tomi Laurila, Kari Halonen, Jussi Ryynanen 2019 2019 IEEE 62nd International Midwest Symposium on Circuits and Systems, MWSCAS 2019

Effect of Power Density on the Electrochemical Properties of Undoped Amorphous Carbon (a-C) Thin Films

Tommi Palomäki, Miguel A. Caro, Niklas Wester, Sami Sainio, Jarkko Etula, Leena Sisko Johansson, Jeon G. Han, Jari Koskinen, Tomi Laurila 2019 Electroanalysis

Hybrid X-Ray Spectroscopy-Based approach to acquire chemical and structural information of single-Walled carbon nanotubes with superior sensitivity

Sami Sainio, Niklas Wester, Charles J. Titus, Yongping Liao, Qiang Zhang, Dennis Nordlund, Dimosthenis Sokaras, Sang Jun Lee, Kent D. Irwin, William B. Doriese, Galen C. O'neil, Daniel S. Swetz, Joel N. Ullom, Esko I. Kauppinen, Tomi Laurila, Jari Koskinen 2019 Journal of Physical Chemistry C

In-situ functionalization of tetrahedral amorphous carbon by filtered cathodic arc deposition

Sami Sainio, Niklas Wester, Charles J. Titus, Dennis Nordlund, Sang Jun Lee, Jari Koskinen, Tomi Laurila 2019 AIP Advances

Integrating Carbon Nanomaterials with Metals for Bio-sensing Applications

Sami Sainio, Elli Leppänen, Elsi Mynttinen, Tommi Palomäki, Niklas Wester, Jarkko Etula, Noora Isoaho, Emilia Peltola, Jessica Koehne, M. Meyyappan, Jari Koskinen, Tomi Laurila 2019 Molecular Neurobiology

Simultaneous Detection of Morphine and Codeine in the Presence of Ascorbic Acid and Uric Acid and in Human Plasma at Nafion Single-Walled Carbon Nanotube Thin-Film Electrode

Niklas Wester, Elsi Mynttinen, Jarkko Etula, Tuomas Lilius, Eija Kalso, Esko I. Kauppinen, Tomi Laurila, Jari Koskinen 2019 ACS Omega

Growth Mechanism and Origin of High sp3 Content in Tetrahedral Amorphous Carbon

Miguel A. Caro, Volker L. Deringer, Jari Koskinen, Tomi Laurila, Gábor Csányi 2018 Physical Review Letters

Reactivity of Amorphous Carbon Surfaces

Miguel A. Caro, Anja Aarva, Volker L. Deringer, Gábor Csányi, Tomi Laurila 2018 Chemistry of Materials

Analysis of catechol, 4-methylcatechol and dopamine electrochemical reactions on different substrate materials and pH conditions

Sara Chumillas, Tommi Palomäki, Meng Zhang, Tomi Laurila, Victor Climent, Juan M. Feliu 2018 Electrochimica Acta

Computational Surface Chemistry of Tetrahedral Amorphous Carbon by Combining Machine Learning and Density Functional Theory

Volker L. Deringer, Miguel A. Caro, Richard Jana, Anja Aarva, Stephen R. Elliott, Tomi Laurila, Gábor Csányi, Lars Pastewka 2018 Chemistry of Materials

Characterization and electrochemical properties of iron-doped tetrahedral amorphous carbon (ta-C) thin films

Jarkko Etula, Niklas Wester, Sami Sainio, Tomi Laurila, Jari Koskinen 2018 RSC Advances

Pt-grown carbon nanofibers for detection of hydrogen peroxide

Noora Isoaho, Sami Sainio, Niklas Wester, Luis Botello, Leena Sisko Johansson, Emilia Peltola, Victor Climent, Juan M. Feliu, Jari Koskinen, Tomi Laurila 2018 RSC Advances

Pt-grown carbon nanofibers for enzymatic glutamate biosensors and assessment of their biocompatibility

Noora Isoaho, Emilia Peltola, Sami Sainio, Jari Koskinen, Tomi Laurila 2018 RSC Advances

Special features of the electrochemistry of undoped tetrahedral amorphous carbon (ta-C) thin films

T. Laurila, M. A. Caro 2018 Encyclopedia of Interfacial Chemistry

Unmodified and multi-walled carbon nanotube modified tetrahedral amorphous carbon (ta-C) films as in vivo sensor materials for sensitive and selective detection of dopamine

Tommi Palomäki, Emilia Peltola, Sami Sainio, Niklas Wester, Olli Pitkänen, Krisztian Kordas, Jari Koskinen, Tomi Laurila 2018 Biosensors and Bioelectronics

