People

Ville Miikkulainen

Assistant Professor
Assistant Professor
T105 Chemistry and Materials
Assistant Professor
Department of Chemistry and Materials Science
Full researcher profile
https://research.aalto.fi/...
Email
[email protected]
Postal address
Kemistintie 1 02150 Espoo Finland
Phone number
+358504671835

Honors and awards

JVST A Best ALD Paper Award

Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Award or honor granted for a specific work Department of Chemistry and Materials Science Jun 2021

Research groups

  • Atomically Controlled Materials Engineering, Assistant Professor

Publications

Stabilized Nickel-Rich-Layered Oxide Electrodes for High-Performance Lithium-Ion Batteries

Zahra Ahaliabadeh, Ville Miikkulainen, Miia Mäntymäki, Mattia Colalongo, Seyedabolfazl Mousavihashemi, Lide Yao, Hua Jiang, Jouko Lahtinen, Timo Kankaanpää, Tanja Kallio 2024 Energy and Environmental Materials

Surface and Grain Boundary Coating for Stabilizing LiNi0.8Mn0.1Co0.1O2 Based Electrodes

Zahra Ahaliabadeh, Ville Miikkulainen, Miia Mäntymäki, Seyedabolfazl Mousavihashemi, Lide Yao, Hua Jiang, Simo Huotari, Timo Kankaanpää, Tanja Kallio, Mattia Colalongo 2024 ChemSusChem

Scaling of piezoelectric in-plane NEMS : Towards nanoscale integration of AlN-based transducer on vertical sidewalls

Artem Gabrelian, Ville Miikkulainen, Glenn Ross, Mervi Paulasto-Kröckel 2024 Materials and Design

Ambient pressure x-ray photoelectron spectroscopy study on the initial atomic layer deposition process of platinum

E. Kokkonen, H. E. Nieminen, F. Rehman, V. Miikkulainen, M. Putkonen, M. Ritala, S. Huotari, J. Schnadt, S. Urpelainen 2024 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

High Voltage Cycling Stability of LiF-Coated NMC811 Electrode

Princess Stephanie Llanos, Zahra Ahaliabadeh, Ville Miikkulainen, Jouko Lahtinen, Lide Yao, Hua Jiang, Timo Kankaanpää, Tanja Kallio 2024 ACS Applied Materials and Interfaces

Atomic layer deposition apparatus

Ville Miikkulainen, Hulda Aminoff, Pekka Soininen, Pekka Soininen 2023

An Atomic Layer Deposition Apparatus

Hulda Aminoff, Pekka Soininen, Pekka J Soininen, Ville Miikkulainen 2022

Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research

E. Kokkonen, Mikko Kaipio, H. E. Nieminen, F. Rehman, V. Miikkulainen, M. Putkonen, Mikko Ritala, S. Huotari, J. Schnadt, S. Urpelainen 2022 Review of Scientific Instruments

Understanding the Stabilizing Effects of Nanoscale Metal Oxide and Li-Metal Oxide Coatings on Lithium-Ion Battery Positive Electrode Materials

Zahra Ahaliabadeh, Ville Miikkulainen, Miia Mäntymäki, Seyedabolfazl Mousavihashemi, Jouko Lahtinen, Lide Yao, Hua Jiang, Kenichiro Mizohata, Timo Kankaanpää, Tanja Kallio 2021 ACS Applied Materials and Interfaces

Highly Material Selective and Self-Aligned Photo-assisted Atomic Layer Deposition of Copper on Oxide Materials

Ville Miikkulainen, Marko Vehkamäki, Kenichiro Mizohata, Timo Hatanpää, Mikko Ritala 2021 Advanced Materials Interfaces

Constructing Spacecraft Components Using Additive Manufacturing and Atomic Layer Deposition: First Steps for Integrated Electric Circuitry

Leo Nyman, Antti Kestilä, Paavo Porri, Marko Pudas, Mika Salmi, Rudolf Silander, Ville Miikkulainen, Mikko Kaipio, Esa Kallio, Mikko Ritala 2021 Journal of Aerospace Engineering