Electrochemical Fouling of Dopamine and Recovery of Carbon Electrodes

Emilia Peltola, Sami Sainio, Katherine B. Holt, Tommi Palomäki, Jari Koskinen, Tomi Laurila 2018 Analytical Chemistry

Selective detection of morphine in the presence of paracetamol with anodically pretreated dual layer Ti/tetrahedral amorphous carbon electrodes

Niklas Wester, Jarkko Etula, Tuomas Lilius, Sami Sainio, Tomi Laurila, Jari Koskinen 2018 Electrochemistry Communications

Doping as a means to probe the potential dependence of dopamine adsorption on carbon-based surfaces

Anja Aarva, Tomi Laurila, Miguel A. Caro 2017 Journal of Chemical Physics

Redox Potentials from Ab Initio Molecular Dynamics and Explicit Entropy Calculations

Miguel A. Caro, Olga Lopez Acevedo, Tomi Laurila 2017 Journal of Chemical Theory and Computation

Amorphous carbon thin film electrodes with intrinsic Pt-gradient for hydrogen peroxide detection

Noora Isoaho, Niklas Wester, Emilia Peltola, Leena Sisko Johansson, Ana Boronat, Jari Koskinen, Juan Feliu, Victor Climent, Tomi Laurila 2017 Electrochimica Acta

Carbon Nanostructure Based Platform for Enzymatic Glutamate Biosensors

Noora Isoaho, Emilia Peltola, Sami Sainio, Niklas Wester, Vera Protopopova, Benjamin Wilson, Jari Koskinen, Tomi Laurila 2017 Journal of Physical Chemistry C

Pt-Grown Carbon Nanofibers for Enzymatic Detection of Glutamate

Noora Isoaho, Sami Sainio, Niklas Wester, Leena-Sisko Johansson, Jari Koskinen, Tomi Laurila 2017

Application-Specific Catalyst Layers

Tomi Laurila, Sami Sainio, Hua Jiang, Noora Isoaho, Jessica Koehne, Jarkko Etula, Jari Koskinen, M. Meyyappan 2017 ACS Omega

Hybrid carbon based nanomaterials for electrochemical detection of biomolecules

Tomi Laurila, Sami Sainio, Miguel A. Caro 2017 Progress in Materials Science

Thermodynamic-Kinetic method on Microstructural Evolutions in Electronics

Tomi Laurila, Paul Aloke, Hongqun Dong, Vesa Vuorinen 2017 Handbook of Solid State Diffusion

Electron transport determines the electrochemical properties of tetrahedral amorphous carbon (ta-C) thins films

Tommi Palomäki, Niklas Wester, Miguel A. Caro, Sami Sainio, Vera Protopopova, Jari Koskinen, Tomi Laurila 2017 Electrochimica Acta

Defects, Driving Forces and Definitions of Diffusion Coefficients in Solids

Aloke Paul, Tomi Laurila, Sergiy Divinski 2017 Handbook of Solid State Diffusion

Types of Defects, Driving Forces and Diffusion in Solids

Aloke Paul, Tomi Laurila, Sergiy Divinsky 2017 Handbook of Solid State Diffusion

Nanodiamonds on tetrahedral amorphous carbon significantly enhance dopamine detection and cell viability

Emilia Peltola, Niklas Wester, Katherine B. Holt, Leena-Sisko Johansson, Jari Koskinen, Vesa Myllymäki, Tomi Laurila 2017 Biosensors and Bioelectronics

SU-8 Based Pyrolytic Carbon for the Electrochemical Detection of Dopamine

Emilia Peltola, Joonas J. Heikkinen, Katariina Sovanto, Sami Sainio, Anja Aarva, Sami Franssila, Ville Jokinen, Tomi Laurila 2017 JOURNAL OF MATERIALS CHEMISTRY. B

Partially Reduced Graphene Oxide Modified Tetrahedral Amorphous Carbon Thin-Film Electrodes as a Platform for Nanomolar Detection of Dopamine

Niklas Wester, Sami Sainio, Tommi Palomäki, Dennis Nordlund, Vivek Singh, Leena-Sisko Johansson, Jari Koskinen, Tomi Laurila 2017 Journal of Physical Chemistry C

Effect of Ni content on the diffusion-controlled growth of the product phases in the Cu(Ni)-Sn system

Varun A. Baheti, Sarfaraj Islam, Praveen Kumar, Raju Ravi, Ramesh Narayanan, Hongqun Dong, Vesa Vuorinen, Tomi Laurila, Aloke Paul 2016 Philosophical Magazine

Accurate schemes for calculation of thermodynamic properties of liquid mixtures from molecular dynamics simulations

Miguel A. Caro, Tomi Laurila, Olga Lopez-Acevedo 2016 Journal of Chemical Physics

Microstructural Evolution and Mechanical Properties in (AuSn)eut-Cu Interconnections

Hongqun Dong, Vesa Vuorinen, Tomi Laurila, Mervi Paulasto-Kröckel 2016 Journal of Electronic Materials

Microstructural evolution and mechanical properties of Au-20wt.%Sn|Ni interconnection

Hongqun Dong, Vesa Vuorinen, Xuwen Liu, Tomi Laurila, Jue Li, Mervi Paulasto-Kröckel 2016 Journal of Electronic Materials

The role of extra carbon source during the pre-annealing stage in the growth of carbon nanofibers

Tomi Laurila, Sami Sainio, Hua Jiang, Jari Koskinen, Jessica Koehne, Meyya Meyyappan 2016 Carbon

Understanding the Growth of Interfacial Reaction Product Layers between Dissimilar Materials

Tomi Laurila, Aloke Paul 2016 Critical Reviews in Solid State and Materials Sciences

Characterization and Electrochemical Properties of Oxygenated Amorphous Carbon (a-C) Films

Tommi Palomäki, Niklas Wester, Leena-Sisko Johansson, Mikko Laitinen, Hua Jiang, Kai Arstila, Timo Sajavaara, Jeon G. Han, Jari Koskinen, Tomi Laurila 2016 Electrochimica Acta

Correlation between sp3-to-sp2 Ratio and Surface Oxygen Functionalities in Tetrahedral Amorphous Carbon (ta-C) Thin Film Electrodes and Implications of Their Electrochemical Properties

S. Sainio, D. Nordlund, M.A. Caro , R. Gandhiraman, J. Koehne, N. Wester, J. Koskinen, M. Meyyappan, T. Laurila 2016 Journal of Physical Chemistry C

Corrigendum to "Carbon nanotube (CNT) forest on diamond-like carbon (DLC) electrode improves electrochemical sensitivity towards dopamine by two orders of magnitude" [Sens. Actuators B 211 (2015) 177-186]

Sami Sainio, T. Palomäki, S. Rhode, M. Kauppila, O. Pitkänen, T. Selkälä, Geza Toth, K. Kordas, M. Moram, J. Koskinen, Tomi Laurila 2016

Structural morphology of carbon nanofibers grown on different substrates

Sami Sainio, Hua Jiang, Miguel A. Caro, Jessica Koehne, Olga Lopez-Acevedo, Jari Koskinen, Meyya Meyyappan, Tomi Laurila 2016 Carbon

What Does Nitric Acid Really Do to Carbon Nanofibers?

Sami Sainio, Dennis Nordlund, Ramprasad Gandhiraman, Hua Jiang, Jessica Koehne, Jari Koskinen, M. Meyyappan, Tomi Laurila 2016 Journal of Physical Chemistry C

Nano carbon hybride thin films as electrode material in neural sensing

Niklas Wester, Tommi Palomäki, Vivek Singh, Vera Protopopova, Sami Sainio, Noora Tujunen, Tomi Laurila, Jari Koskinen 2016

Effects of local composition fluctuations in nitride alloys: Piezoelectric and electronic properties

Miguel Caro, Stefan Schulz, Siyun Zhang, Tomi Laurila, Eoin "O'Reilly" 2015 ICDS 2015 28th International Conference on Defects in Semiconductors, July 27 - 31, 2015, Espo, Finland

Energy band alignment and electronic states of amorphous carbon surfaces in vacuo and in aqueous environment

Miguel A. Caro, Jukka Määttä, Olga Lopez-Acevedo, Tomi Laurila 2015 Journal of Applied Physics

Energy band alignment at amorphous carbon/water interfaces

Miguel Caro, Jukka Määttä, Olga Lopez-Acevedo, Tomi Laurila 2015 Psi-K-conference, September 6-10, 2015, San Sebastian, Spain

Erratum

Miguel A. Caro, Siyuan Zhang, Markku Ylilammi, Tommi Riekkinen, Michelle A. Moram, Olga Lopez-Acevedo, Jyrki Molarius, Tomi Laurila 2015

Piezoelectric coefficients and spontaneous polarization of ScAlN

Miguel Caro, Siyuan Zhang, Tommi Riekkinen, Markku Ylilammi, Michelle A. Moram, Olga Lopez-Acevedo, Jyrki Molarius, Tomi Laurila 2015 Journal of physics: Condensed matter