Synchronizing gas injections and time-resolved data acquisition for perturbation-enhanced APXPS experiments

Evgeniy A. Redekop, Niclas Johansson, Esko Kokkonen, Samuli Urpelainen, Felipe Lopes Da Silva, Mikko Kaipio, Heta Elisa Nieminen, Foqia Rehman, Ville Miikkulainen, Mikko Ritala, Unni Olsbye 2021 Review of Scientific Instruments

Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls

Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel 2021 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

TiO2 Photocatalyzed Oxidation of Drugs Studied by Laser Ablation Electrospray Ionization Mass Spectrometry

Fred A. M. G. van Geenen, Maurice C. R. Franssen, Ville Miikkulainen, Mikko Kalervo Ritala, Han Zuilhof, Risto Kalervo Kostiainen, Michel W. F. Nielen 2019 Journal of the American Society for Mass Spectrometry

Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors

Ville Miikkulainen, Katja Väyrynen, Kenichiro Mizohata, Jyrki Räisänen, Marko Vehkamäki, Mikko Ritala 2019 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition

Heta Elisa Nieminen, Ville Miikkulainen, Daniel Settipani, Laura Simonelli, Philipp Hönicke, Claudia Zech, Yves Kayser, Burkhard Beckhoff, Ari Pekka Honkanen, Mikko J. Heikkilä, Kenichiro Mizohata, Kristoffer Meinander, Oili M.E. Ylivaara, Simo Huotari, Mikko Ritala 2019 Journal of Physical Chemistry C

Towards space-grade 3D-printed, ALD-coated small satellite propulsion components for fluidics

Antti Kestilä, Kalle Nordling, Ville Miikkulainen, Mikko Kaipio, Tuomas Tikka, Mika Salmi, Aleksi Auer, Markku Leskelä, Mikko Ritala 2018 Additive Manufacturing

(Invited) Photo-Assisted ALD

Ville Miikkulainen, Katja Väyrynen, Väinö Kilpi, Zhongmei Han, Marko Vehkamäki, Kenichiro Mizohata, Jyrki Räisänen, Mikko Kalervo Ritala 2017 ECS Transactions

TiO2 Photocatalysis-DESI-MS Rotating Array Platform for High-Throughput Investigation of Oxidation Reactions

Miina Maarit Hennikki Ruokolainen, Ville Miikkulainen, Mikko Kalervo Ritala, Tiina Marjukka Sikanen, Tapio Kotiaho, Risto Kalervo Kostiainen 2017 Analytical Chemistry

Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate

Amund Ruud, Ville Miikkulainen, Kenichiro Mizohata, Helmer Fjellvag, Ola Nilsen 2017 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

Studies of the Electrochemical Behavior of LiNi0.80Co0.15Al0.05O2 Electrodes Coated with LiAlO2

Onit Srur-Lavi, Ville Miikkulainen, Boris Markovsky, Judith Grinblat, Michael Talianker, Yafit Fleger, Gili Cohen-Taguri, Albert Mor, Yosef Tal-Yosef, Doron Aurbach 2017 Journal of the Electrochemical Society

Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer deposition

Y. Hu, A. Ruud, V. Miikkulainen, T. Norby, O. Nilsen, H. Fjellvåg 2016 RSC Advances

Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

W. A. Lanford, M. Parenti, B. J. Nordell, M. M. Paquette, A. N. Caruso, M. Mäntymäki, J. Hämäläinen, M. Ritala, K. B. Klepper, V. Miikkulainen, O. Nilsen, W. Tenhaeff, N. Dudney, D. Koh, S. K. Banerjee, E. Mays, J. Bielefeld, S. W. King 2016 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials

Karina B Klepper, Ville Miikkulainen, Ola Nilsen, Helmer Fjellvåg, Ming Liu, Dhanadeep Dutta, David Gidley, William Lanford, Liza Ross, Han Li, Sean W King 2015 Innovative Interconnects/Electrodes for Advanced Devices, Flexible and Green-Energy Electronics

Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

V. Miikkulainen, O. Nilsen, Han Li, S.W. King, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg 2015 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Atomic layer deposition of spinel lithium manganese oxide by film-body-controlled lithium incorporation for thin-film lithium-ion batteries

V. Miikkulainen, A. Ruud, Erik Østreng, Ola Nilsen, Mikko Laitinen, Timo Sajavaara, Helmer Fjellvåg 2014 Journal of Physical Chemistry C

Erratum: Atomic layer deposition of spinel lithium manganese oxide by film-body-controlled lithium incorporation for thin-film lithium-ion batteries (J. Phys. Chem. C (2014) 118: 2 (1258-1268) DOI: 10.1021/jp409399y)

V. Miikkulainen, A. Ruud, Erik Østreng, Ola Nilsen, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg 2014 Journal of Physical Chemistry C

Atomic layer deposition of functional films for Li-ion microbatteries

Ola Nilsen, V. Miikkulainen, K.B. Gandrud, Erik Østreng, A. Ruud 2014 Physica Status Solidi (A) Applications and Materials Science

Atomic layer deposition of LixTiyOz thin films

V. Miikkulainen, O. Nilsen, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg 2013 RSC Advances

Crystallinity of inorganic films grown by atomic layer deposition

Ville Miikkulainen, Markku Leskelä, Mikko Ritala, Riikka L. Puurunen 2013 Journal of Applied Physics

Erratum: Atomic layer deposition of LixTiyO z thin films (RSC Advances (2013) 3 (7537-7542) DOI:10.1039/ C3RA40745D)

V. Miikkulainen, O. Nilsen, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg 2013 RSC Advances

ALD of thin films for lithium ion batteries

Titta Aaltonen, V. Miikkulainen, K.B. Gandrud, A. Pettersen, O. Nilsen, H. Fjellvåg 2011 ECS Transactions

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

Riikka L. Puurunen, Timo Sajavaara, Eero Santala, Ville Miikkulainen, Tapio Saukkonen, Mikko Laitinen, Markku Leskelä 2011 Journal of Nanoscience and Nanotechnology

Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer coated paperboard

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Jaana Marles, Ville Miikkulainen, Maarit Karppinen 2010 Applied Surface Science

Atomic layer deposition as pore diameter adjustment tool for nanoporous aluminum oxide injection molding masks

V. Miikkulainen, T. Rasilainen, E. Puukilainen, M. Suvanto, Tapani A. Pakkanen 2008 Langmuir

Bis(tert-butylimido)-bis(dialkylamido) complexes of molybdenum as atomic layer deposition (ALD) precursors for molybdenum nitride: The effect of the alkyl group

V. Miikkulainen, Mika Suvanto, Tapani A. Pakkanen 2008 Chemical Vapor Deposition

Molybdenum nitride nanotubes

V. Miikkulainen, M. Suvanto, T.A. Pakkanen 2008 Thin Solid Films

Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts

V. Miikkulainen, Mika Suvanto, Tapani A. Pakkanen, Samuli Siitonen, P. Karvinen, Markku Kuittinen, Hannu Kisonen 2008 Surface and Coatings Technology

Atomic layer deposition of molybdenum nitride from bis(tert-butylimido)- bis(dimethylamido)molybdenum and ammonia onto several types of substrate materials with equal growth per cycle

V. Miikkulainen, Mika Suvanto, T.A. Pakkanen 2007 Chemistry of Materials

Mono- and heterometallic carbonyl precursor based RuMo/Al<inf>2</inf>O<inf>3</inf> catalysts: Hydrodesulfurization activity and temperature programmed studies

Patrícia Pinto, Maria José Calhorda, T. Straub, V. Miikkulainen, Jarkko Räty, M. Suvanto, T.A. Pakkanen 2001 Journal of Molecular Catalysis A: Chemical