Cycle aging of commercial NMC/graphite pouch cells at different temperatures

K. Jalkanen, J. Karppinen, L. Skogström, T. Laurila, M. Nisula, K. Vuorilehto 2015 Applied Energy

Glutamate detection by amino functionalized tetrahedral amorphous carbon surfaces

Emilia Kaivosoja, Noora Tujunen, Ville Jokinen, Vera Protopopova, Santtu Heinilehto, Jari Koskinen, Tomi Laurila 2015 Talanta

Multi-walled carbon nanotubes (MWCNTs) grown directly on tetrahedral amorphous carbon (ta-C): An interfacial study

Tomi Laurila, Sami Sainio, Hua Jiang, Tommi Palomäki, Olli Pitkänen, Krisztian Kordas, Jari Koskinen 2015 Diamond and Related Materials

Trifluoroacetylazobenzene for optical and electrochemical detection of amines

Jhih Fong Lin, Jarmo Kukkola, Teemu Sipola, Dilip Raut, Ajaikumar Samikannu, Jyri Pekka Mikkola, Melinda Mohl, Geza Toth, Wei Fang Su, Tomi Laurila, Krisztian Kordas 2015 JOURNAL OF MATERIALS CHEMISTRY. A

Electrochemical reactions of catechol, methylcatechol and dopamine at tetrahedral amorphous carbon (ta-C) thin film electrodes

Tommi Palomäki, Sara Chumillas, Sami Sainio, Vera Protopopova, Minna Kauppila, Jari Koskinen, Victor Climent, Juan M Feliu, Tomi Laurila 2015 Diamond and Related Materials

Ultrathin undoped tetrahedral amorphous carbon films: The role of the underlying titanium layer on the electronic structure

Vera Protopopova, Ajai Iyer, Niklas Wester, Anastasia Kondrateva, Sami Sainio, Tommi Palomäki, Tomi Laurila, Maxim Mishin, Jari Koskinen 2015 Diamond and Related Materials

Ultrathin undoped tetrahedral amorphous carbon films: thickness dependence of electronic structure and implications to electrochemical behavior

Vera S. Protopopova, Niklas Wester, Miguel A. Caro, Pavel G. Gabdullin, Tommi Palomäki, Tomi Laurila, Jari Koskinen 2015 Physical Chemistry Chemical Physics

Carbon nanotube (CNT) forest grown on diamond-like carbon (DLC) thin films significantly improves electrochemical sensitivity and selectivity towards dopamine

Sami Sainio, Tommi Palomäki, Sneha Rhode, Minna Kauppila, Jouko Lahtinen, Olli Pitkänen, Tuula Selkälä, Geza Toth, Krisztian Kordas, Michelle Moram, Jari Koskinen, Tomi Laurila 2015 Sensors and Actuators B: Chemical

Integrated carbon nanostructures for detection of neurotransmitters

Sami Sainio, Tommi Palomäki, Noora Tujunen, Vera Protopopova, Jessica Koehne, Krisztian Kordas, Jari Koskinen, M. Meyyappan, Tomi Laurila 2015 Molecular Neurobiology

Electrochemical detection of hydrogen peroxide on platinum-containing tetrahedral amorphous carbon sensors and evaluation of their biofouling properties

Noora Tujunen, Emilia Kaivosoja, Vera Protopopova, Juan José Valle-Delgado, Monika Österberg, Jari Koskinen, Tomi Laurila 2015 MATERIALS SCIENCE AND ENGINEERING C: MATERIALS FOR BIOLOGICAL APPLICATIONS

Configurational effects on the piezoelectric properties of ScAlN

Siyan Zhang, Tomi Laurila, Olga Lopez-Acevedo 2015 Psi-K-conference, September 6-10, 2015, San Sebastian, Spain, (2015)

Heat generation in high power prismatic Li-ion battery cell with LiMnNiCoO2 cathode material

Yasir Abdul-Quadir, Tomi Laurila, Juha Karppinen, Kirsi Jalkanen, Kai Vuorilehto, Lasse Skogström, Mervi Paulasto-Kröckel 2014 International Journal of Energy Research

Thermal simulation of high-power Li-ion battery with LiMn1/3Ni1/3Co1/3O2 cathode on cell and module levels

Yasir Abdul-Quadir, Tomi Laurila, Juha Karppinen, Mervi Paulasto-Kröckel 2014 International Journal of Energy Research

Atomic and electronic structure of tetrahedral amorphous carbon surfaces from density functional theory

Miguel A. Caro, Remi Zoubkoff, Olga Lopez-Acevedo, Tomi Laurila 2014 Carbon

Thermodynamic reassessment of Au-Cu-Sn ternary system

Hongqun Dong, Vesa Vuorinen, Xiaoma Tao, Tomi Laurila, Mervi Paulasto-Kröckel 2014 Journal of Alloys and Compounds

Carbon thin films as electrode material in neural sensing

Emilia Kaivosoja, Sami Sainio, Jussi Lyytinen, Tommi Palomäki, Tomi Laurila, Sung I. Kim, Jeon G. Han, Jari Koskinen 2014 Surface and Coatings Technology

Diamond-like carbon (DLC) thin film bioelectrodes: Effect of thermal post treatments and the use of Ti adhesion layer

Tomi Laurila, Antti Rautiainen, Sakari Sintonen, Hua Jiang, Emilia Kaivosoja, Jari Koskinen 2014 MATERIALS SCIENCE AND ENGINEERING C: MATERIALS FOR BIOLOGICAL APPLICATIONS

New electrochemically improved tetrahedral amorphous carbon films for biological applications

Tomi Laurila, Vera Protopopova, Sneha Rhode, Sami Sainio, Tommi Palomäki, Michelle Moram, Juan Feliu, Jari Koskinen 2014 Diamond and Related Materials

Understanding the effect of electromigration on the growth of interfacial reaction layers in Cu-Sn and Cu-Ni-Sn systems

Tomi Laurila, Aloke Paul 2014 Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014

Thermodynamics, Diffusion And The Kirkendall Effect In Solids

Aloke Paul, Tomi Laurila, Vesa Vuorinen, Sergiy Divinsky 2014

Phase evolution in the AuCu/Sn system by solid-state reactive diffusion

Sangeeta Santra, Sarfaraj Islam, Raju Ravi, Vesa Vuorinen, Tomi Laurila, Aloke Paul 2014 Journal of Electronic Materials

Role of different factors affecting interdiffusion in Cu(Ga) and Cu(Si) solid solutions

Sangeeta Santra, Hongqun Dong, Tomi Laurila, Aloke Paul 2014 PROCEEDINGS OF THE ROYAL SOCIETY A: MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES

Thermodynamic modeling of Au-Ce-Sn ternary system

Hongqun Dong, Xiaoma. Tao, Tomi Laurila, Vesa Vuorinen, Mervi Paulasto-Kröckel 2013 Calphad: Computer Coupling of Phase Diagrams and Thermochemistry

Thermodynamic reassessment of Au-Ni-Sn ternary system

Hongqun Dong, Vesa Vuorinen, Tomi Laurila, Mervi Paulasto-Kröckel 2013 Calphad: Computer Coupling of Phase Diagrams and Thermochemistry

Improving the function of dopamine electrodes with novel carbon materials

Emilia Kaivosoja, Emilia Berg, Antti Rautiainen, Tommi Palomäki, Jari Koskinen, Mervi Paulasto-Kröckel, Tomi Laurila 2013 2013 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)

The effect of self-assembled monolayers on glutamate oxidase immobilisation

Emilia Kaivosoja, Ville Jokinen, Noora Tujunen, Tomi Laurila 2013 MME 2013 24th Micromechanics and Microsystems Europe Conference, Espoo, Finland, September 1-4, 2013

Effect of isothermal annealing and electromigration pre-treatments on the reliability of solder interconnections under vibration loading

Tomi Laurila, Juha Karppinen, Jue Li, Vesa Vuorinen, Mervi Paulasto-Kröckel 2013 Journal of Materials Science: Materials in Electronics

Simulation of Dynamic Recrystallization in Solder Interconnections during Thermal Cycling

Jue Li, Tomi Laurila, Toni T. Mattila, Hongbo Xu, Mervi Paulasto-Kröckel 2013 The Study of Recrystallization

Carbon thin films as electrode material in neural sensing

Sami Sainio, Jussi Lyytinen, Tomi Laurila, Sun Kim, Jeon Han, Jari Koskinen 2013 the 9th Asian-European International Conference on Plasma Surface Engineering (AEPSE2013), Jeju, South-Korea, August 25-30

Thermodynamic assessment of Au-Ho and Au-Tm binary systems

Hongqun Dong, Xiaoma Tao, Tomi Laurila, Mervi Paulasto-Kröckel 2012 Calphad: Computer Coupling of Phase Diagrams and Thermochemistry

“The combined effect of shock impacts and operational power cycles on the reliability of a high-density mobile device component board”

Juha S. Karppinen, Tomi Laurila, Toni T. Mattila, Mervi Paulasto-Kröckel 2012 Journal of Electronic Materials

The combined effect of shock impacts and operational power cycles on the reliability of handheld device component board interconnections

J. S. Karppinen, T. Laurila, T. T. Mattila, M. Paulasto-KröCkel 2012 Journal of Electronic Materials

Effect of Isothermal Aging and Electromigration on the Microstructural Evolution of Solder Interconnections During Thermomechanical Loading

Tomi Laurila, Juha Karppinen, Vesa Vuorinen, Jue Li, Mervi Paulasto-Kröckel 2012 Journal of Electronic Materials

Interfacial Compatibility in Microelectronics: Away From the Trial and Error Approach

Tomi Laurila, Vesa Vuorinen, Markus Turunen, Toni T. Mattila, Mervi Paulasto-Kröckel, Jorma Kivilahti 2012

Interfacial reactions between SnAg1.0Ti and Ni metallization

Tomi Laurila, Hongqun Dong, Vesa Vuorinen 2012 Journal of Materials Science: Materials in Electronics

Finite element modeling for reliability assessment of solder interconnections in a power transistor

Jue Li, Juha Karppinen, Tomi Laurila, Vesa Vuorinen, Mervi Paulasto -Kröckel 2012 ESTC 4th Electronic System-Integration Technology Conference, Sept. 17-20, 2012, Amsterdam

Analysis of microstructural evolution in SLID-bonding used for hermetic encapsulation of MEMS devices

Vesa Vuorinen, Hongqun Dong, Hongbo Xu, Sami Vähänen, Tommi Suni, Tomi Laurila, Mervi Paulasto-Kröckel 2012 ESTC 4th Electronic System-Integration Technology Conference, Sept. 17-20, 2012, Amsterdam

Effect of Ti on the interfacial reaction between Sn and Cu

Vesa Vuorinen, Hongqun Dong, Tomi Laurila 2012 Journal of Materials Science: Materials in Electronics

Thermal Investigation of a Battery Module for Work Machines

Yasir Abdul-Quadir, Perttu Heikkilä, Teemu Lehmuspelto, Juha Karppinen, Tomi Laurila, Mervi Paulasto-Kröckel 2011 EuroSimE 2011, Liz, Austria, 18-20th April 2011

Diffusion and growth of the µ phase (Ni6Nb7) in the Ni-Nb system

S.S.K. Balam, Hongqun Dong, Tomi Laurila, Vesa Vuorinen, Aloke Paul 2011 METALLURGICAL AND MATERIALS TRANSACTIONS A: PHYSICAL METALLURGY AND MATERIALS SCIENCE

Thermodynamic assessment of Au-La and Au-Er binary systems

Hongqun Dong, X.M. Tao, H.S. Liu, Tomi Laurila, Mervi Paulasto-Kröckel 2011 Journal of Alloys and Compounds

Effect of constant and cyclic current stressing on the evolution of intermetallic compound layers

Tomi Laurila, Juha Karppinen, Vesa Vuorinen, A. Paul, Mervi Paulasto-Kröckel 2011 Journal of Electronic Materials

Reliability of Electronic Assemblies Under Mechanical Shock Loading

Toni Tuomas Mattila, Tomi Taneli Laurila, Vesa Vuorinen, Jorma Kalevi Kivilahti 2011 The ELFNET Book on Failure Mechanisms, Testing Methods and Quality Issues of Lead-Free Solder Interconnects

Monitoring System for Tracking the Hydrothermal Behaviour of the Building Structures

Mika Mäkitalo, Fahim Al-Neshawy, Tomi Laurila 2011 World Sustainable Building Conference, SB11, Helsinki

Wireless Monitoring Sensor System for Tracking the Hydrothermal Behaviour and Deterioration of Building Structures

Mika Mäkitalo, Fahim Al-Neshawy, Tomi Laurila 2011 Nordic Concrete Research Symbosium, Hämeenlinna, 2011

The use of ICT for monitoring the hygrothermal behavior of building structures

F. Al-Neshawy, Tomi Laurila, V. Vuorinen, M. Mäkitalo 2010 CIB W78 2010, Kairo, Egypti, 16.-19.11.2010

Study of ghrowth of Nb3Sn superconductor in (Cu-Sn)/Nb diffusion couple

A.K. Kumar, Tomi Laurila, V. Vuorinen, A. Paul 2010 Defect and Diffusion Forum

Study on the growth of Nb3Sn superconductor in Cu(Sn)/Nb diffusion couple

A. K. Kumar, T. Laurila, V. Vuorinen, A. Paul 2010 Defect and Diffusion Forum

Diffusion and growth mechanism of Nb3 Sn superconductor grown by bronze technique

T. Laurila, V. Vuorinen, A. K. Kumar, A. Paul 2010 Applied Physics Letters

Impurity and alloying effects on interfacial reaction layers in Pb-free soldering

T. Laurila, V. Vuorinen, M. Paulasto-Kröckel 2010 MATERIALS SCIENCE AND ENGINEERING R: REPORTS

Impurity and Alloying Effects on Reaction Layers in Lead-Free Soldering

Tomi Laurila, Vesa Vuorinen, Mervi Paulasto-Kröckel 2010 MATERIALS SCIENCE AND ENGINEERING R: REPORTS

Simulation of dynamic recrystallization in solder interconnections during thermal cycling

J. Li, H. Xu, T.T. Mattila, J. K. Kivilahti, T. Laurila, M. Paulasto-Kröckel 2010 Computational Materials Science

On the role of electromigration in power cycling tests

Vesa Vuorinen, Juha Karppinen, Tomi Laurila, Aloke Paul, Mervi Paulasto-Kröckel 2010 ESTC 3rd Electronic System-Integration Technology Conference, ESTC 2010; Berlin; 13-20 September 2010

Effect of Ag, Fe, Au and Ni on the growth kinetics of Sn-Cu intermetallic compound layers

Tomi Laurila, Johannes Hurtig, Vesa Vuorinen, Jorma Kivilahti 2009 Microelectronics Reliability

Reliability of Lead-Free Solder Interconnections in Thermal and Power Cycling Tests

Jue Li, Juha Karppinen, Tomi Laurila, Jorma Kalevi Kivilahti 2009 IEEE Transactions on Components and Packaging Technologies

Understanding materials compatibility issues in electronics packaging

M. Paulasto-Kröckel, T. Laurila, V. Vuorinen 2009 Proceedings of the Electronic Packaging Technology Conference, EPTC

Formation of Intermetallic Compounds Between Liquid Sn and Various CuNix Metallizations

Vesa Vuorinen, Hao Yu, Tomi Laurila, Jorma Kivilahti 2008 Journal of Electronic Materials

A comparative study of power cycling and thermal shock tests

J. Karppinen, T. Laurila, J.K. Kivilahti 2007 ESTC 2006 - 1st Electronics Systemintegration Technology Conference

Evolution of microstructure and failure mechanism of lead-free solder interconnections in power cycling and thermal shock tests

Tomi Laurila, Toni Mattila, Vesa Vuorinen, Juha Karppinen, Jue Li, Mika Sippola, Jorma Kivilahti 2007 Microelectronics Reliability

Effect factors behind the reliability of high density lead-free interconnections

Toni Mattila, Tomi Laurila, Jorma Kivilahti 2007 Micro-and Opto Electronic Materials and Structures: Physics,Mechanics;Design, Packaging

Metallurgical factors behind the reliability of high density lead-free interconnections

Toni Mattila, Tomi Laurila, Jorma Kivilahti 2007 Micro-and Optoelectronic Materials and Structures; Physics, Mechanics, Design, Reliability, Packaging

Reliability of Electronic Assemblies Under Mechanical Shock Loading

T.T. Mattila, T. Laurila, Jorma K. Kivilahti 2007 The Blue- White Book on Failure Mechanisms and Testing Methods for Lead-Free Solder Interconnects

Solid-state reactions between Cu(Ni) alloys and Sn

Vesa Vuorinen, Tomi Laurila, Toni Mattila, Erkki Heikinheimo, Jorma Kivilahti 2007 Journal of Electronic Materials

The Role of Intermetallics in The Integrity of Solder Interconnections

T. Mattila, T. Laurila, Jorma K. Kivilahti 2006 Semicon Europa 2006, Munich, Germany

Reactive blending approach to modify spin-coated epoxy film

Markus P.K. Turunen, T. Laurila, J.K. Kivilahti 2006 Journal of Applied Polymer Science

Reactive blending approach to modify spin-coated epoxy film

Markus P.K. Turunen, T. Laurila, J.K. Kivilahti 2006 Journal of Applied Polymer Science

Phase formation between lead-free Sn-Ag-Cu solder and Ni(P)/Au finishes

V. Vuorinen, T. Laurila, H. Yu, J. K. Kivilahti 2006 Journal of Applied Physics

Analysis of the redeposition of AuSn4 on Ni/Au contact pads when using SnPbAg, SnAg, and SnAgCu solders

T. Laurila, V. Vuorinen, T. Mattila, J. K. Kivilahti 2005 Journal of Electronic Materials

Interfacial reactions between lead-free solders and common base materials

Tomi Laurila, Vesa Vuorinen, Jorma Kivilahti 2005 MATERIALS SCIENCE AND ENGINEERING R: REPORTS

Evaluation of electrolessly deposited NiP integral resistors on flexible polyimide substrate

Tuomas F. Waris, Markus P.K Turunen, Tomi Laurila, Jorma K. Kivilahti 2005 Microelectronics Reliability

Analyses of interfacial reactions at different levels of interconnection

T. Laurila, V. Vuorinen, J. K. Kivilahti 2004 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Analyses of Interfacial Reactions at Different Levels of Interconnections

Tomi Laurila, Jorma Kivilahti 2004 European Research Society Conference, Strasbourg, France, 24.-28. May 2004

Interfacial reactions in the Si/TaC/Cu system

Tomi Laurila, J. Molarius, J.K. Kivilahti 2004 Microelectronic Engineering

Reactive blending approach to modify spin-coated epoxy film

Markus P.K Turunen, Tomi Laurila, Kimmo Solehmainen, Jorma K. Kivilahti 2004

Reactive Phase Formation in Thin Film Metal/Metal and Metal/Silicon Diffusion Couples

Tomi Laurila, Jyrki Molarius 2003 Critical Reviews in Solid State and Materials Sciences

Amorphous layer formation at the TaC/Cu interface in the Si/TaC/Cu metallization system

Tomi Laurila, Kejun Zeng, Jorma K. Kivilahti, Jyrki Molarius, Ilkka Suni 2002 Applied Physics Letters

Effect of oxygen on the reactions in Si/Ta/Cu and Si/TaC/Cu systems

T. Laurila, K. Zeng, J. Molarius, T. Riekkinen, I. Suni, J. K. Kivilahti 2002 Microelectronic Engineering

TaC as a diffusion barrier between Si and Cu

Tomi Laurila, Kejun Zeng, Jorma K. Kivilahti, Jyrki Molarius, Iikka Suni 2002 Journal of Applied Physics

Tantalum carbide and nitride diffusion barriers for Cu metallisation

T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, T. Riekkinen, I. Suni 2002 Microelectronic Engineering

Reactive sputter deposition and properties of TaxN thin films

T. Riekkinen, J. Molarius, T. Laurila, A. Nurmela, I. Suni, J. K. Kivilahti 2002 Microelectronic Engineering

Evaluation of the surface free energy of spin-coated photodefinable epoxy

Markus P.K. Turunen, Tomi Laurila, Jorma K. Kivilahti 2002 Journal of Polymer Science Part B: Polymer Physics

Effect of oxygen on the reactions in the Si/Ta/Cu metallization system

Tomi Laurila, Kejun Zeng, Jorma K. Kivilahti, Jyriki Molarius, Ilkka Suni 2001 Journal of Materials Research

Stability of TaC Diffusion BarrierBetween Si and Cu

T. Laurila, K. Zeng, J. Molarius, I. Suni, J.K. Kivilahti 2001

Chemical stability of Ta diffusion barrier between Cu and Si

T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, I. Suni 2000 Thin Solid Films

Failure mechanism of Ta diffusion barrier between Cu and Si

Tomi Laurila, Kejun Zeng, Jorma K. Kivilahti, Jyrki Molarius, Ilkka Suni 2000 Journal of Applied Physics

Reliability of tantalum based diffusion barriers between Cu and Si

T. Laurila, K. Zeng, A. Seppälä, J. Molarius, I. Suni, J. K. Kivilahti 2000 Materials Research Society Symposium - Proceedings

Reactively sputtered Ta2N and TaN diffusion barriers for copper metallization

Jyrki Molarius, Tomi Laurila, Tommi Riekkinen, Kejun Zeng, Antti Niskanen, Markku Leskelä, Ilkka Suni, Jorma K. Kivilahti 2000 Advanced Metallization Conference (AMC)

Chemical stability of tantalum as diffusion barrier between copper and silicon

T. Laurila, K. Zeng, J.M.T. Molarius, I. Suni, J. Kivilahti 1999 11th International Conference on Thin Films, Can Cun Mexico, 30. September 1999

Tantalum-based diffusion barriers for copper metallization

T. Laurila, K. Zeng, J. Kivilahti 1999

R.F.-sputtered tantalum-based diffusion barriers between copper and silicon

J.M.T. Molarius, T. Laurila, K. Zeng, I. Suni, J.K. Kivilahti 1999 11th International Conference on Thin Films, Can Cun Mexico, 30.Augusti - 3.September 1999

Interfacial Reactions in Thin Film Systems

K. Zeng, T. Laurila, J. Kivilahti 1999